37 results about "Radio-frequency quadrupole" patented technology

The invention relates to the technical field of radio frequency quadrupole accelerators, in particular to a method for predicting electromagnetic field distribution of a radio frequency quadrupole accelerator by adopting a support vector machine, which comprises the following steps of: acquiring an electric field signal, a magnetic field signal and electromagnetic field distribution in the radio frequency quadrupole accelerator by presetting an electric field probe and a Hall sensor; denoising, de-trending, normalizing and smoothing the collected electric field signal and magnetic field signal to improve the signal quality and the accuracy of subsequent analysis; performing wavelet transform analysis on the collected electric field signals, extracting electric field characteristic parameters, performing wavelet transform analysis on the collected magnetic field signals, and extracting magnetic field characteristic parameters. According to the method, the wavelet transform and the support vector machine are combined, the advantages of the wavelet transform in the aspects of multi-scale signal analysis and noise suppression can be fully played, and meanwhile, the precision, efficiency, robustness and adaptability of radio frequency quadrupole accelerator electromagnetic field distribution prediction are remarkably improved by utilizing the strong classification and regression capability of the SVM.

The invention relates to an acceleration device. The acceleration device comprises a drift tube linear accelerator and a radio frequency quadrupole field accelerator. And the radio frequency quadrupole field accelerator is directly connected with the drift tube linear accelerator. The radio frequency quadrupole field accelerator includes an electrode. In the proton transmission direction, the electrode is of an integrated structure and comprises a conventional part and an extension part. The extension part comprises one or more bunching units, the bunching units have negative synchronous phases, and the bunching capability of the radio frequency quadrupole field accelerator is adjusted by setting the length, the number and the synchronous phases of the bunching units; the aperture and the modulation coefficient of the bunching unit are the same as those of the previous unit, and the previous unit is a conventional part or the bunching unit.

The utility model provides a kind of proton acceleration system, neutron generating device and isotope generating device.The proton acceleration system includes radio frequency quadrupole acceleration module, at least has radio frequency quadrupole accelerator;Drift tube linear accelerator module, at least has drift tube linear accelerator.Based on the above-mentioned proton acceleration system, first by radio frequency quadrupole acceleration module to proton beam is accelerated to handle, so that the energy of proton beam reaches first energy value;Further energy adjustment processing is carried out to the proton beam of first energy value by drift tube linear accelerator module, so that the energy of proton beam reaches the second energy value that meets requirements.

Maintainability is to be improved. A radio frequency quadrupole linear accelerator includes a tubular housing part having an outer peripheral surface at which two pairs of openings extending in an axial direction are formed facing each other, and a plurality of first vane electrodes inserted into the respective openings of the tubular housing part from outside toward an axial center, detachably attached to the openings, and disposed facing each other.

The invention provides a linear injector system and a beam control method, and the system comprises a radio frequency quadrupole accelerator which comprises a first bunching segment disposed at the tail end of the radio frequency quadrupole accelerator, and the first bunching segment is used for carrying out the initial phase width compression of a beam; the at least one interdigital drift tube linear accelerator comprises at least one KONUS period, and each KONUS period sequentially comprises a second bunching section used for compressing the phase width of the beam from the upstream to obtain the beam subjected to phase width compression from the input end to the output end; the acceleration section is used for accelerating the beam current after the phase width compression at a constant synchronous phase to obtain an accelerated beam current; and the focusing section is used for focusing the accelerated beam on a plane perpendicular to the transmission direction to obtain a focused beam.

The application discloses a photochemical ionization time-of-flight mass spectrometry VOCs atmospheric on-line monitoring device and method, which comprises a complete ion generation and analysis system formed by a plurality of gas mixing cavities, photochemical ionization cavities, differential vacuum cavities, radio frequency quadrupole cavities, electrostatic lens cavities and TOF detection zones in series, and is equipped with an automatic gas path control system; the application integrates an intelligent closed-loop control system; the system uses a three-dimensional ion detection system to acquire time and space quality parameters of an ion beam in real time, combines with a current hardware state of the instrument, and calculates 12-dimensional hardware parameter adjustment instructions in real time through a convolutional neural network model; the application solves the performance drift problem of a traditional mass spectrometer caused by environmental changes through the construction of an intelligent closed loop of sensing-diagnosis-decision-execution, realizes the autonomous optimization, long-term stable and high-precision operation of the instrument, and significantly improves the automation level, accuracy and reliability of atmospheric VOCs on-line monitoring.

