The invention provides an SOI
wafer with
high heat dissipation performance and a preparation method of the SOI
wafer. The SOI
wafer sequentially comprises a bulk
silicon wafer, a
buried oxide layer and a
silicon device layer, a groove with a preset depth is formed in one side, close to the
buried oxide layer, of the bulk
silicon wafer, the groove is filled with a high-thermal-
conductivity material, the high-thermal-
conductivity material is fixed by adopting heat dissipation glue, and the high-thermal-
conductivity material is a carbon
nano tube or
molybdenum disulfide. According to the invention, the grooves are formed in the bulk silicon wafer, and the grooves are filled with the high-thermal-conductivity material made of the carbon nanotubes or the
molybdenum disulfide, so that the heat dissipation performance of an SOI circuit can be effectively improved based on the high
thermal conductivity of the carbon nanotubes and the
molybdenum disulfide, and the size of the SOI wafer is made to be larger; in addition, the high-thermal-conductivity material is arranged in the bulk silicon wafer, the area of the silicon device layer is not affected, the
utilization rate of the active region is improved, the cost is reduced, and the integration level is improved.