The invention discloses a three-
resonance enhanced four-wave mixing VUV
light source, which comprises a light splitting module, an optical
parametric oscillation module and a mixing module, and is characterized in that the light splitting module utilizes a half-wave plate and a Glan
prism to flexibly adjust to enter the Glan
prism so as to divide incident light into two beams, and the two beams are respectively transmitted to the next Glan
prism and the optical
parametric oscillation module; the first half-wave plate is used for changing the polarization state of the incident light so as to adjust the light splitting ratio of the two beams of light; the optical
parametric oscillation module comprises a first oscillation unit, a second oscillation unit and a third oscillation unit, and is used for performing a nonlinear process on the multiple beams of incident light split by the light splitting module so as to output multiple pieces of
frequency mixing light with specific frequencies; and the
frequency mixing module comprises a
frequency mixing pool, the frequency mixing
pool is filled with mercury vapor, the first frequency mixing light, the second frequency mixing light and the third frequency mixing light enter the frequency mixing
pool through beam combination for four-wave mixing so as to obtain
vacuum ultraviolet light, the adjustability is high, and the frequency mixing
light energy output by each oscillation unit can be flexibly regulated and controlled.