The invention provides an isotope production device based on a multi-particle linear accelerator. The isotope production device comprises an ion source system located on a main path of a linear beam, a radio frequency quadrupole accelerator, a multi-section linear acceleration unit and a power source system. The power source system is connected with a power divider with a plurality of output branches, and each output branch of the power divider is provided with a radio frequency delay device and a feed-in end of a linear acceleration unit; deflection magnets are installed between every two adjacent sections of the linear acceleration unit and on the downstream of the last section, and the deflection magnets are used for enabling the beam current to deflect to a sub-path of the beam current in an open state. An isotope production target is arranged on a sub-path of the beam at the downstream of each deflection magnet, and detachable target bodies of the isotope production targets are regularly transmitted to the separation and extraction device. The device disclosed by the invention solves the problems that the purity is low, the yield is relatively low, and multiple isotopes cannot be produced on a large scale at the same time.

The invention provides a tuning method of a radio frequency quadrupole field accelerator cavity and a medium. The method comprises the following steps: acquiring an initial measurement result of four-quadrant electric field distribution in the radio frequency quadrupole field accelerator cavity based on a perturbation body; performing gravity error compensation on the initial measurement result to obtain a corrected measurement result; obtaining a dipolar field component and a quadrupolar field component in the cavity of the radio frequency quadrupolar field accelerator based on the correction measurement result; and judging whether the radio frequency quadrupole field accelerator cavity meets a tuning target or not based on the dipolar field component and the quadrupole field component, and if not, executing tuning operation until the tuning target is met. According to the invention, the gravity error generated by the perturbation method can be compensated, and the movement track of the perturbation body in the cavity of the radio frequency quadrupole field accelerator can be fitted, so that the accurate electric field distribution in the cavity can be simulated, and the accurate tuning can be realized.

The application discloses a kind of gas-phase pollutant full-species high-sensitivity online mass spectrometer and detection method, it is related to mass spectrometry technical development technical field.Mass spectrometer includes high-energy photoionization ion source structure, ion transmission structure and mass spectrum detection structure.High-energy photoionization ion source structure includes high-energy photon generation structure, sample introduction tube and ionization chamber, high-energy photon generation structure utilizes neon discharge to generate high-energy photon, high-energy photon is mixed with the gas to be measured that enters through sample introduction tube in ionization chamber, and the gas to be measured is ionized;Ion transmission structure is equipped with radio frequency quadrupole rod, for filtering the large amount of N2 + And O2 + Non-target background ions generated when measuring air;Mass spectrum detection structure is equipped with pulse-compensation double-electrode ion removal device, for further removing non-target background ions, relieving the measurement saturation and loss of ion detector.The application can realize the full coverage high-sensitivity detection of all gas-phase organic and inorganic pollutants in atmosphere.

The invention provides an octagonal radio frequency quadrupole acceleration cavity single-section cavity, a welding device and a welding method, and relates to the technical field of accelerators. The single-section cavity adopts a four-block design, namely, the single-section cavity is configured to be composed of a first vertical electrode, a first horizontal electrode, a second vertical electrode and a second horizontal electrode; the first vertical electrode and the second vertical electrode are each provided with a protruding structure in the direction facing the interior of the cavity, in other words, the protruding structures are designed to be W-shaped, and the protruding structures are configured to serve as geometric symmetry references to ensure that in the machining process, the machining precision is improved. The degree of symmetry of the first vertical electrode and the second vertical electrode relative to the first horizontal electrode and the second horizontal electrode meets a preset condition; and one of any two contacted electrodes of the first vertical electrode, the first horizontal electrode, the second vertical electrode and the second horizontal electrode is provided with a solder groove for filling solder. Compared with a traditional eight-block type design, the single-section cavity has the advantage that the machining precision of the cavity is greatly improved.

The invention relates to the technical field of particle accelerators, in particular to a self-adaptive control method and device of a radio frequency quadrupole field accelerator and a BNCT system. The self-adaptive control method comprises the following steps: acquiring a CT image and boron concentration distribution information of a patient; calculating by using a Monte Carlo method to obtain an optimal neutron beam parameter; initializing operation control parameters of the radio frequency quadrupole field accelerator; completing parameter calibration before boron neutron capture therapy; receiving beam parameters and patient positions monitored in the treatment process in real time, and predicting beam transmission rate and emittance in real time by using a beam dynamics prediction model; and according to a prediction result, adjusting operation control parameters of the radio frequency quadrupole field accelerator in real time to ensure that the deviation between the actual irradiation dose and the treatment plan prescription dose is less than or equal to 5%. The operation real-time optimization response speed of the radio frequency quadrupole field accelerator is effectively improved, the operation control parameters of the radio frequency quadrupole field accelerator can be adjusted in real time according to the patient state and the treatment process, and the treatment effect and safety are improved.

