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30results about How to "Improved Threshold Voltage Stability" patented technology

Enhanced high electronic mobility transistor and manufacturing method thereof

The invention discloses an enhanced high electronic mobility transistor and a manufacturing method thereof. The transistor comprises a substrate, a channel layer located above the substrate, a barrier layer located on the channel layer, a groove located in the barrier layer; a secondary growth semiconductor epitaxial layer located on the groove, an orthotopic dielectric layer located on the secondary growth semiconductor epitaxial layer, a grid electrode located on the orthotopic dielectric layer, a source electrode located on the barrier layer and a drain electrode located on the barrier layer, wherein a two-dimensional electron gas is formed at an interface position of the barrier layer and the channel layer. By using the enhanced high electronic mobility transistor, material damages and defects caused by etching can be reduced, an interface state density of the groove and the secondary growth semiconductor epitaxial layer and an interface state density of the orthotopic dielectric layer and the secondary growth semiconductor epitaxial layer are decreased, electric leakage of the grid electrode is reduced, a breakdown voltage and power performance of the transistor are increased and a degradation effect of a dynamic conduction resistor is reduced.
Owner:GPOWER SEMICON

GaN-based field effect transistor with high quality MIS structure and preparation method of GaN-based field effect transistor

The invention belongs to the semiconductor material and device field and discloses a GaN-based field effect transistor with a high quality MIS structure and a preparation method of the GaN-based field effect transistor, in particular, a GaN MISFET device gate dielectric layer and an improvement method of a dielectric layer and GaN interface. The device includes a substrate, an epitaxial layer grown on the substrate as well as a gate electrode, a source electrode, a drain electrode and an insulating layer; the epitaxial layer includes a stress buffer layer which is formed through primary epitaxial growth, a GaN epitaxial layer as well as a second epitaxial layer and a third epitaxial layer which are grown on selective regions on the GaN epitaxial layer; a GaN/AlGaN heterostructure is formed through secondary epitaxial growth, and groove channels are formed; an AlN thin layer is formed through third epitaxial growth; the AlN thin layer is partially oxidized so as to form an AlN/oxide dielectric layer stack structure; gate metal covers the groove channels; a source electrode region and a drain electrode region are formed at two ends; and the source electrode region and the drain electrode region are covered with metal, so that the source electrode and the drain electrode can be formed. The device and preparation process of the invention are simple and reliable. With the preparation method adopted, the high quality MIS structure can be formed, and the performance of the GaN MISFET device can be improved. The preparation method can play a key role in decreasing the electric leakage of the gate electrode, decreasing the resistance of the channels and stabilizing threshold voltage.
Owner:SUN YAT SEN UNIV

Preparation method of low-temperature polycrystalline silicon film, TFT, array base plate and display device

The invention provides a preparation method of a low-temperature polycrystalline silicon film, a TFT, an array base plate and a display device, relates to the technical field of display, and aims at achieving the purposes that an LTPS film prepared by using an ELA method is relatively large in crystal grain size and relatively small in crystal boundary in an area between a source and a drain corresponding to the TFT, the TFT drain current is reduced, and the threshold voltage stability is improved. The preparation method comprises the following steps: forming a buffer layer and an amorphous silicon film; forming an optical layer on the amorphous silicon film, so that the temperature generated when a preset area is radiated by laser is smaller than that generated when other areas are radiated by laser when the amorphous silicon film is subjected to laser annealing treatment; supplying different refractive indexes to the optical layer and the amorphous silicon film; performing laser annealing treatment on the amorphous silicon film so as to convert the amorphous silicon film into a low-temperature polycrystalline silicon film; enabling the size of polycrystalline silicon grains inside the preset area to be greater than that of the polycrystalline silicon grains in other areas. The preparation method is adopted to prepare low-temperature polycrystalline silicon films and thin film transistors with the low-temperature polycrystalline silicon films.
Owner:BOE TECH GRP CO LTD

