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67results about How to "Reduce thermal gradient" patented technology

Plasma ashing apparatus and endpoint detection process

InactiveUS20040235299A1Enhance photoresist removalFlexible process platformElectric discharge tubesSemiconductor/solid-state device manufacturingNitrogen plasmaCombustion chamber
A plasma ashing apparatus for removing organic matter from a substrate including a low k dielectric, comprising a first gas source; a plasma generating component in fluid communication with the first gas source; a process chamber in fluid communication with the plasma generating component; an exhaust conduit in fluid communication with the process chamber; wherein the exhaust conduit comprises an inlet for a second gas source and an afterburner assembly coupled to the exhaust conduit, wherein the inlet is disposed intermediate to the process chamber and an afterburner assembly, and wherein the afterburner assembly comprises means for generating a plasma within the exhaust conduit with or without introduction of a gas from the second gas source; and an optical emission spectroscopy device coupled to the exhaust conduit comprising collection optics focused within a plasma discharge region of the afterburner assembly. An endpoint detection process for an oxygen free and nitrogen free plasma process comprises monitoring an optical emission signal of an afterburner excited species in an exhaust conduit of the plasma asher apparatus. The process and apparatus can be used with carbon and/or hydrogen containing low k dielectric materials.
Owner:LAM RES CORP

Large-face pumping slab laser module capable of efficient cooling

A large-face pumping slab laser module capable of efficient cooling comprises slab laser mediums, a transparent heat sink, a transparent cooling device and a semiconductor pumping source. According to the large-face pumping slab laser module capable of efficient cooling, the transparent heat sink high in heat conductivity and good in light transmission is bonded or manufactured on the large face of the solid slab laser mediums through optical cement, and the transparent cooling device is used for obtaining the large face of a slab laser and meanwhile serving as a cooling face or a pumping face so as to change the situation that for an existing large-face pumping slab module, only an upper surface and a lower surface can serve as a pumping face and a refrigerating face respectively, thermal gradient is easy to form in the longitudinal pump light direction due to single-surface refrigeration, output light beams are influenced, and quality of the light beams is not sufficient. The bonding or optical cement mode on the large face of the laser mediums is adopted for replacing the welding mode of the metallic heat sink so as to eliminate the stress on the laser mediums caused by welding, and therefore high-power and high-light-beam-quality laser output is achieved.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

Stir friction both-side welding method for medium-thickness plate

The invention relates to a stir friction both-side welding method for a medium-thickness plate and belongs to a novel metal material connection method. The welding method includes the following steps that firstly, magnesium alloy plates to be welded are in butt joint and are fixed to a worktable; secondly; secondly an FSW device is used for performing both-side welding graded welding on the magnesium alloy plates, and primary welding joint welding is performed on a stirring head at the rotating speed omega, the welding speed Vh and the pressing amount h; thirdly, a workpiece is overturned, secondary welding joint welding is performed on the back of a primary welding joint, and welding parameters are identical to those in the second step. According to the stir friction both-side welding method, due to the fact that the initial position of a secondary welding joint is adjusted, the plastic flow of metal can be improved, asymmetry of heating power influence areas on the two sides of cross sections of welding joints is easily avoided, and the mechanical property on connectors is improved. The defect that the root of the medium-thickness plate is not welded thoroughly is overcome, and the possibility that the metal of the surface-layer welding joints is locally overheated is also reduced through twice welding.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

High-heat conductivity composite material for LED (light-emitting diode) lamp, heat-conducting filler and production equipment

The invention relates to a high-heat conductivity composite material for an LED (light-emitting diode) lamp, a heat-conducting filler and production equipment. A surface coupling agent solution and an inorganic heat-conducting filler are mixed according to the ratio of (0.3-0.9):(100-300) in parts by weight; the concentration of a surface coupling agent in the solution is 10-25wt%; a solvent of the solution is a water-acetone solution; the ratio of water to acetone is (5-10):(90-95); the draw ratio of the inorganic heat-conducting filler is 15-100; the high-heat conductivity composite material is composed of 59.5-64.5% of fatty polyamide in total weight, 35-40% of modified heat-conducting filler and 0.5% of lubricant; the heat conductivity of the composite material is 10-12 W / mk; a twin-screw extruder for preparing the composite material utilizes 2-3 groups of inclined toothed plates to replace a kneading block at a shear section; and an extrusion section utilizes 2-3 groups of straight toothed plates to replace a conveying block. By adopting the composite material disclosed by the invention, the heat gradient produced when insulating plastics are used is greatly reduced to be close to a numerical value of metal, the radiating requirements of the LED lamp can be well met, and the temperature difference between an inside and an outside is very small.
Owner:SHANGHAI FANHE POLYMER MATERIAL

