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43results about How to "Reduce saturation pressure drop" patented technology

IGBT device with carrier storage structure and manufacturing method of IGBT device

The invention relates to an IGBT device with a carrier storage structure and a manufacturing method thereof. An active area of the IGBT device adopts a groove structure; a second conduction type body area is arranged in a first conduction type drifting area of the active area; a cellular groove is located in the second conduction type body area and deeply extends into the first conduction type drifting area below the second conduction type body area; the carrier storage structure is arranged in the first conduction type drifting area of the active area; the carrier storage structure comprises a first conduction type carrier storage area which is used for completely surrounding the inner and outer walls, extending in the first conduction type drifting area, of the cellular groove; and the doping concentration of the first conduction type carrier storage area is greater than the doping concentration of the first conduction type drifting area. According to the IGBT device with the carrier storage structure and the manufacturing method thereof, the relatively low breakover voltage drop and extremely rapid turnoff characteristic can be satisfied at the same time, the pressurization breakdown position can be adjusted to a cellular area to ensure relatively high voltage surge resistance, the chip manufacturing cost is not increased, and the chip area is reduced.
Owner:WUXI NCE POWER

Electrostatic shielding effect transistor and design method thereof

The invention discloses an electrostatic shielding effect transistor. The electrostatic shielding effect transistor comprise a collector, groove-type grids, a base region, an oxidization layer, a polycrystalline silicon layer and emitters. The collector comprises a leading-out end, an N+ substrate, an N+ conductive material layer and an N- conductive material layer. The groove-type grids are arranged on the N- conductive material layer, B ions of certain concentration are injected into the bottom of a groove to serve as P+ regions, and the base region injected with the B ions is arranged between the grids. The oxidization layer is arranged on the grids and the base region, the emitters are formed on the base region and the oxidization layer, the polycrystalline silicon layer is deposited on the oxidization layer and the polycrystalline silicon layer forms an emitting region below the emitters after high-temperature diffusion. The electrostatic shielding effect transistor is provided with the emitters and the base region which are super shallow in junction and small in size, and therefore, the emitter current crowding effect and the base region flow extruding effect of the device can be greatly improved. Due to the super small junction depth of the structure and the base region of the device, the hole extraction speed is increased and the high frequency property of the device is improved.
Owner:SHENZHEN SHENGYUAN SEMICON

Schottky barrier high current density igbt device

The invention discloses a Schottky barrier high-current-density IGBT device comprising a P type base region, a poly silicon gate region, a N- type doped drift region in contact with the bottom surface of the P-type base region, a first device in contact with the bottom surface of the N- type doped drift region, a Schottky barrier region, a N+ type doped source region, an emitter metallic region, and a gate oxide layer. The Schottky barrier region and the N+ type doped source region are in contact with the top surface of the P type base region. The emitter metallic region is in contact with the Schottky barrier region and the N+ type doped source region. The emitter metallic region is arranged between the poly silicon gate region and a group including the N- type doped drift region, the P type base region, the N+ type doped source region, and the emitter metallic region. While advantages of high operating voltage, simple gate voltage control, good switching controllability, a safe operating area, and simple short circuit protection measures are maintained, the Schottky barrier high-current-density IGBT device is greatly increased in current density, improved in conductivity modulation effect and current conduction capability, and decreased in on-state loss.
Owner:HUNAN UNIV

Suspended collector pnp integrated circuit transistor and method of making the same

The invention relates to a suspension collector PNP integrated circuit transistor and a manufacturing method thereof. An N-type first epitaxial layer and an N-type second epitaxial layer are sequentially formed on a P-type substrate; an N-type buried layer is arranged in the P-type substrate, a collector P-type buried layer is arranged in the first epitaxial layer which is positioned on the N-type buried layer, and a collector upper isolation unit is arranged in the second epitaxial layer which is positioned on the collector P-type buried layer; a P-type lower isolation unit is arranged in the first epitaxial layer which is positioned on the upper portion of the periphery of the N-type buried layer, and a P-type upper isolation unit is arranged in the second epitaxial layer which is positioned on the P-type lower isolation unit; a first P+ diffusion region is arranged in the P-type upper isolation unit, and serves as a collector; an N+ diffusion region is arranged in the second epitaxial layer enclosed by the collector upper isolation unit and the collector P-type buried layer, and serves as a base; and a second P+ diffusion region is arranged in the second epitaxial layer enclosed by the N+ diffusion region, and serves as an emitter. The suspension collector PNP integrated circuit transistor and the manufacturing method thereof can reduce collector series resistance and saturation voltage drop, and increase current output capacity.
Owner:CRM ICBG (WUXI) CO LTD

