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206results about How to "Close fast" patented technology

Vapor phase decomposition device for semiconductor wafer pollutant measurement apparatus and door opening and closing device

Provided is a vapor phase decomposition (VPD) device for a semiconductor wafer pollutant measurement apparatus and a door opening and closing device thereof. The VPD device includes: a rectangular vessel-shaped main body of the VPD device and a door which covers in a sealed form or opens the wafer inlet of the VPD device. Here, a predetermined space is formed in the inner portion of the rectangular vessel-shaped main body, support plates are formed on the bottom of the rectangular vessel-shaped main body and gas discharge and suction nozzles are located therein. In addition, a transparent see-through window is formed on the upper surface of the rectangular vessel-shaped main body, a detection electrode for controlling an inner atmosphere is formed at the center of the transparent see-through window, and one side surface of the rectangular vessel-shaped main body is opened to thus form a wafer inlet for introducing a wafer. The door opening and closing device includes: a forward and backward movement unit having cylinder loads, air cylinders, and plates, to make the door move forward and backward in order to open and close the wafer inlet of the main body of the VPD device; and an ascent and descent movement unit having a fixed plate, guide bars, a slide block, and a cylinder.
Owner:KOREA TECH CO LTD

Cam oil-supply type electro-hydraulic valve driving system

The invention discloses a cam oil-supply type electro-hydraulic valve driving system and belongs to a variable-valve cam oil-supply type electro-hydraulic valve driving system of an engine. The cam oil-supply type electro-hydraulic valve driving system mainly comprises an oil supplier, a valve driving mechanism, an oil tank, a connection oil line and an electromagnetic valve. An opposed cam-plunger oil supplier is designed according to the number of cylinders of the engine and the ignition order, and hydraulic oil can be provided for all intake / exhaust valve driving mechanisms of the engine by using only two oil suppliers. A variable intake / exhaust valve can be realized and energy required by valve drive can be reduced by controlling a first electromagnetic valve between an oil supply oil cavity and a driving oil cavity. The secondary opening of the exhaust valve is realized by controlling a fifth electromagnetic valve. Energy consumption for charging the oil supply oil cavity can be reduced by matching a second electromagnetic valve between the oil supply cavity and the oil tank with a fourth electromagnetic valve between a forward oil supply oil cavity and a reverse oil supply oil cavity. When a third electromagnetic valve is used, a valve seat buffer and a valve gap regulator are saved, the valve closing speed is increased and the valve closing range is broadened.
Owner:DALIAN UNIV OF TECH

Monostable axial-flow type solenoid valve based on uncoupled permanent magnet bias

The invention relates to a monostable axial-flow type solenoid valve based on uncoupled permanent magnet bias. The monostable axial-flow type solenoid valve comprises a permanent magnet assembly, a valve body assembly and an armature assembly, a coil, a valve seat and an outer magnetizer; the valve body assembly comprises an upper valve body, a magnetism isolating ring and a lower end cover; the armature assembly comprises an armature cover, an armature, a reed and a baffle plate; the coil forms an electromagnetic loop through the upper valve body, a main body part of the armature, the lower end cover, the magnetism isolating ring and the outer magnetizer; the permanent magnet and the armature cover form a permanent magnet loop through an air gap; the electromagnetic loop and the permanent magnet loop respectively form starting force on the armature assembly. A permanent magnet bias loop and a coil electromagnetic loop are independent from each other, so that influence of the permanent magnet on the coil electromagnetic loop is eliminated; the permanent magnet bias loop and the coil electromagnetic loop are linearly superposed, so that the monostable solenoid valve is simple in magnetic path design; and requirements on starting electromagnetic force are reduced by virtue of permanent magnet biasing force.
Owner:BEIJING INST OF CONTROL ENG
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