Manufacturing method for groove grid power device and structure

The invention discloses a manufacturing method for a groove grid power device. Formation steps of each cell of a conduction region comprise that a hard mask layer is formed, and a groove is formed through photolithographic etching; a grid medium layer and a polysilicon grid are formed in the groove; an opening of the hard mask layer is enlarged through isotropic etching, and a self-aligning column is formed; a body region is formed; a source region is formed; deposition of an interlayer film is carried out; chemical mechanical grinding planarization for the interlayer film is carried out to the surface of the top portion of the self-aligning column; an opening of a contact hole at the top portion of the source region formed at the self-aligning column is removed; and metal is filled into the contact hole. The invention further discloses a groove grid power device. According to the manufacturing method, self-aligning definition of the contact hole can be realized, registration redundancy is not needed to consider, the contact hole does not require the exposure technology, manufacturing cost is saved, so threshold voltage stability of the device can be improved, unit dimensions of the device are reduced, and conduction resistance is reduced.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

GaN E/D integrated device production method based on two-step oxidation method

The invention discloses a GaN E/D integrated device production method based on a two-step oxidation method. Based on the traditional depletion A1GaN(A1InN)/ A1N/GaN heterostructure, the barrier layer thickness can be controlled accurately by using the oxidation method, and the thickness of the barrier layer can be reduced to a half of the original thickness after the first oxidation process, and the high concentration electron gas can be maintained in the channel, and the medium generated by the oxidation can be used as the D-mode device gate dielectric. The medium of the E-mode device gate dielectric area can be removed, and the barrier layer can be consumed completely after the second oxidation process, and the two-dimensional electron gas can be consumed in the channel, and at the same time, the E-mode device gate dielectric can be generated. The same two-step oxidation technologies can be completed, the E-mode device technology and the D-mode device technology can be completely compatible, and the thicknesses of the gate dielectrics are the same, and therefore the device structures and the device performances can be cooperated with each other. The production of the E-mode device can be realized by using the oxidation method to reduce the thickness of the barrier layer, and the processing controllability is high; the E-mode technology and the D-mode technology can be completely compatible, and the thickness of the E-mode device gate dielectric and the thickness of the D-mode device gate dielectric are the same, the performances are cooperated with each other, and then the yield of the GaN E/D integrated circuit can be improved.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

GaN MISFET device with high-quality gate interface and preparation method thereof

The invention relates to a GaN MISFET device with a high-quality gate interface and a preparation method thereof. The device comprises a substrate, and an epitaxial layer, a gate dielectric layer, a source, a drain and a gate which grown on the substrate. The epitaxial layer comprises a stress buffer layer and a GaN epitaxial layer which are grown in a primary epitaxial mode; a secondary epitaxiallayer is grown on a reselection area thereon, and a groove channel is formed; a high-quality SiO2 mask layer subjected to high-temperature annealing in the secondary epitaxy is retained as a first gate dielectric layer, and a second gate dielectric layer is grown on the mask layer. Gate metal covers the gate dielectric layer of the groove channel, and two ends of the gate are covered with metal to form the source and the drain. Compared with an existing method, in which the SiO2 mask layer is removed and then a gate dielectric layer is deposited; the device structure and the preparation process of the invention are simpler and more reliable, and the quality of the gate dielectric layer and the dielectric layer / GaN interface are better optimized, so that the performance of the GaN MISFET device is improved, and particularly, it is very critical to improvement of the problems in reduction of the channel resistance, the gate electric leakage, the threshold voltage stability and the like.
Owner:SUN YAT SEN UNIV

Back gate full-controlled AlGaN/GaN heterojunction enhanced power HEMT device and preparation method thereof

