Apparatus and methods for complex imaging reflectometry and refractometry using at least partially coherent light (121). Quantitative images yield spatially-dependent, local material information about a sample (128, 228) of interest. These images may provide material properties such as chemical composition, the thickness of chemical layers, dopant concentrations, mixing between layers of a sample, reactions at interfaces, etc. An incident beam (123) of VUV wavelength or shorter is scattered off of a sample (128, 228) and imaged at various angles, wavelengths, and / or polarizations. The power of beam (123) is also measured. This data is used to obtain images of a sample's absolute, spatially varying, complex reflectance or transmittance, which is then used to determine spatially-resolved, depth-dependent sample material properties.