The invention relates to the technical field of the technologies for manufacturing
ion beam deflection electromagnets-four-channel special-shaped deflection magnets, in particular to a method for manufacturing a vacuum special-shaped deflection
magnet with four internal channels. The method for manufacturing the vacuum special-shaped deflection
magnet with the four internal channels comprises the steps that the periphery, the upper surface and the lower surface of a left
magnet body, the periphery, the upper surface and the lower surface of a right magnet body and the periphery, the upper surface and the lower surface of a middle magnet body are respectively machined, and oblique planes of the three magnet bodies are machined on a large CNC
machining center; with the bottom surfaces of the magnet bodies as the criterion, coil grooves are machined in the three magnet bodies respectively on the large CNC
machining center; the machined magnet bodies are preassembled; a coil is wound around a machined coil winding die;
epoxy vacuum pouring is conducted on the coil; the coil is packaged in a vacuum box after
epoxy vacuum pouring is completed;
helium mass spectrometer leak detection is conducted on the vacuum box containing the coil, wherein the vacuum degree reaches 1*10<-8> Pa, and the vacuum
leak rate is not higher than 1*10<-9>Pa.L / S; the vacuum box, containing the coil, judged to be qualified through
leak detection and an iron core are assembled together, and
magnetic field testing is conducted. According to the method for manufacturing the vacuum special-shaped deflection magnet with the four internal channels, the magnet manufactured according to the method is simple in structure,
assembly is easy and fast, adjustment is convenient, the
machining precision is high, and the boundary dimension error and the shape error are small.