The invention discloses a vibration self-sensing device based on a piezoelectric effect and a working method, relates to the technical field of
vibration isolation, and solves the problems that a traditional
control system is low in integration level, large in size and weight, serious in sensing and driving
signal coupling interference and difficult to realize high-
frequency response closed-
loop control. The lower end of a piezoelectric
actuator is connected with a connecting
copper block, and a
piezoelectric sensor is arranged in a groove in the bottom of the connecting
copper block; the piezoelectric
actuator comprises an
actuator rotor, an actuator shell and a piezoelectric plate
pile, the actuator shell is of a cylindrical structure, the actuator rotor and the piezoelectric plate
pile are arranged in the actuator shell, and the piezoelectric plate
pile is arranged below the actuator rotor and drives the actuator rotor to move up and down; and the piezoelectric patch stack is in
signal connection with the
piezoelectric sensor. According to the invention, the
piezoelectric sensor and the piezoelectric actuator are deeply fused, so that a single piezoelectric element has dual functions of execution and sensing. When the actuator applies acting force, the sensor can synchronously detect micro-deformation or counter-acting force of the
system in situ, and
vibration isolation is better carried out.