Method for manufacturing integrated PNP differential pair tube

The invention relates to a method for manufacturing an integrated PNP differential pair tube. The method comprises the following steps: selecting a one-side polishing P+ silicon substrate with specific resistance ranging between 0.001 and 0.008ohm-centimeter; growing an epitaxial layer serving as an N base region on the silicon substrate, wherein the specific resistance of the epitaxial layer is between 0.2 and 2.0ohm-centimeter and the thickness is between 10 and 20 mu m, and growing an oxidation layer through thermal oxidation; diffusing boron on the surface of the N base region and connecting a diffused boron agglomeration with the P+ silicon substrate to form a common P+ collecting zone, and separating the epitaxial layer into two separate base regions; diffusing the boron on the surface of the N base region to form an emitter region and controlling the effective width of the N base region between 5 and 10 mu m; diffusing phosphorus on the surface of the N base region to form a contact zone of the N+ base region; leading metal electrodes out from the surface of the contact zone of the N+ base region, the P+ collecting zone surface and the emitter region surface; and leading the metal electrodes out from the surface of the P+ collecting zone or the back side of the P+ silicon substrate. The method has the advantages that the method can effectively reduce saturation voltage drop to ensure that base-emitter reverse voltage reaches 30-100V; and devices not only have a large forward DC amplification coefficient Beta, but also have a reverse DC amplification coefficient Betareaching 8 to 15.
Owner:JINZHOU 777 MICROELECTRONICS

Direct-current overvoltage protection circuit

The invention discloses a direct-current overvoltage protection circuit. The direct-current overvoltage protection circuit comprises an input filter circuit, an overvoltage detection circuit, a variable impedance electronic switch drive circuit, a variable impedance electronic switch circuit, a voltage stabilizing circuit, a reduced saturation voltage drop circuit, an output filter voltage stabilizing circuit and a load, wherein the input end of the input filter circuit is connected with an input signal; the output end of the input filter circuit is respectively connected with the overvoltage detection circuit and the reduced saturation voltage drop circuit; the output of the overvoltage detection circuit is connected with the variable impedance electronic switch drive circuit; the output of the variable impedance electronic switch drive circuit is connected with the variable impedance electronic switch circuit; the output of the variable impedance electronic switch circuit is connected with the voltage stabilizing circuit; the output of the voltage stabilizing circuit is connected with the reduced saturation voltage drop circuit; the output of the reduced saturation voltage drop circuit is connected with the output filter voltage stabilizing circuit; and the output of the output filter voltage stabilizing circuit is connected with the load.
Owner:SOUTHEAST UNIV

A method for manufacturing a silicon epitaxial wafer of a high-power pin device

The invention provides a manufacturing method of a silicon epitaxial wafer of a large-power PIN device. The method is that a highly As-doped N type <100> polished wafer of which the resistivity does not exceeds 0.003 ohm / cm and local flatness does not exceeds 1.5mm and the rear surface is free of a back seal oxide layer is adopted. The manufacturing method of the silicon epitaxial wafer of the large-power PIN device has the advantages that 1, polycrystalline silicon is transferred from a graphite base to the rear surface of a substrate by the mass transfer principle, so as to reach the back enveloping purpose; 2, proper atmospheric corrosion flow and atmospheric corrosion time are selected and the gas phase concentration of atmospheric corrosion impurities in an epitaxial reaction chamber is reduced so as to reduce self doping under epitaxial growth; 3, after atmospheric corrosion, variable temperature and flow hydrogen is selected to purge the epitaxial reaction chamber; 4, during the growth of a first epitaxial layer, an intrinsic epitaxial layer grows under relatively low temperature to envelope the high-concentration substrate surface, and the growth temperature, rate and time are controlled to reach an ideal enveloping layer; and 5, during the growth of a second epitaxial layer, an epitaxial layer of which the surface concentration is below 10E13cm-3 grows under a low temperature.
Owner:NANJING GUOSHENG ELECTRONICS

