The utility model discloses a kind of
chip clean benches of filtering particulate impurities, including
workbench, it is provided with
wafer containing box thereon, several wafers are placed in the
wafer containing box;Sealing cover is detachably connected on the
wafer containing box, the wafer containing box bottom is sealingly connected in negative
pressure balance seat;Negative pressure tank and the negative
pressure balance seat are communicated.The utility model is by being provided with wafer containing box on
workbench, several wafers are placed in wafer containing box, wafer containing box top is sealed by sealing cover, bottom is sealingly connected in negative
pressure balance seat, negative pressure tank and negative pressure balance seat are communicated, after wafer
cutting, wafer is placed in wafer containing box, negative pressure tank works, forms negative pressure in wafer containing box, so that the particle
cut on wafer is inhaled into dust bucket in negative pressure tank, completes the
microparticle cleaning on wafer, can use industrial
vacuum cleaner to replace negative pressure tank, and the dust suction port of industrial
vacuum cleaner and negative pressure balance seat are communicated.