This application provides a
supercritical carbon dioxide drying device, relating to the field of precision cleaning and
drying technology. The device includes a
storage tank, a
drying unit, a gas-liquid separator, and a compression subsystem. The drying unit includes a pressure tank and a vacuum tank. A cleaning cylinder is installed through the pressure tank, and the cleaning cylinder contains a control chamber and a cleaning chamber. The cleaning cylinder has a liquid inlet. A first
piston in the control chamber, driven by a first driving component, can control the connection between the cleaning chamber and the pressure tank through the liquid inlet. The cleaning chamber is connected to the vacuum tank via a connecting
pipe and a first control mechanism. A second control mechanism is installed on the air inlet connected to the cleaning chamber. The pressure tank is connected to the
storage tank via a
booster pump and a preheater. The vacuum tank is connected to the gas-liquid separator via a first control valve and a first
vacuum pump. The cleaning cylinder has an venting
pipe connected to the cleaning chamber, and a second control valve and a second
vacuum pump are installed on the venting
pipe. This device can achieve non-destructive drying with a short drying cycle.