The application discloses a photochemical ionization time-of-flight mass spectrometry VOCs atmospheric on-line monitoring device and method, which comprises a complete ion generation and analysis system formed by a plurality of gas mixing cavities, photochemical ionization cavities, differential vacuum cavities, radio frequency quadrupole cavities, electrostatic lens cavities and TOF detection zones in series, and is equipped with an automatic gas path control system; the application integrates an intelligent closed-loop control system; the system uses a three-dimensional ion detection system to acquire time and space quality parameters of an ion beam in real time, combines with a current hardware state of the instrument, and calculates 12-dimensional hardware parameter adjustment instructions in real time through a convolutional neural network model; the application solves the performance drift problem of a traditional mass spectrometer caused by environmental changes through the construction of an intelligent closed loop of sensing-diagnosis-decision-execution, realizes the autonomous optimization, long-term stable and high-precision operation of the instrument, and significantly improves the automation level, accuracy and reliability of atmospheric VOCs on-line monitoring.

The invention relates to a compact proton linear accelerator compatible with conventional radiotherapy and flash therapy, and the accelerator comprises an ion source which generates a proton beam; the radio frequency quadrupole field accelerator comprises a first radio frequency quadrupole field accelerator and a second radio frequency quadrupole field accelerator, and the first radio frequency quadrupole field accelerator and the second radio frequency quadrupole field accelerator are spliced in a vacuum sealing mode through a flange; the side-coupled drift tube linear accelerator and the coupled cavity linear accelerator are sequentially arranged behind the radio frequency quadrupole field accelerator, and the ion source, the radio frequency quadrupole field accelerator, the side-coupled drift tube linear accelerator and the coupled cavity linear accelerator form a full-linear structure. The device has remarkable advantages in the aspects of treatment capacity, occupied area, construction scale and the like, and is more beneficial to popularization and application in a hospital environment.

The present application relates to the technical field of particle acceleration apparatuses and applications thereof. Disclosed are a radio frequency quadrupole accelerator and a charged particle accelerator system. The quadrupole accelerator comprises an accelerator housing, wherein four long-strip-shaped acceleration electrodes which are symmetrically mounted around a central axis of the accelerator are arranged in the accelerator housing, an acceleration area formed by arranging the four acceleration electrodes opposite each other is provided near the center axis of the accelerator, and a vacuum isolation pipe which is made of a non-metal material and configured to surround the acceleration area to form a vacuum acceleration cavity area is mounted around the acceleration area. In the present application, a non-acceleration area operates under the atmospheric pressure condition, and there is no need to consider the vacuum sealing requirements of the accelerator housing, thereby enabling a light weight and a simplified structure.

The invention belongs to the field of accelerator assembly preparation, and discloses a method for preparing a radio frequency quadrupole field accelerating cavity assembly through 3D printing, distribution and use of copper powder can be more accurately controlled by adopting a selective melting powder laying printing technology, material waste or unnecessary cutting loss in a traditional manufacturing method is avoided, and the manufacturing efficiency is improved. The utilization efficiency of the material is greatly improved. In the electron beam melting forming process, the copper powder can be molten and solidified more evenly, and stress or defects generated by machining on the surface and the interior of a material are reduced. According to the 3D printing technology adopted by the invention, complex geometrical shapes (such as detailed structures of a radio frequency quadrupole field acceleration cavity) can be accurately manufactured in a vacuum environment, and the precise structures are difficult to machine and form at one time in the traditional manufacturing process and need to be machined and assembled for multiple times. In conclusion, through the adoption of the 3D printing and electron beam forming technology, the manufacturing efficiency is improved, and the material waste is reduced.

The invention provides a preparation method of an octagonal radio frequency quadrupole field cavity electrode, and relates to the technical field of medical accelerators. The preparation method comprises the following steps: performing finish machining on one side of each electrode material according to a rough reference surface of each electrode material so as to determine an initial positioning surface and an initial modulation line of each electrode material; the actual position relation between the initial modulation line of each electrode material and the initial positioning face of each electrode material is determined, finish machining is carried out, and a target modulation line and a target welding face of each electrode material after finish machining are obtained; and according to the target modulation line and the target welding surface of each fine-machined electrode material, the multiple fine-machined electrode materials are welded, and the octagonal radio frequency quadrupole field cavity electrode is obtained.

