The invention discloses a hemispherical
resonator three-dimensional quality finishing
system and method, and the method comprises the steps: measuring the spherical thickness error data of a hemispherical
resonator, decomposing the spherical thickness error data into a
harmonic thickness error, selecting an
ion beam diameter, and obtaining a corresponding removal function; carrying out edge
continuation equivalent to the
diameter of the removal function on the
harmonic thickness error data to obtain a thickness error matrix, expanding the dimension of the removal function to be the same as the dimension of the thickness error matrix to obtain a
material removal matrix, and correcting the thickness error matrix according to an incident angle of the removal function;
residence time is solved according to the corrected thickness error matrix and the
material removal matrix, then path planning is carried out according to the
residence time, a
machining G code is generated, and finally the
machining G code is used for
machining the hemispherical
harmonic oscillator. The invention provides an efficient trimming method for
harmonic oscillator spherical surface annular domain thickness errors, and solves the problems that
coupling vibration is difficult to decouple and three-dimensional
mass error distribution cannot be identified during quality trimming according to performance test feedback in a traditional method.