49results about How to "Low mass flow" patented technology

The invention relates to a method and device for depositing at least one layer, particularly a semiconductor layer, onto at least one substrate (5), which is situated inside a process chamber (2) of a reactor (1) while being supported by a substrate holder (4). The layer is comprised of at least two material components provided in a fixed stoichiometric ratio, which are each introduced into the reactor (1) in the form of a first and a second reaction gas, and a portion of the decomposition products form the layer, whereby the supply of the first reaction gas, which has a low thermal activation energy, determines the growth rate of the layer, and the second reaction gas, which has a high thermal activation energy, is supplied in excess and is preconditioned, in particular, by an independent supply of energy. The first reaction gas flows in a direction (11) toward the substrate holder (4) through a multitude of openings (6), which are distributed over a surface (18) of a gas inlet element (3), said surface being located opposite the substrate holder (4). According to the invention, the second process gas is preconditioned with a plasma before entering the process chamber (1), and it enters the process chamber (2) at the edge (19) of the substrate holder (4) directly thereabove and flows parallel to the substrate holder surface.

The invention relates to a method for controlling an expansion valve, in particular for vehicle air-conditioning systems operated with CO2 as the refrigerant, with a valve housing which has a feed opening and a removal opening, with a valve-closing member which closes a valve seat of a passage opening arranged between the feed and removal openings, and with a resetting device which acts in the closing direction of the valve-closing member, an adjusting element, which is assigned to the valve-closing member, on the low-pressure side being activated via a predetermined threshold value as the low pressure rises or as the temperature on the low-pressure side rises and actuates at least one actuating element by means of which a closing force of the resetting device acting on the valve-closing member is reduced such that a passage opening is enlarged or a passage of a bypass valve arranged on the low-pressure side, which passage is arranged parallel to the passage opening, is opened.

The invention relates to the technical field of heat exchanger, in particular to a flat pipe which comprises not less than two through holes which extend along the lengthwise direction of the flat pipe. The through holes are arranged side by side along the width direction of the flat pipe. Two ends of the flat pipe along the width direction respectively form an external air influx entrance end and an external air outflux end. The section sizes of the through holes are reduced gradually along the direction from the external air influx entrance end of the flat pipe to the external air outflux end of the flat pipe. The through hole near the external air influx entrance end of the flat pipe has larger section size, larger heat transmission temperature difference, large heat exchange volume and larger mass flow. The through hole near the external air outflux end of the flat pipe has smaller section size, lower heat transmission temperature difference, less heat exchange volume and less mass flow. The invention brings the heat exchange performance of the flat pipe into play completely and improves the heat exchange efficiency of the heat exchanger further. The invention also provides a heat exchanger.

The present invention relates to a sludge drying method, said method utilizes the sensible heat and latent heat of dried tail gas recovered by heat exchanger, and makes it exchange with water and heats it to obtain superheated steam, then makes the superheated steam by fed into a closed direct drying machine to make heat exchange with wet sludge being in said drying machine to obtain the dried sludge. Then said method can make the dried sludge and dried tail gas implement gas-solid separation, so that the dried sludge can be collected. Said drying equipment includes pipe-shell type heat exchanger, heater, closed direct drying machine and gas-solid separator, etc.

The invention discloses low-pressure oil film breaking and atomizing technology and device thereof. The low-pressure oil film breaking and atomizing technology is characterized in that fuel oil and an auxiliary gas are formed into gas-liquid two-phase fluids, the gas-liquid two-phase fluids are jetted into a furnace cavity through an oil gun, and the jetted gas-phase fluids enable a formed oil film to be broken by overcoming the surface tension of the jetted gas-phase fluids so as to realize the superfine atomization of the fuel oil; the outlet of a circular jet hole is provided with a secondary transverse ultrasonic air flow, the jet direction of the secondary transverse ultrasonic air flow is perpendicular to that of the circular jet hole, and the secondary transverse ultrasonic air flow further impacts initially-atomized fuel oil jetted from the circular jet hole to carry out secondary breakage and atomization on the fuel oil. The invention has the advantages of smaller average diameter of an oil drop, high penetrating capability of oil mist, good adjustability of an atomized taper angle and very little change of the average dimension of the oil drop when the viscidity of the fuel oil is enhanced or the ejection force of the oil gun is smaller; and in addition, the invention only needs lower fuel oil pressure of 0.4-0.5 MPa, thereby lowering the pressure of a fuel oil system, reducing the electricity consumption of an oil pump and saving the plant electrical consumption.

