The present invention the method of forming mesoporous metal oxide, mixed metal oxide and metal phosphate microballoon through synthesizing small mesoporous carbon ball with mesoporous silicon microballoon as mother body, perfusing the mixture of metal alkoxide, metal chloride and phaophate, drying and roasting. The mesoporous metal oxide, phosphate, etc. have important uses in catalysis, adsorption and other fields owing to their high specific surface area, nanometer level pores, great amount of active components on the pore wall and other features. Through said process, serial mesoporous microballoons including titania, zirconia, alumina, mixed titanium-zirconium oxide, mixed titanium-silicon oxide, zirconium phosphate, titanium phosphate, aluminum phosphate, tin phosphate and ferric phosphate may be synthesized.