The invention provides an anti-
collision system of a high-speed motion mechanical arm. The anti-
collision system comprises a high-speed vision capturing hardware
system, a rapid identifying, trackingand
positioning system, an initialization reference
list module, a
wafer reference
list comparison module, a mechanical arm mark detection module and a pre-warning module; a work beat video in the normal working process is acquired, and a relation table of the position, the speed and the accelerated speed of the
wafer carrying mechanical arm and the time; the circle center position coordinate, thespeed and the accelerated speed information of the
wafer are acquired through the vision capturing hardware
system and the identifying, tracking and
positioning system to be compared with the data stored in the initialization reference
list module; marks are made at the fixed positions on the two sides of the edge of the wafer, and the relative position relation between the wafer and the mechanical arm holding structure is determined by acquiring whether the information of the marking points on the mechanical arm exist or not; and the differential value of the motion state is calculated according to the calculated wafer position motion state and the built
reference table, and the collision pre-warning device is started once the differential value surpasses the set threshold value. The anti-
collision system achieves collision vision detection of high-speed motion objects in a low-cost and high-precision mode, and has the universality.