This invention relates to the field of particle acceleration technology, and provides a radio frequency quadrupole accelerator for multiple vacuum scenarios. The accelerator includes a radio frequency cavity and a vacuum cover. The cavity wall of the radio frequency cavity has grid holes for evacuation. The vacuum cover is detachably installed at the grid hole location. When the vacuum cover is installed at the grid hole location, it maintains a vacuum environment within the radio frequency cavity in independent vacuum applications. When the vacuum cover is detached from the grid hole location, it places the radio frequency cavity within a vacuum chamber in integrated vacuum applications. This invention, by providing evacuation channels through grid holes in the cavity wall of the radio frequency cavity, eliminates the need for the welded vacuum flange structure of existing radio frequency cavity walls, effectively reducing the lateral dimensions of the radio frequency cavity and thus its volume, enabling miniaturized accelerator design. Furthermore, the grid hole structure effectively reduces the impact of the vacuum channels on the radio frequency performance of the radio frequency cavity.

The invention relates to the technical field of ion accelerators, in particular to a radio frequency quadrupole accelerator system. The radio frequency quadrupole accelerator system comprises a radio frequency quadrupole cavity which is formed by sequentially splicing a plurality of sub-cavity sections along the length direction of the radio frequency quadrupole cavity; the cavity bracket is arranged below the radio frequency quadrupole cavity and extends along the length direction of the radio frequency quadrupole cavity; the power source module is connected with the radio frequency quadrupole cavity and is used for providing energy for generating a radio frequency electromagnetic field; the water cooling module is used for cooling the radio frequency quadrupole cavity; the vacuum module is communicated with the cavity division section and is used for reducing the internal air pressure of the radio frequency quadrupole cavity; wherein the power source module comprises power couplers, feed tubes and a radio frequency power source, and the plurality of power couplers are installed on the cavity dividing sections in a one-to-one correspondence mode and are connected with the radio frequency power source through the feed tubes. The radio frequency quadrupole accelerator system is simple and uniform in structure, easy to maintain and stable in performance.

The application relates to an ion implanter, comprising at least one ion source, a radio frequency quadrupole accelerator and a cross finger magnetic type drift tube linear accelerator arranged in sequence along a beam transmission direction, a low-energy transmission line is arranged between the ion source and the radio frequency quadrupole accelerator, a matching section is arranged between the radio frequency quadrupole accelerator and the cross finger magnetic type drift tube linear accelerator, and the cross finger magnetic type drift tube linear accelerator comprises four cavities, and a focusing section is arranged between any two adjacent cavities. The ion implanter adopts a higher working frequency, and through optimized beam dynamics design and structure design, miniaturization and high efficiency of the ion implanter are realized.

The invention provides a multi-energy multi-ion linear accelerator for isotope production. The multi-energy multi-ion linear accelerator comprises an ion source system located on a main path of a beam, a radio frequency quadrupole accelerator and a multi-section drift tube linear acceleration unit, the ion source system comprises a plurality of ion sources, deflection magnets are arranged between two adjacent sections of the drift tube linear acceleration unit and on the downstream of the last section, and the deflection magnets can be switched between an opening state and a closing state and are used for enabling beam current to deflect to a sub-path of the beam current in the opening state and enabling the beam current to deflect to a sub-path of the beam current in the closing state. Therefore, each deflection magnet serves as a beam extraction position when being opened, and extraction of beams with different energies is realized. The multi-energy multi-ion linear accelerator for isotope production can output ion beams with different energies through different beam extraction positions, and accelerated ions can be protons, deuterium ions, helium ions, carbon ions, nitrogen ions, oxygen ions and other ions. Therefore, isotope production types are enriched, and isotope production efficiency is improved.

The invention relates to the technical field of particle accelerators, in particular to a radio frequency quadrupole field accelerator and a preparation process and application thereof. The radio frequency quadrupole field accelerator comprises a shell and four electrode plate assemblies, each electrode plate assembly comprises a mounting part and blades, a cooling channel is arranged between each electrode plate assembly and the shell, and the four blades face each other at the axis center of the shell to form an acceleration area; the blade is formed at a time by adopting an oxygen-free copper foil with the thickness of 0.1 mm-100 mm through a plastic forming process. The core performance indexes such as the resonant frequency precision and the quality factor of the radio frequency quadrupole field accelerator can be accurately regulated and controlled according to design requirements, and in actual verification, the resonant frequency precision reaches + / -0.01%, the quality factor Q value is larger than or equal to 8000, the beam transmission efficiency is larger than or equal to 98%, the working frequency is 162.5 MHz, and the output energy is 2.5 MeV. According to the preparation process, a complex integral mechanical cutting process is avoided, and the material and processing cost is effectively reduced.

