A substrate for biochips with which immobilization is easy, which does not exhibit self-fluorescence, which is easy to manufacture, and which is excellent in flatness and surface precision, is disclosed. A substrate having a substrate body of the biochip, which is made of a metal, and a carbon layer having functional groups formed on the metal substrate body is used as a substrate for biochips. Since the substrate body of the substrate for biochips is made of a metal, the substrate is not only easy to manufacture, but also free from cracking and chipping, so that it allows easy handling, and high flatness and surface precision can be attained. Therefore, the problem that the optical system is hard to focus when detecting fluorescence does not occur. Moreover, since the substrate body is made of a metal, it does not emit fluorescence by itself. In addition, since the carbon layer has functional groups such as amino groups, biologically relevant substances can be easily immobilized.