The invention relates to a target
material structure and a preparation method thereof.The target
material structure comprises at least two target material
layers and a connecting unit, and the target material
layers are arranged in a stacked mode in the first direction and made of the same material; the connecting unit is located between every two adjacent target material
layers, the connecting unit is connected with the adjacent target material layers in the first direction, the connecting unit comprises a first connecting layer, the material of the first connecting layer is the same as that of the target material layers, the first connecting layer is located in at least part of the area of the connecting unit, and the first connecting layer is connected with the target material layers in the second direction. And the
thermal conductivity of at least part of the connecting unit is smaller than that of the target material layer. According to the target
material structure, by arranging the connecting units with the heat
conductivity not larger than that of the target material layer, in the process of gradual
evaporation from top to bottom, heat conduction of the target material structure in the longitudinal direction can be optimized, longitudinal heat accumulation is avoided, and then the influence on the quality of the target material structure on the lower layer is avoided; and the
evaporation performance of the target material structure and the final film forming quality are improved.