The invention relates to an embedded low-
voltage nano-gate ferroelectric
transistor structure and a preparation method thereof, and relates to the field of memory devices, the embedded low-
voltage nano-gate ferroelectric
transistor structure comprises a
silicon-based
CMOS logic circuit, the
silicon-based
CMOS logic circuit is provided with a first insulating
dielectric layer and a plurality of horizontally arranged nano-gate ferroelectric transistors, a second insulating medium layer is arranged between every two adjacent nano-gate ferroelectric transistors; the nanometer gate ferroelectric
transistor comprises a gate
metal interconnection, a third insulating
dielectric layer, a ferroelectric layer, a
metal floating gate, a
gate dielectric layer, a channel material layer and a source and drain
electrode which are arranged from bottom to top, and the bottom of the gate
metal interconnection is connected with the
silicon-based
CMOS logic circuit through a connecting line penetrating through the first insulating
dielectric layer; metal nano-gates are vertically arranged on the two sides of the gate metal
interconnection and the third insulating
dielectric layer, the tops of the metal nano-gates are in contact with the ferroelectric layer, and side walls are arranged between the metal nano-gates and the second insulating
dielectric layer. According to the invention, ultra-low
power consumption edge computing application can be met, and storage and computing integrated operation is supported.