This utility model provides an automatic identification, detection, and rejection device for damaged
silicon wafers, relating to the field of
silicon wafer inspection. It includes a collection shell, a top plate frame, and an air
pipe. A cylinder is installed at the end of the air
pipe, and a base frame is installed at the top of the cylinder's telescopic rod. A conveyor bracket is installed at the top of the base frame. A conveyor motor is installed on the left side of the conveyor bracket, and an active rotating roller is mounted on the
motor shaft of the conveyor motor. A belt is nested on the outer side of the active rotating roller. A light panel is installed on the lower side of the top plate frame, and a through hole is provided at the center of the top plate frame, within which a vision camera is installed. A waste box is placed on the inner side of the rectangular trough structure of the collection shell. Through the arrangement of the vision camera, belt, cylinder, waste box, conveyor motor, and active rotating roller, automated detection and rejection of damaged
silicon wafers is achieved, solving the problem of visual fatigue among inspectors caused by prolonged manual
visual inspection during traditional silicon
wafer conveying, leading to misdetection and missed detection of damaged silicon wafers.