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2results about How to "Reduce prestress" patented technology

A MEMS hydrophone and method

PendingCN122259020AReduce net pressure differencereduce prestressTelevision system detailsVibration measurement in fluidHydrophoneEngineering
The application provides a MEMS hydrophone and method, and relates to the technical field of MEMS hydrophones.The MEMS hydrophone comprises a base, a sound-permeable shell and an acoustic sensing assembly.The sound-permeable shell and the base form a first cavity filled with hydraulic oil;the acoustic sensing assembly is located in the first cavity and comprises a shielding cover, a printed circuit board, a flexible membrane, a transition carrier plate and a MEMS chip.The shielding cover, the printed circuit board and the flexible membrane surround to form a second cavity, and the shielding cover is provided with a communication hole communicating the first cavity and the second cavity.The MEMS chip, the transition carrier plate and the flexible membrane surround to form a third cavity filled with gas.The application realizes front hydraulic pressure transmission through the hydraulic oil in the first cavity, realizes back gas pressure compensation through compression of the third cavity by the flexible membrane, forms a cooperative pressure balance mechanism, significantly reduces the net pressure difference and the prestress borne by the MEMS chip, effectively inhibits the problems of sensitivity attenuation, linearity deterioration and frequency response drift under a deep-water high hydrostatic pressure environment, and simultaneously improves the structural safety and long-term reliability.
Owner:OCEAN UNIV OF CHINA