The invention relates to an Ag-based
alloy target material and a preparation method thereof. The Ag-based
alloy target material is prepared from the following raw materials in percentage by
mass: 74.90-84.95 wt% of Ag, 15-25 wt% of In + Sc and 0.05-0.15 wt% of
doping elements, wherein the
doping elements are selected from one or two of Ce, Pr, Zr, La and Nb. The preparation method of the Ag-based
alloy target material comprises the steps of
smelting and
ingot casting, heating, rolling, heat treatment, shaping,
machining, binding and the like. According to the novel Ag-based alloy target material, In and Sc are added into a silver base, the
vulcanization resistance and
heat resistance of silver-based alloy are effectively improved, meanwhile, the defects that the resistivity of a silver-based film is increased and the
reflectivity is reduced due to the fact that the use amount of Sc is increased are overcome, and a synergistic effect exists between In and Sc; and on the basis, by adding other
doping elements, the grain size can be further reduced, and the comprehensive performance of the target material is improved. Acquisition of the technical effects is a result of comprehensive action of a plurality of technical means such as a product formula and a preparation method.