The invention provides a preparation method of a
copper target material, and belongs to the technical field of
metal target material preparation. According to the preparation method of the
copper target material, the
copper blank is subjected to hot rolling, thick columnar crystals in an original as-cast structure of the copper blank are crushed into fine grains through hot rolling, and the
grain structure is more uniform; and the total volume of gaps among
crystal grains is rapidly reduced, an original loose structure is compacted into a compact structure, densification treatment of the copper blank is achieved, and the
dislocation density of the copper blank is increased. And then the copper target blank is cooled to 25-40 DEG C and then is subjected to cold rolling,
crystal grains in the copper target blank are further rearranged, gaps between the
crystal grains are further compressed, the crystal
grain structure of the copper target blank is more compact, and the
dislocation density is further improved. And finally, a temperature stepped annealing process is adopted, so that
internal stress generated in the hot rolling and cold rolling processes can be effectively eliminated, and the
hardness of the copper target blank cannot be excessively reduced due to the annealing process.