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A metallized optical window side electrode plating adjustable tooling and method of use thereof

PendingCN122105345AHighly easy to controleasy to controlVacuum evaporation coatingSputtering coatingTransparent conducting filmElectrode pair
The application relates to a metalized optical window side electrode plating adjustable tool and a use method thereof, and belongs to the technical field of optical part manufacturing. The adjustable tool comprises a support frame, a clamping sleeve and an adjustable bottom plate assembly. The clamping sleeve is composed of a plurality of fan-shaped clamping petals which are installed on support columns through radial adjusting structures and can adapt to different size windows by adjusting the radial positions of the clamping petals and jointly limit the side electrode plating height; the adjustable bottom plate assembly adjusts the shielding gap between the bottom plate and the window bottom surface through a threaded pair; the adjustable tool is also provided with an elastic leveling and pressing mechanism for fine adjustment of the window posture and buffer pressing. The application realizes control of the side electrode height of different specifications of inverted conical optical windows, the overlapping and coinciding area of the electrode and the transparent conductive film layer, effectively prevents pollution of the light transmission area caused by electrode plating, ensures conduction between the electrode and the transparent conductive film layer, is stable in clamping and has strong universality, and is suitable for batch production.
Owner:西安应用光学研究所