The invention discloses a
Fresnel zone plate spectrum
confocal measurement method. The method comprises the following steps: constructing a spectrum
confocal measurement device, performing direct chromatic dispersion focusing by using the
Fresnel zone plate which replaces a lens or a lens group; monitoring an axial location of a
standard plane mirror, calibrating linear axial focusing range of theFresnel
zone plate and the
wavelength-location relation of the spectrum
confocal measurement device; replacing the standard planar mirror as the to-be-measured sample, placing a to-be-measured surface of the sample in the measurement range of the device to perform measurement; performing the chromatic dispersion on the composite
light source along the axial direction of the
Fresnel zone plate, thereby producing color zones corresponding to different wavelengths, returning the
light field with the
wavelength corresponding to the focal point focused on the sample surface along an original lightpath, enabling a
spectrograph to detect a return
signal intensity point
diffusion function, computing a peak coordinate location by utilizing a
centroid method, and obtaining the location informationof the sample
measurement point according to the
wavelength-location
calibration curve. Compared with the traditional spectrum confocal measurement, the method has the advantages of being simple in structure, flexible in design, and low in cost.