The invention relates to the field of reaction control systems, and discloses a multi-element
atmosphere reaction control system for CVD (
chemical vapor deposition)
continuous production equipment, which comprises a furnace body, three gas inlet pipes are arranged in a 120-degree area on the periphery of the furnace body at equal intervals in a staggered manner, the three gas inlet pipes form a group, and a plurality of groups of gas inlet pipes are arranged along the axis direction of the furnace body; an anti-preheating mechanism for preventing preheating of the air inlet
pipe is arranged on the periphery of the air inlet
pipe so as to protect the
atmosphere; the preheating prevention mechanism is provided with an inner cavity and an outer cavity, and cooling liquid acts on the air inlet
pipe through the vibration mechanism in the process of flowing from the outer cavity to the inner cavity. According to the invention, multiple groups of gas inlet pipes are cooperated with a preheating prevention mechanism, so that the equipment efficiency is improved, single-point gas inlet is changed into multiple groups of gas inlet towards the central axis, and a baffle plate is matched, so that the
carbon source concentration difference and the
coating layer deviation are reduced; the temperature of the air inlet pipe is reduced through the anti-preheating mechanism to reduce
atmosphere decomposition in advance, and the vibration mechanism cleans the air inlet pipe under the action of the
water flow amplifier; the filter screen and the spiral belt block residues, and
nitrogen is introduced through the three-way valve for back flushing, so that the material
utilization rate is increased.