The invention relates to the technical field of particle acceleration, and provides a radio frequency quadrupole field accelerator applied to multiple vacuum scenarios, the accelerator comprises a radio frequency cavity and a vacuum cover plate, the cavity wall of the radio frequency cavity is provided with grid holes used for vacuumizing, the vacuum cover plate is detachably installed at the grid holes, and the vacuum cover plate is detachably installed at the grid holes under the condition that the vacuum cover plate is installed at the grid holes. The vacuum module is used for maintaining a vacuum environment in the radio frequency cavity in an independent vacuum use scene; and under the condition that the vacuum cover plate is detached from the grid holes, the radio frequency cavity is arranged in the vacuum chamber in an integrated vacuum use scene. According to the invention, the grid holes are formed in the cavity wall of the radio frequency cavity to provide a hole channel for vacuumizing the radio frequency cavity, a welded vacuum flange structure of the cavity wall of the existing radio frequency cavity is omitted, and the transverse size of the radio frequency cavity is effectively reduced, so that the volume of the radio frequency cavity is reduced, and the miniaturization design of the accelerator is realized; in addition, the grid hole structure can effectively reduce the influence of the vacuum hole channel on the radio frequency performance of the radio frequency cavity.

The invention provides an auxiliary system for production of a single-section cavity of an octagonal radio frequency quadrupole acceleration cavity, and relates to the technical field of accelerators. The auxiliary device comprises a processing device used for fixing and supporting a radio frequency quadrupole accelerating cavity electrode in a processing stage; the electrode hoisting device is used for hoisting the processed radio frequency quadrupole acceleration cavity electrode; the electrode cleaning device is used for overturning the radio frequency quadrupole accelerating cavity electrode in the cleaning stage; the single-section cavity assembling device is used for assembling the cleaned radio frequency quadrupole accelerating cavity electrode to obtain a single-section cavity; the single-section cavity hoisting device is used for hoisting the assembled single-section cavity; the auxiliary system is configured to be capable of completing a production chain of electrode machining, electrode hoisting, electrode cleaning, single-section cavity assembling and single-section cavity hoisting under the synergistic effect of the machining device, the electrode hoisting device, the electrode cleaning device, the single-section cavity assembling device and the single-section cavity hoisting device.

The invention relates to the technical field of synchronous accelerators, in particular to a mixed four-beam ion accelerator which comprises an ion source, a radio frequency quadrupole field accelerator, a focusing device and a target chamber which are arranged in sequence, and the ion source is used for continuously generating N kinds of ion beams with different mass-to-charge ratios; the radio frequency quadrupole field accelerator is provided with N beam hole channels and is used for accelerating the N ion beams with different mass-to-charge ratios at the same time; the focusing and bunching device is provided with a conical solenoid so as to converge the N accelerated ion beams with different mass-to-charge ratios into one beam to form an ion beam mixed with different mass-to-charge ratios; the target chamber is used for placing a target material and injecting the mixed ion beam; the ion source of the ion accelerator can generate ion beams with different mass-to-charge ratios, and enables the beams with different mass-to-charge ratios to realize different acceleration effects to obtain beams with different energies, and the beams are converged and hit into the target chamber, so that the flexibility is higher.

The invention relates to the technical field of particle accelerators, in particular to a remote operation and maintenance type radio frequency quadrupole field accelerator system with an intelligent diagnosis function, which comprises a beam acceleration subsystem, a remote monitoring subsystem, an intelligent diagnosis and decision subsystem and a safety management and control subsystem. The remote monitoring subsystem comprises an equipment layer, an edge layer and a cloud layer, and the equipment layer obtains related data of coverage current, voltage, temperature, vacuum degree and vibration through a plurality of sensors arranged in the beam acceleration subsystem. The intelligent diagnosis and decision subsystem comprises a rule engine module, a machine learning model and a knowledge base module. The beam acceleration subsystem, the remote monitoring subsystem, the intelligent diagnosis and decision subsystem and the safety management and control subsystem cooperate to realize the whole-process remote online maintenance of the radio frequency quadrupole field accelerator system. According to the system, the remote maintenance efficiency and the safety controllability are effectively improved, and the operation and maintenance cost is reduced.

