The invention discloses an ultra-multi-layer ultra-deep-cavity LTCC substrate
manufacturing technology. A conventional
solid flat plate LTCC substrate
machining technology is broken through, after hole filling and
screen printing, a cavity window in an unglazed porcelain layer is formed in a
laser-
cutting-up mode, the non-
operability problem of hole filling and
screen printing technologies on a large-size window unglazed porcelain piece is avoided, and the contraction amount and the unevenness of an unglazed porcelain piece obtained after filling and printing before piece stacking are lowered. After cofiring, an
abrasive wheel cuts a ripe porcelain plate in a rotating mode, and the fact that an LTCC substrate which is regular in shape, accurate in size, thin in wall and ultra-deep in cavity is machined is guaranteed. Network multi-through-hole connecting is used in an ultra-deep-cavity ultra-multi-layer unglazed porcelain side wall, and the connecting
pass rate is guaranteed through redundancy. Through a lamination tool set and an optimized overlying technology method, the lamination and stacking technology of the deep-large-cavity ultra-thick LTCC substrate is guaranteed. An
abrasive wheel dicing saw is used for opposite
cutting of a ripe porcelain body LTCC substrate from the bottom face and the top face of the ultra-thick substrate, and the problem that the maximum thickness can only reach 5 mm during blade unglazed porcelain hot
cutting and
abrasive wheel ripe porcelain rotating cutting is solved.