The invention relates to a back gate full-controlled AlGaN / GaN heterojunction enhanced power HEMT device and a preparation method thereof. The HEMT device comprises: a substrate, a P-GaN layer, a GaN channel layer and an AlGaN barrier layer which are sequentially stacked from bottom to top; a source electrode disposed on one side of the AlGaN barrier layer; a drain electrode arranged on the other side of the AlGaN barrier layer and opposite to the source electrode, wherein the substrate, the P-GaN layer, the GaN channel layer and the AlGaN barrier layer with partial thickness between the source electrode and the drain electrode form a fin-shaped structure; a gate electrode located between the source electrode and the drain electrode and covering the two side faces, perpendicular to the substrate, of the fin-shaped structure and the top face of the fin-shaped structure, wherein ohmic contact is formed between the gate electrode and the P-GaN layer; and a gate dielectric layer arranged between the gate electrode and the fin-shaped structure. According to the back gate full-controlled AlGaN / GaN heterojunction enhanced power HEMT device, the mode that the P-GaN layer and the gate metal form the back gate is adopted, an AlGaN / GaN heterojunction gate electric field is adjusted, and the breakdown voltage of the device can be improved.
Owner:XIDIAN UNIV

Light sensation detection device and display terminal

The invention provides a light sensation detection device and a display terminal which are applied to the technical field of display. In the light sensation detection device, a power supply module comprises a control unit and a processing unit which are connected with each other to output a first voltage, a second voltage and a third voltage; a detection module is connected with the power supply module, and comprises a first bridge arm and a second bridge arm which are connected in parallel to receive a first voltage, a second voltage and a third voltage, an upper switching tube of the first bridge arm and a lower switching tube of the second bridge arm are photoinduction switching tubes, the midpoint of the first bridge arm outputs a first detection signal, and the midpoint of the secondbridge arm outputs a second detection signal; and the work period of the light sensation detection device comprises a first time period and a second time period, and the first voltage is higher than the second voltage in the first time period and lower than the second voltage in the second time period. According to the light sensation detection device and the display terminal, light sensation errors can be reduced, the device stability is enhanced, and the sensitivity of an automatic backlight system of the display terminal is improved.
Owner:KUSN INFOVISION OPTOELECTRONICS

A photosensitive detection device and a display terminal

The present invention provides a photosensitive detection device and a display terminal applied in the field of display technology. In the photosensitive detection device, the power supply module includes a control unit and a processing unit connected to each other to output the first voltage, the second voltage and the third voltage ; The detection module is connected to the power supply module, including a first bridge arm and a second bridge arm connected in parallel to receive the first voltage, the second voltage and the third voltage, the upper switching tube of the first bridge arm and the second bridge arm The lower switching tube of the arm is a photosensitive switching tube, the midpoint of the first bridge arm outputs a first detection signal, and the midpoint of the second bridge arm outputs a second detection signal; the working cycle of the photosensitive detection device includes a first period and a second period, the first voltage is higher than the second voltage during the first period, and lower than the second voltage during the second period. The light-sensing detection device and display terminal provided by the invention can reduce light-sensing errors, enhance device stability, and improve the sensitivity of the automatic backlight system of the display terminal.
Owner:KUSN INFOVISION OPTOELECTRONICS

A preparation method of gan E/D integrated device based on secondary oxidation method

The invention discloses a method for preparing a GaN E / D integrated device based on a secondary oxidation method. Based on the traditional depletion-type AlGaN (AlInN) / AlN / GaN heterostructure, the oxidation method is used to precisely control the thickness of the barrier layer. Oxidation thins the barrier layer to half of its original thickness, and the channel still maintains a high concentration of two-dimensional electron gas. The dielectric generated by oxidation is used as the gate dielectric of the D-mode device; then the dielectric in the gate foot area of ​​the E-mode device is removed, and then the second The secondary oxidation completely consumes the barrier layer, depletes the two-dimensional electron gas in the channel, and generates the gate foot dielectric of the E-mode device at the same time. The two oxidation processes are the same, so that the E and D-mode device processes are fully compatible and the thickness of the gate dielectric is the same. It ensures that the device structure matches the device performance. The invention adopts an oxidation method to thin the barrier layer to realize the preparation of the E-mode device, and the process is highly controllable; the E-mode and D-mode processes are fully compatible, and the gate dielectrics of the E and D-mode devices have the same thickness and performance matching, which is beneficial to improve the GaN E / D integrated circuit yield.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