IGBT (Insulated Gate Bipolar Transistor) device with field stop buffer layer and manufacture method of IGBT device

The invention provides a field stop buffer layer which is formed in an IGBT (Insulated Gate Bipolar Transistor) device. The field stop buffer layer comprises an N type substrate and a P type buried layer formed in the N type substrate. The invention also provides an IGBT device with the field stop buffer region. The IGBT device comprises the field stop buffer layer, an N-epitaxial layer, an IGBT front structure, an anode cavity emission region and a back anode collector electrode, wherein the field stop buffer layer comprises the N type substrate and the P type buried layer formed in the N type substrate; the N-epitaxial layer is formed on the surface of the N type substrate; the IGBT front structure is formed on the surface of the N-epitaxial layer; the anode cavity emission region is formed on the back surface, which is far away from the N-epitaxial layer, of the N type substrate; and the back anode collector electrode is formed on the anode cavity emission region. The invention also provides a manufacture method of the IGBT device with the field stop buffer layer. Through increasing the thickness of the field stop buffer layer and regulating the concentration and the thickness between the P type buried layer and the N type substrate, the current density of the IGBT device is increased, and the conduction loss is reduced.
Owner:HANGZHOU SILAN INTEGRATED CIRCUIT

IGBT device with carrier storage structure and manufacturing method thereof

The invention relates to an IGBT device with a carrier storage structure and a manufacturing method thereof. An active area of the IGBT device adopts a groove structure; a second conduction type body area is arranged in a first conduction type drifting area of the active area; a cellular groove is located in the second conduction type body area and deeply extends into the first conduction type drifting area below the second conduction type body area; the carrier storage structure is arranged in the first conduction type drifting area of the active area; the carrier storage structure comprises a first conduction type carrier storage area which is used for completely surrounding the inner and outer walls, extending in the first conduction type drifting area, of the cellular groove; and the doping concentration of the first conduction type carrier storage area is greater than the doping concentration of the first conduction type drifting area. According to the IGBT device with the carrier storage structure and the manufacturing method thereof, the relatively low breakover voltage drop and extremely rapid turnoff characteristic can be satisfied at the same time, the pressurization breakdown position can be adjusted to a cellular area to ensure relatively high voltage surge resistance, the chip manufacturing cost is not increased, and the chip area is reduced.
Owner:WUXI NCE POWER

Silicon germanium heterojunction bipolar transistor

The invention discloses a silicon germanium heterojunction bipolar transistor. The collector region of the silicon germanium heterojunction bipolar transistor consists of a first ion-implanted region which is formed in an active region, and second and third ion-implanted regions which are formed at the bottoms of field oxide regions on the two sides of the active region respectively. The third ion-implanted region is at a longitudinal distance away from the bottom surface of the field oxide region, and the width of the third ion-implanted region is the same as that of the field oxide region. The second ion-implanted region is positioned at the top of the ion-implanted region, and the bottom of the second ion-implanted region is overlapped and connected with the third ion-implanted region.The depth of the first ion-implanted region is greater than the depth of the bottom of the field oxide region, and the bottom of the first ion-implanted region is connected with the second ion-implanted region. The dosage concentration of the third ion-implanted region is greater than that of each of the first and second ion-implanted regions. Deep hole contact in the field oxide region at the top of a pseudo buried layer leads the collector region out. By the silicon germanium heterojunction bipolar transistor, the breakdown voltage of a device can be increased, relatively higher characteristic frequency can be maintained, the series resistance of the collector region can be decreased and the saturation voltage drop of the device can be decreased.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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