The invention belongs to the technical field of
semiconductor material and equipment
recovery, and particularly relates to a
recovery method of an
arsenic-containing
quartz tube. The recycling method comprises the following steps that a
pipe opening of an
arsenic-containing
quartz pipe is sealed through a
graphite plug with an air inlet hole and an exhaust hole, then the
arsenic-containing
quartz pipe is placed in a horizontal
heating furnace, the air inlet hole of the
graphite plug is connected with an air inlet pipe, the exhaust hole is connected with an
exhaust pipe, and the
exhaust pipe is sequentially connected with a cooling water recycling device and an acid
tail gas treatment device; and heating the quartz tube to 615-650 DEG C through a horizontal
heating furnace, carrying out heating arsenic removal treatment on the quartz tube, cleaning the quartz tube subjected to heating arsenic removal treatment in a
pickling solution, and finally carrying out dehydroxylation treatment to obtain the recycled quartz tube. Compared with a conventional strong acid soaking and acid
pickling method, the recycling method can effectively avoid potholes and cracks caused by strong
acid corrosion, residual arsenic passing through the quartz tube can be recycled, arsenic-containing waste liquid is not generated, and environmental
pollution and resource waste are reduced.