This utility model discloses an internal flow channel
polishing slurry recycling device, including a graded circulation device, a
slurry storage tank, a
polishing slurry stirring device, and an internal flow channel
polishing powder cleaning device. The graded circulation device includes a graded
filtration device, and its polishing slurry outlet is connected to the slurry
storage tank via a pipeline. The internal flow channel polishing
powder cleaning device is connected to the polishing slurry inlet of the graded circulation device via a pipeline. The waste outlet of the graded circulation device is connected to a waste liquid collection
pool via a pipeline and then to an external
treatment system. The slurry
storage tank is connected to the polishing slurry stirring device via a pipeline. One end of the polishing slurry
booster pump is connected to the internal flow channel polishing
powder cleaning device via a pipeline, and the other end is connected to the polishing slurry stirring device via a pipeline. This utility model, in the internal flow channel polishing powder cleaning process, can maintain the stability, effectiveness, and continuity of the polishing slurry, ensuring its normal polishing function and preventing product scratches during
processing. Simultaneously, it effectively improves the slurry
utilization rate, reduces resource waste, and meets
environmental protection requirements.