The invention discloses a fluxgate sensor chip, and relates to the field of MEMS integration micro manufacturing. The fluxgate sensor chip comprises a high-sensitivity silicon substrate, an excitation coil, a detection coil, a magnetic core, electrodes and silicon oxide films, wherein both the excitation coil and the detection coil are micro electro-mechanical three-dimensional solenoid coils, bottom coils of the excitation coil and the detection coil are located in a silicon microgroove array at the surface of the high-sensitivity silicon substrate, the upper surfaces of the bottom coils are flush with the surface of the silicon substrate, and the bottom coils are insulated from the silicon substrate and the magnetic core through the silicon dioxide films; and the bottom coils, the magnetic core and top coils are insulated from each other through the silicon dioxide films. The fluxgate sensor chip adopts the silicon dioxide films to perform insulation coating, so that the mechanical strength of the integrated fluxgate sensor chip is improved. In addition, the fluxgate sensor chip is completely compatible with a microelectronic process, and compatible and synchronous integrated manufacturing of the integrated fluxgate sensor chip and a CMOS interface circuit can be realized.