The invention relates to a micro-
system packaging shell with a heterogeneous integrated double-sided cavity structure and a manufacturing method. The micro-
system packaging shell comprises a shell body, a
metal bottom plate is installed in the middle of the shell body, the shell body forms the double-sided cavity structure, the micro-
system packaging shell also comprises an upper
metal frame and a lower
metal frame, the middle of the metal bottom plate is hollow, and amultilayer
ceramic substrate is embedded in the hollow; cavities are formed in the surface and the bottom surface of the multilayer
ceramic substrate; the upper metal frame and the lower metal frame form sealing between the multilayer
ceramic substrate and the metal bottom plate; a substrate step structure is arranged at the edge of the multilayer
ceramic substrate, a bottom plate step structure is also arranged at the hollow edge of the metal bottom plate, and the substrate step structure is matched with the bottom plate step structure; a through hole is formed in the multilayer
ceramic substrate, a step is arranged in the through hole, and an SMP glass insulator is embedded in the through hole; notches are formed in the side walls of the upper metal frame and the lower metal frame, and
ceramic insulators are embedded into the notches. Multi-
chip airtight packaging can be realized, the
microwave performance is good, and the reliability is high.