The invention provides a cleaning liquor for a
silicon chip. The cleaning liquor contains a
potassium hydroxide liquor with concentration being 45% and a
hydrogen peroxide liquor with concentration being 31%, wherein the volume ratio of the
potassium hydroxide liquor to the
hydrogen peroxide liquor is 1:1.05-1:7.25. Cleaning equipment for the
silicon chip comprises an ultrasonic cleaning part usedfor removing granular
silicon powder; a
chemical cleaning part used for removing
grease,
metal ions and organic impurities, a first rinsing part used for removing chemical remaining on the surface ofthe
silicon chip, a cleaning liquor cleaning part used for removing
organic matter with the cleaning liquor for the
silicon chip, a second rinsing part used for removing the cleaning liquor remainingon the surface of the
silicon chip as well as a slow pulling part used for removing water on the surface of the silicon
chip, so that water stains do not remain on the surface of the silicon chip. The invention further provides a cleaning process for the silicon chip on the basis of the cleaning equipment. The cleaning liquor, the cleaning equipment and the cleaning process for the silicon chip have the beneficial effects that the silicon chip
surface cleaning effect is improved, cleaning efficiency and cleaning quality are improved, cleaning cost is saved, inspection proves that dirty chip rate is reduced obviously, and texture surface of the silicon chip is uniform and free of
dirt after texture
etching.