The invention discloses a method for evaluating high-energy
proton irradiation damage of a back gate CNT (carbon nano-tube) device, and the method comprises the steps: introducing a charge deposition layer, namely a CNT / charge deposition layer / SiO2 / P-Si structure, which is used for generating a capturing effect of an interface trap through reaction
proton irradiation into a device structure;
accurate estimation and evaluation of high-energy
proton radiation damage and output characteristic influence of the back gate CNT device are realized. The specific process of damage evaluation is as follows: 1, constructing a back gate CNT
device simulation model containing a charge deposition layer; 2, electrical parameters of a charge deposition layer and other components in the model are adjusted, and output characteristics of the device are accurately simulated; 3, simulating the influence of proton
irradiation on electrical parameters of the charge deposition layer and other components; and 4, substituting the electrical characteristics of the irradiated charge deposition layer and other components into the
device simulation model in the process 1, simulating the output characteristics of the device, and evaluating the damage of the high-energy proton irradiation to the back gate CNT device and the influence of the high-energy proton irradiation on the output performance of the back gate CNT device. According to the damage assessment method, the charge deposition layer is introduced to reflect the
capture effect of an interface trap generated by proton irradiation, a
simulation result is matched with an experimental result, accurate prediction of irradiation damage of the back gate CNT device is achieved, and understanding of a micro-level damage mechanism is deepened.