The invention relates to a triple utilization device and method for exhaust steam waste heat produced during superheat steam drying of sludge. The device comprises a shaftless screw feeder, a double-shaft stirring dryer, a sludge particle forming machine and the like, wherein the shaftless screw feeder, the double-shaft stirring dryer, the sludge particle forming machine and a net belt dryer are sequentially connected to form a material channel; a heater, the double-shaft stirring dryer, a cycle separator A, a fan A and an air valve B are sequentially connected to form an internal circulation air channel; the shaftless screw feeder, a cyclone separator B, a heat exchanger B and a tail gas washing tower are sequentially connected to form an external air channel; the shaftless screw feeder, a heat exchanger A and a sewage treatment system form a water circulating utilization channel; a heat exchanger B, the fans and the net belt dryer are combined for drying. The device and the method have the advantages that sensible heat and latent heat of the exhaust steam are recovered simultaneously, the device and the method are efficient and energy-saving, and condensation can be effectively prevented; circulating utilization of waste water and zero-pollution exhaust of waste gas are realized; formed sludge can be used for preparing fertilizers, and reutilization of the sludge is realized.

Isobutene is prepared by dissociating tert-butanol into isobutene and water over an acid ion-exchange resin arranged as a fixed bed in at least one reactor at a temperature of from 80 to 150° C. and at a pressure of from 5 to 25 bar to obtain a reaction mixture, separating the reaction mixture into isobutene, a by-product, water and at least one mixture of undissociated tert-butanol and water. The reactor is operated pseudo-isothermally, with a temperature difference between inflowing and outflowing streams of less than 15 K.

The invention discloses a capillary tube flow testing device, which comprises a refrigerant liquid storage tank, a one-way valve, a manual switch, a high pressure maintaining valve, a capillary tube clamp, an inlet pressure sensor, an outlet pressure sensor, a back pressure side lower pressure maintaining valve, a self-balancing type pressure control valve, a refrigerant recycling filling machine and a back pressure sensor. The refrigerant liquid storage tank is accommodated in a thermotank; the one-way valve is communicated with an output port end of the liquid storage tank via a pipeline; the manual switch and the high pressure maintaining valve are sequentially serially connected to the rear of the one-way valve; the capillary tube clamp is used for fixing a detected capillary tube; the inlet pressure sensor and the outlet pressure sensor are respectively parallelly connected to refrigerant flowing channels nearby two ends of the detected capillary tube fixed by the capillary tube clamp; the back pressure side low pressure maintaining valve, the self-balancing type pressure control valve and the refrigerant recycling filling machine are sequentially connected to the rear of the capillary tube clamp; and the back pressure sensor is parallelly connected to the rear of the low pressure maintaining valve. The capillary tube flow testing device forms a whole refrigerant loop and truthfully simulates the working state of the capillary tube, and calculates pressure difference of the refrigerant after the refrigerant passes through the capillary tube by controlling and measuring pressure and temperature, so that change of roughness of the capillary tube is detected, and the throttling effect of the capillary tube is improved according to the change.

A gas turbine system for NOx emission reduction and part load efficiency improvement is described. The system includes a gas turbine (12) having a compressor (13) which receives inlet-air (18). A direct-contact heat exchanger (30) heats and humidifies the inlet-air (18) before the inlet-air flows to the compressor (13). Heating the inlet-air (18) reduces an output of the gas turbine (12) and extends the turndown range. Humidifying the inlet-air (18) lowers NOx emissions from the gas turbine unit (12).

A method and device for depositing at least one layer, particularly a semiconductor layer, onto at least one substrate, which is situated inside a process chamber of a reactor while being supported by a substrate holder, is provided. The layer includes of at least two material components provided in a fixed stoichiometric ratio, which are each introduced into the reactor in the form of a first and a second reaction gas, and a portion of the decomposition products form the layer, whereby the supply of the first reaction gas, which has a low thermal activation energy, determines the growth rate of the layer, and the second reaction gas, which has a high thermal activation energy, is supplied in excess and is preconditioned, in particular, by an independent supply of energy.

The invention relates to a dual utilization device and method for exhaust steam waste heat produced during superheat steam drying of sludge The device comprises a shaftless screw feeder, air valves, a heater, a double-shaft stirring dryer, a sludge particle forming machine, a net belt dryer, a tail gas washing tower, cyclone separators (A and B), fans (A and B) and a heat exchanger, wherein the shaftless screw feeder, the double-shaft stirring dryer, the sludge particle forming machine and the net belt dryer are sequentially connected, and a material channel is formed; the heater, the double-shaft stirring dryer, the cycle separator A, the fan A and the air valve B are sequentially connected to form an internal circulation air channel; the shaftless screw feeder, the cyclone separator B, the heat exchanger and the tail gas washing tower are sequentially connected to form an external air channel; the heat exchanger, the fans and the net belt dryer are combined for drying. The device and the method have the advantages that dual utilization of exhaust steam waste heat is realized, the device and the method are efficient and energy-saving, and condensation can be effectively prevented; zero-pollution discharge of waste water and waste gas is realized; formed sludge can be used for preparing fertilizers, and reutilization of the sludge is realized.

