The invention discloses a preparation method of fluorinated ceria polishing powder under microwave condition, belonging to the technical field of nano rare earth material preparation, comprising the following steps: 3 ) 3 ·6H 2 O was dissolved in deionized water, preheated by microwave, and NH was added to it 4 F; will NH 4 HCO 3 Dissolve in deionized water, add preheated Ce(NO3) to it 3 ·6H 2 O and NH 4 F mixed solution, under microwave conditions, isothermal precipitation reaction generates Ce 2 (CO 3 ) 3 the precursor, and continue to age; the precursor reaction solution is filtered to obtain precipitate, dried at constant temperature, and ground into powder; the precursor powder is calcined to obtain ceria fluoride polishing powder; preparation by the method of the present invention The crystallinity of the fluorided ceria powder particles is high, the morphology is regular (like) spherical, the particle size distribution is uniform, and the dispersibility is good, which further improves the polishing efficiency and polishing accuracy of the fluorided ceria powder.