The application relates to the technical field of particle acceleration, and particularly discloses a high-repetition nanosecond beam pulsing system and method, wherein the high-repetition nanosecond beam pulsing system comprises, in sequence along a beam transmission direction, a direct current ion source, a low-energy beam transmission section, a radio frequency quadrupole field accelerator, a high-energy beam transmission section and a target chamber, adopts a three-stage structure of 'front-end pulsing + middle-stage acceleration + rear-end purification', and is helpful to stably realize high-repetition, nanosecond narrow pulse width output; through pre-chopping and post-bunching, the pulse width is ensured, and invalid particles are reduced to enter a subsequent acceleration channel; the working frequency of the radio frequency chopper is half of the target pulse repetition frequency, the difficulty of synchronous control can be reduced, time sequence accuracy and phase synchronization can be ensured, beam loss and phase disorder can be avoided, pulse time sequence consistency can be ensured, and beam utilization rate can be improved; and the high-repetition nanosecond beam pulsing is stably ensured.

The invention provides a proton acceleration system, neutron generation equipment and isotope generation equipment. The proton acceleration system comprises a radio frequency quadrupole acceleration module which is at least provided with a radio frequency quadrupole accelerator; and the drift tube linear acceleration module is at least provided with a drift tube linear accelerator. Based on the proton acceleration system, acceleration processing can be performed on the proton beam through the radio frequency quadrupole acceleration module, so that the energy of the proton beam reaches the first energy value; and further energy adjustment processing is carried out on the proton beam with the first energy value through the drift tube linear accelerator module, so that the energy of the proton beam reaches a second energy value meeting the requirement. Therefore, the energy of the proton beam output by the proton acceleration system can be adjusted, the proton beam with the energy meeting the requirement is obtained, different application scenes can be well adapted, and diversified scene requirements are met.

The invention discloses a multi-parameter high-precision cold state test device for a radio frequency quadrupole accelerator, which relates to the technical field of particle accelerator testing and comprises a leveling system, a measuring platform and a control system. And the leveling system is provided with a plurality of test fixtures capable of axially adjusting intervals and a lifting mechanism, and is used for fixing and automatically leveling the RFQ cavity. The two measuring platforms are arranged at the two ends of the leveling system respectively and provided with rope traction mechanisms with perturbation blocks. The control system integrates, measures and controls the industrial personal computer, the network analyzer and other units, synchronously controls automatic leveling of the cavity, movement of the perturbation block and frequency sweeping testing, and automatically collects and calculates a plurality of parameters such as resonant frequency, quality factor, field distribution, phase and mode spectrum in one-time clamping. Leveling, automatic measurement and integrated control are combined, and compared with the problems that traditional testing is tedious in operation, low in precision and poor in universality, the efficiency, precision and repeatability of RFQ cavity cold state testing are improved.

The present application relates to a radio frequency quadrupole accelerator and an accelerating device. The radio frequency quadrupole accelerator includes an electrode. Along the proton transmission direction, the electrode is an integrated structure, including a conventional part and an extension part; the extension part includes one or more bunching units, and the bunching unit has a negative synchronization phase. The bunching ability of the radio frequency quadrupole accelerator is adjusted by setting the length, number and synchronization phase of the bunching unit; the aperture and modulation coefficient of the bunching unit are the same as the aperture and modulation coefficient of the previous unit, and the previous unit is a conventional part or a bunching unit. The electrode of the radio frequency quadrupole accelerator of the present application enables the beam to pass through the position of the extension part after being accelerated by the conventional part, and the synchronization phase of the extension part can bunch the particles. This improves the bunching ability of the radio frequency quadrupole accelerator. The extension part is arranged close to the exit end, so the beam leaving the exit end maintains a small beam divergence under the action of the extension part and enters the next particle process.

The invention relates to an ion implanter and an ion implantation method. The ion implanter comprises an ion source, a mass selection device, a primary acceleration device, a secondary acceleration device, a beam shaping device, an implantation device and a target chamber which are sequentially connected through pipelines, and the primary acceleration device and the secondary acceleration device are in a radio frequency quadrupole field accelerator and non-radio frequency quadrupole field accelerator combination mode. The ratio of the first energy increased by the ions at the primary acceleration device to the second energy increased by the ions at the secondary acceleration device is configured to reduce the total length and the total cost of the primary acceleration device and the secondary acceleration device under the condition that the same ion acceleration energy is achieved. The method improves the ion acceleration efficiency, reduces the acceleration cost, reduces the acceleration space, and is suitable for the application field of high-energy and large-beam ion implantation.