Focus of a laser optical system can be corrected using a variable radius mirror having a focusing cavity and a separate cooling cavity. Pressure of a focusing material at a sufficiently low mass flow in the focusing cavity deforms a reflective surface mounted to the focusing cavity, changing its radius. Cooling material provided to the cooling cavity cools the variable radius mirror. A laser beam is reflected by the deformed reflecting surface to focusing optics, focusing the reflected laser beam on an EUV-emitting target, and minimizing a laser focus error by one or more of: maximizing a measured EUV power or minimizing a measured laser beam divergence. Providing focusing material at a deformation pressure and at a sufficiently low mass flow, and providing a separate cooling cavity, avoids perturbations in the reflective surface which would otherwise affect laser beam focus.

The invention discloses a hybrid turboshaft power system and method based on supercritical carbon dioxide, and belongs to the field of new energy and high efficiency power. The system mainly includesa compressor, a combustion chamber, a turbine, a heat storage tank, an S-CO2 gas storage tank, a solid fuel storage tank, a chemical reactor, a heat exchanger, a carbon dioxide buffer tank, a carbon dioxide exhaust storage tank, a cyclone separator and a solid powder recovery tank. The hybrid turboshaft power system and method are characterized in that with the help of the supercritical property and high energy storage density of the carbon dioxide, the strong power capability can be generated after heating; the S-CO2 needs to be properly heated before work doing, and one heat source can be selected from heat of tail gas of a conventional gas turbine; and the heat storage tank is used for realizing storage and release of energy, and the temperature of the exhausted tail gas can be reduced;as for preparation of the S-CO2, the S-CO2 can be produced in advance at the grid load low ebb period, and therefore an auxiliary power system can work without the aid of the compressor. The system can reduce infrared radiation, can reduce use of traditional fossil energy, and has high environmental protection.

In an internal combustion engine and a method of operation the internal combustion engine which includes a high pressure and a low pressure turbocharger having exhaust gas turbines arranged in series in an engine exhaust line provided with a high pressure exhaust gas recirculation line and a low pressure exhaust gas recirculation line via which exhaust gas can be conducted to an inlet line of the engine, the arrangement is switchable depending on the engine speed between an exhaust gas recirculation by way of the high pressure line and an exhaust gas recirculation by way of both, the high pressure and the low pressure line, to achieve low emissions and low fuel consumption.

The invention discloses a bypass type low-temperature negative-pressure heat exchanger for a pre-cooling type JT refrigerating machine and a design method. The heat exchanger is composed of a high-pressure side pipeline, a low-pressure side pipeline, a bypass pipeline, a bypass element, a three-way element and a low-temperature negative-pressure dividing wall type heat exchanger. According to theinvention, the temperature and flow distribution of a fluid in the low-temperature negative-pressure heat exchanger are changed through the bypass pipeline, the irreversible loss of the pipeline and the pressure drop loss of the low-pressure pipeline side are reduced, the low-pressure pressure of the pre-cooling type JT refrigerating machine after throttling is reduced, and the final-stage refrigerating temperature of the pre-cooling type JT refrigerating machine is reduced; the flow velocity of a high-low pressure pipeline fluid in the low-temperature negative-pressure dividing wall type heatexchanger is increased, so that the heat exchange efficiency of the low-temperature negative-pressure heat exchanger is improved; the fluid temperature before throttling is reduced, and the refrigerating capacity of the pre-cooling type JT refrigerating machine is increased; and the overall efficiency of the pre-cooling type JT refrigerating machine is improved. The bypass type low-temperature negative-pressure heat exchanger for the pre-cooling type JT refrigerator and the design method have very positive significance for application of the pre-cooling type JT refrigerator in special fieldssuch as extremely low temperature areas, aerospace and the like.

A multiple reactions integrated process for desulfurizing from the fume by dry method includes such steps as spraying limestone powder in high-temp combustion box from its top to decompose calcium carbonate into calcium oxide and CO2, absorbing SO2 from fume by partial calcium oxide to generate calcium sulfate, spraying water to activate calcium oxide to transform partial calcium oxide to calcium hydroxide and absorb SO2 from fume to generate calcium sulfite, and using the residual calcium hydroxide and calcium oxide to desulfurize the fume in desulfurizing tower. Its system is composed of limestone powder sprayer, moistening flue, desulfurizing tower, external electric duster, draught blower and chimney.