The invention relates to an MEMS micro-pump diaphragm service
life testing device and a testing method thereof. The MEMS micro-pump diaphragm service
life testing device comprises a pressure storage container, a sensor interface is arranged at the top thereof, a valve interface and a pump interface arranged on the side surface, and a four-way pipeline arranged in the pressure storage container; three
pipe orifices of the four-way pipeline are respectively communicated with a sensor interface, a valve interface and a pump interface, and the fourth
pipe orifice downwards penetrates through the pressure storage container; a diaphragm is attached to the bottom surface of the pressure storage container at the fourth
pipe orifice, and is driven by a piezoelectric plate to vibrate; the sensor interface is connected with a
pressure sensor, the valve interface is connected with a pressure relief
branch and an
electromagnetic valve, and the pump interface is connected with a liquid supplementingbranch and a liquid supplementing pump; the
electromagnetic valve and the liquid supplementing pump are controlled by a
control unit to work, the
pressure sensor is matched for monitoring, liquid with a preset pressure value is supplemented into the four-way pipeline, the piezoelectric plate drives the diaphragm to vibrate for a preset number of times under preset pressure, and the service
life test is completed. The device is simple and compact, is convenient to use, achieves the testing of the service life of the micro-pump diaphragm, greatly reduces the testing period, and greatly reducesthe testing cost.