Finfet enhanced device and manufacturing method of p-gan cap layer

The invention relates to a FinFET enhanced device of a P-GaN cap layer and a manufacturing method. The manufacturing method comprises the steps of enabling a GaN layer and an AlGaN barrier layer sequentially to grow on a substrate to form an AlGaN / GaN heterojunction; enabling a P-GaN cap layer to grow on the heterojunction; performing mesa isolation and etching on the heterojunction to form a gatefin; forming a gate region mask pattern on the surfaces of the P-GaN cap layer and the heterojunction, and etching the P-GaN cap layer except the gate region mask pattern; manufacturing a source electrode and a drain electrode on two sides of the heterojunction; depositing gate metal in the region of the P-GaN cap layer to form a FinFET gate structure gate electrode, the gate metal covering the top and the sidewall of the P-GaN cap layer and covering the sidewall of the heterojunction; manufacturing an electrode lead. According to the device and the manufacturing method, a P-GaN cap layer structure is adopted, and a three-dimensional grid-controlled FinFET structure is combined, so that the transconductance and grid-control capabilities of the device are enhanced, and the threshold voltage and stability of the device are improved.
Owner:XIDIAN UNIV

Photosensitive circuit, method for preparing photosensitive circuit, and display device

A photosensitive circuit (10), a method for preparing the photosensitive circuit (10), and a display device. The photosensitive circuit (10) includes a first thin film transistor (Tr) and a second thin film transistor (Tp), the drain (100) of the second thin film transistor is electrically connected to the source (110, 191) of the first thin film transistor, and the first thin film transistor The transistor includes a first active layer (120), the second thin film transistor includes a second active layer (130), the first active layer (120) includes a first semiconductor portion (121), and the second active layer (130) It includes a second semiconductor portion (131), the first and second semiconductor portions (131) are arranged in the same layer and spaced apart, the first active layer (120) includes a third semiconductor portion (122), and the third semiconductor portion (122) is arranged On the first semiconductor portion (121), the second active layer (130) includes a fourth semiconductor portion (132), the fourth semiconductor portion (132) is arranged on the second semiconductor portion (131), the third and fourth The semiconductor parts (132) are arranged on the same layer at intervals, the first semiconductor part (121) is adjacent to the gate (140) of the first thin film transistor, the fourth semiconductor part (132) is adjacent to the gate (150) of the second thin film transistor, and the second semiconductor part (132) is adjacent to the gate (150) of the second thin film transistor. The defect state density of the third semiconductor portion (122) is higher than the defect state density of the first semiconductor portion (121), and the defect state density of the fourth semiconductor portion (132) is higher than the defect state density of the second semiconductor portion (131) density of.
Owner:SHENZHEN ROYOLE TECH CO LTD

Manufacturing method and structure of trench gate power device

The invention discloses a manufacturing method for a groove grid power device. Formation steps of each cell of a conduction region comprise that a hard mask layer is formed, and a groove is formed through photolithographic etching; a grid medium layer and a polysilicon grid are formed in the groove; an opening of the hard mask layer is enlarged through isotropic etching, and a self-aligning column is formed; a body region is formed; a source region is formed; deposition of an interlayer film is carried out; chemical mechanical grinding planarization for the interlayer film is carried out to the surface of the top portion of the self-aligning column; an opening of a contact hole at the top portion of the source region formed at the self-aligning column is removed; and metal is filled into the contact hole. The invention further discloses a groove grid power device. According to the manufacturing method, self-aligning definition of the contact hole can be realized, registration redundancy is not needed to consider, the contact hole does not require the exposure technology, manufacturing cost is saved, so threshold voltage stability of the device can be improved, unit dimensions of the device are reduced, and conduction resistance is reduced.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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