Thermal conductive graphite blocks for blast-furnace bottom and hearth

The invention provides thermal conductive graphite blocks for a blast-furnace bottom and a hearth, belonging to the technical field of carbon refractory. The raw materials of the graphite blocks comprise the following components in parts by weight: 11-15 parts of petroleum coke with grain size of more than 2mm and less than or equal to 4mm, 10-14 parts of petroleum coke with grain size of more than 1mm and less than or equal to 2mm, 53-60 parts of petroleum coke with grain seize of more than 0.075mm and less than or equal to 0.15mm, 34-40 parts of petroleum coke with grain seize of less than or equal to 0.075mm, and 22-25 parts of mesothermal asphalt. In the formula of the thermal conductive graphite blocks for the blast-furnace bottom and the hearth, high-quality needle cokes with higherintensity and easy graphitization are used, a small grain formula is adopted, and a high-pressure multi-soaking and multi-baking method is adopted, so that an impregnant can penetrate through the holes of the graphite blocks, thus reducing the porosity of the graphite blocks, improving the compactness, volume density and intensity of the products, improving the coefficient of heat conductivity and alkali-resistant corrodibility of the graphite blocks greatly, fundamentally solving the problem of low coefficient of heat conductivity of the graphite blocks, and meeting the requirement on quality of the graphite blocks with high thermal conductivity for large blast furnaces.
Owner:HENAN FANGYUAN CARBON GRP

Function-doping based transparent ceramic slab pumping device

The invention relates to a function-doping based transparent ceramic slab pumping device. The pumping device comprises a laser gain medium, a pumping source, a laser resonator and a cooling temperature control device. According to the pumping device provided by the invention, slab transparent ceramic material is taken as the laser gain medium, a mode of pumping in large areas on upper and lower surfaces is adopted to increase the pumping area, reduce the reshaping difficulty of the pump light, and improve the maximum pumping power; and by using the characteristics of high-concentration doping and function doping of the transparent ceramic material, the high power pumping and the uniform absorption of the pumping light by the transparent ceramic material can be implemented, thereby reducing the internal longitudinal heat gradient of the transparent ceramic material, and improving the absorbing efficiency of the pumping light by the material and the output beam quality. Compared with an existing high-power slab laser pumping device, the pumping device provided by the invention is large in pumping area, low in reshaping difficulty of the pump light and small in internal heat gradient of the laser gain medium, and therefore, high-power pumping and the outputting of solid laser with high average power, high beam quality and high efficiency can be carried out.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

Cooling system for crystal used by laser

InactiveCN102394463AReal-time feedback and temperature controlReduce deliveryLaser detailsTemperature controlWater vapor
The invention provides a cooling system for a crystal used by a laser. The cooling system is provided with a cooling interface device, a vacuum device interface, a temperature measuring device interface and installation interfaces of a brewster form, wherein the cooling interface device is externally connected with a cryogenic cooling system, the vacuum device interface is externally connected with a vacuum system and the temperature measuring device interface is externally connected with a temperature control feedback system. The external cryogenic cooling system that is connected with the cooling interface device provides a stable low-temperature environment for a crystal inside a vacuum chamber. The external vacuum system that is connected with the vacuum device interface provides a vacuum heat insulation environment for the crystal inside the vacuum chamber. The temperature control feedback system that is connected with the temperature measuring device interface carries out real-time feedback and regulation and control on the crystal temperature. And temperature control sheets that are installed near the installation interfaces of the brewster form are used for adjusting steam partial pressures around the brewster form to be below a condensation point. Therefore, according to the invention, thermal conductivity of the crystal used by a laser is increased; the thermal gradient is reduced; and a thermal lens effect is reduced; meanwhile, an occurrence of a condensation phenomenon can be avoided and normal work of the whole laser can be ensured.
Owner:INST OF APPLIED ELECTRONICS CHINA ACAD OF ENG PHYSICS

Immersion-type heat radiation cooling liquid used for power lithium batteries, and preparation method thereof

The invention discloses an immersion-type heat radiation cooling liquid used for power lithium batteries, and a preparation method thereof, and belongs to the field of chemistry. The immersion-type heat radiation cooling liquid used for power lithium batteries is composed of, by weight, 30 to 70 parts of a hydrofluoroether compound, 30 to 50 parts of a halogenated hydrocarbon, 1 to 10 parts of analcohol compound, 0.01 to 0.5 part of an antioxidant, 0.01 to 0.5 part of a preservative, and 0.01 to 0.5 part of a nano metal oxide. According to the preparation method, the hydrofluoroether compoundis taken as a main component, and is mixed with the halogenated hydrocarbon, the alcohol compound, and the like to form an azeotrope, and the antioxidant, the preservative, and the non-conductive nano metal oxide additives are adopted as auxiliary additives to form the cooling liquid composition. The immersion-type heat radiation cooling liquid is excellent in heat radiation effect, is high in specific heat, low in expansion performance, low in toxicity, high in insulation performance, excellent in flame resistance, inert performance, and material compatibility, is capable of realizing heat transfer effect rapidly, is capable of solving power lithium battery heating and heat radiation problems effectively, prolonging battery service life, reducing failure risk, and improving battery safety performance.
Owner:ZHUOCONG SHANGHAI GREEN TECH DEV CO LTD
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