The application provides a MEMS
hydrophone and method, and relates to the technical field of MEMS hydrophones.The MEMS
hydrophone comprises a base, a sound-permeable shell and an acoustic sensing
assembly.The sound-permeable shell and the base form a first cavity filled with hydraulic oil;the acoustic sensing
assembly is located in the first cavity and comprises a shielding cover, a
printed circuit board, a flexible membrane, a transition carrier plate and a MEMS
chip.The shielding cover, the
printed circuit board and the flexible membrane surround to form a second cavity, and the shielding cover is provided with a communication hole communicating the first cavity and the second cavity.The MEMS
chip, the transition carrier plate and the flexible membrane surround to form a third cavity filled with gas.The application realizes front
hydraulic pressure transmission through the hydraulic oil in the first cavity, realizes back
gas pressure compensation through compression of the third cavity by the flexible membrane, forms a cooperative
pressure balance mechanism, significantly reduces the net
pressure difference and the prestress borne by the MEMS
chip, effectively inhibits the problems of sensitivity attenuation,
linearity deterioration and
frequency response drift under a deep-water high
hydrostatic pressure environment, and simultaneously improves the
structural safety and long-term reliability.