This invention relates to a dual-embedded composite detection
system, belonging to the field of
electron microscopy technology. It effectively combines
electron detection, EDS detection, and
fluorescence detection, achieving simultaneous detection of the same location on the sample by multiple detectors, and efficiently collecting signals to obtain high-quality image information. The
system includes: an
electron source, an electron accelerating
electrode, an objective lens, an EDS
detector, a direct electron
detector, a sample, a sample stage, and a
control unit. Both the EDS
detector and the direct electron detector are obliquely inserted inside the objective lens, with their probes close to the objective lens's detection port. The sample stage, the EDS detector, the direct electron detector, the
electron source, and the objective lens are all connected to the
control unit. The objective lens has a daguerreotype on its internal
pole piece, and reflective cones are located at the bottom ends of both the inner and outer annular walls of the objective lens's detection port.