The application discloses a kind of multi-pulse
signal flexible drive adjusting device and method, belong to
radio frequency power supply technical field, solve two-stage different pulse signals in switching process Conflict, leading to the problem of full switch tube conduction in power
amplifier.In the device, multi-
pulse generator generates multi-stage pulse
signal;Switcher switches the pulse
signal output by multi-
pulse generator;During the switching transition of multi-stage pulse signal: switching enable controller, according to the level of pulse signal before and after switching, gradually generates pulse switching adjustment signal to control at least one of power, frequency output ramp gradually or gradually decrease;And according to the pulse switching adjustment signal generated gradually, gradually generate the
control signal of power
amplifier;The power
amplifier of
radio frequency power supply is based on the
control signal of power amplifier to drive
radio frequency power supply, and gradually correspond to adjust the output power and frequency of radio frequency power supply during the switching transition of multi-stage pulse signal.