The invention discloses a heterogeneous metal stacked grid strained silicon-germanium on insulator p-channel metal oxide semiconductor field effect tube (SSGOI pMOSFET) device structure, which comprises a heterogeneous metal stacked grid structure, a grid insulation layer, an intrinsic or n-doped strained Si channel layer, a strained Si1-xGex layer of which an intrinsic or n-doped component is changed gradually, an n-doped relaxation Si1-yGey layer, a stepped oxygen buried layer and an n-doped substrate part sequentially from top to bottom, wherein the n-doped substrate part consists of four parts, namely an n<+>-doped relaxation Si1-yGey layer, an n<->-doped relaxation Si1-yGey buffer layer, an n-doped relaxation SiGe gradient layer and an n<->-doped monocrystal Si(100) substrate. The device has a simple structure, can be totally compatible with the conventional Si silicon on insulator (SOI) process, is integrated with the advantages of grid engineering, strain engineering and substrate engineering, and makes a complementary metal-oxide-semiconductor structure process simply integrated.