The invention discloses a GaN E/D integrated device production method based on a two-step oxidation method. Based on the traditional depletion A1GaN(A1InN)/ A1N/GaN heterostructure, the barrier layer thickness can be controlled accurately by using the oxidation method, and the thickness of the barrier layer can be reduced to a half of the original thickness after the first oxidation process, and the high concentration electron gas can be maintained in the channel, and the medium generated by the oxidation can be used as the D-mode device gate dielectric. The medium of the E-mode device gate dielectric area can be removed, and the barrier layer can be consumed completely after the second oxidation process, and the two-dimensional electron gas can be consumed in the channel, and at the same time, the E-mode device gate dielectric can be generated. The same two-step oxidation technologies can be completed, the E-mode device technology and the D-mode device technology can be completely compatible, and the thicknesses of the gate dielectrics are the same, and therefore the device structures and the device performances can be cooperated with each other. The production of the E-mode device can be realized by using the oxidation method to reduce the thickness of the barrier layer, and the processing controllability is high; the E-mode technology and the D-mode technology can be completely compatible, and the thickness of the E-mode device gate dielectric and the thickness of the D-mode device gate dielectric are the same, the performances are cooperated with each other, and then the yield of the GaN E/D integrated circuit can be improved.