The invention relates to the field of surface appearance measurement and discloses a method and device for surface appearance interference measurement based on combination of multi-
wavelength alternation and phase shift scanning. The method comprises the following steps that 1: a
light source is started; 2: images are collected; 3: the
light source is switched; 4: whether the
light source is switched successfully or not is judged, and if the answer is negative, the step 2 is conducted; if the answer is positive, the position of a
reference mirror is changed and interference signals of
laser with different wavelengths in different positions of the
reference mirror are collected; 5: whether collection is completed or not is judged, and if the collection is not completed, the step 1 is conducted; if the collection is completed, the data signals are processed and sample appearance parameters are calculated and displayed. The device for the surface appearance interference measurement comprises a light source unit, an interference microscopic measurement unit, an image collecting unit, a multi-
wavelength switch unit, a piezoelectric
ceramic PZY driving unit and an
image processing and
control unit. According to the method and device for the surface appearance interference measurement, the advantages of
wavelength scanning and the phase shift scanning are fully used, so that high-accuracy
absolute measurement of surface appearance is achieved.