Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

121results about How to "Avoid detection failure" patented technology

Touch liquid crystal display and color filter substrate

The invention relates to a touch liquid crystal display and a color filter substrate for the same. The color filter substrate comprises a common electrode layer and a touch electrode. The touch electrode comprises a driving electrode and an induction electrode. The common electrode layer comprises a driving common electrode and an induction common electrode which are separated from each other. The driving common electrode corresponds to the driving electrode to form a driving parasitic capacitance. The induction common electrode corresponds to the induction electrode to form an induction parasitic capacitance. The driving common electrode and the induction common electrode are connected to a common voltage output end. The touch liquid crystal display and the color filter substrate which are disclosed by the invention cannot generate a current path which passes through the parasitic capacitances in a driving detection circuit, so that a large substrate signal cannot be formed at the position of the detection circuit, and thus, the problem of detection failure caused by the high parasitic capacitances can be avoided.
Owner:SHANGHAI TIANMA MICRO ELECTRONICS CO LTD

Data processing method and apparatus of wireless link control layer

The invention provides a wireless link control layer data treatment process and a device, wherein the process comprises detecting whether the PDU which is received is a step of repeated reception, and the step comprises recording missing PDU information, judging whether the PDU in the range of reception window which is received is received repeatedly according to the missing PDU information, and throwing away the PDU which is repeatedly received. The invention can accurately detect whether the PDU which is received in a repeated reception way according to the missing PDU information through recording the missing PDU information, thereby effectively avoiding the detection failure which is caused by removing relative PDU as the reconstruction of SDU is successful.
Owner:ST ERICSSON SEMICON BEIJING

3-dimensional image processing method, 3-dimensional image processing device, and 3-dimensional image processing system

Illumination light having a 2-dimensional luminance distribution is used for obtaining photographed image data, and surface attributes of a real object are estimated based on photography environment information such as information relating to the luminance distribution of the illumination light at the time of photography, along with the photographed image data. This solves a problem with 3-dimensional image processing devices which obtain information relating to surface attributes of a real object from photographed image data obtained by photographing the real object along with the 3-dimensional shape of the real object and reproduce the object as a 3-dimensional image on a display screen, wherein specular reflection may not be captured in the photographed image data with objects having metal glossiness or the like where the specular reflection only occurs at an extremely narrow angle range at the time of obtaining the surface properties, resulting in erroneous information with no specular reflection being input. Thus, photographed image data of the real object is obtained without failing to pick up any specular reflection light.
Owner:CANON KK

Obstacle detection device, robot and obstacle avoidance system

The invention provides an obstacle detection device, a robot and an obstacle avoidance system. The obstacle detection device comprises a visual detector, an ultrasonic detector and an information fusion processor; the visual detector and the ultrasonic detector are connected with the information fusion processor; the visual detector acquires a front image, and transmits the image to the information fusion processor; the ultrasonic detector detects distance information of an obstacle, and transmits the distance information to the information fusion processor; and the information fusion processor determines obstacle information according to the received image and distance information, and outputs the obstacle information. According to the obstacle detection device, the robot and the obstacle avoidance system, the visual detector and the ultrasonic detector detect the obstacle information in the front simultaneously, thus all the obstacle information in the front can be detected accurately, and the situation of detection failure when in a night-vision environment or encountering obstacles such as a white wall and a fine rope is avoided.
Owner:SENSCAPE TECH BEIJING CO LTD

Mass spectrometer

The present invention provides a single set of mass spectrometer capable of selectively performing the following two modes of analyses according to the purpose of analysis: the first mass spectrometry mode in which the analysis can be repeated at short intervals of time; and the second mass spectrometry mode in which the analysis can be performed with high mass resolution and high accuracy. In an embodiment of the present invention, ions ejected from an ion source 1 travel along a straight path B, on which gate electrodes 3 are provided. When a voltage is applied from an MS mode selection controller 7 to the gate electrodes 3, the ions are introduced into a loop orbit A. Located on the loop orbit A is a second ion detector 6, which is a nondestructive type of ion detector. Detection signals of the second ion detector 6 are sent to a data processor 9, which extracts flight time spectrum data from those signals and Fourier-transforms those data to convert the time axis to a frequency axis. From the frequency spectrum thus created, the mass-to-charge ratio of each ion is calculated with high accuracy. When no voltage is applied to the gate electrodes 3, the ions ejected from the ion source 1 travel along the straight path B and arrive at a first ion detector 5. This mode of analysis requires only a short period of time and can achieve a high level of time resolution.
Owner:SHIMADZU CORP

Detection method and detection device for attack in spray pattern

An embodiment of the invention relates to the technical field of computer security, in particular to a detection method and a detection device for an attack in a spray pattern, which are used to solve a problem that a method judging whether the attack in the spray pattern exists simply by detecting whether a shellcode can be executed is possible to be subjected to detection failure. The method disclosed by the embodiment of the invention comprises the steps of: detecting a calling situation of a sensitive function; if calling of the sensitive function is abnormal and an accumulative number of memory blocks that are abnormal is not less than a first threshold value, performing time stamp detection upon the memory blocks that are abnormal during a calling progress of the sensitive function, generating a first fraction according to a result of the time stamp detection; if the first fraction is not less than a second threshold value, determining that an application is subjected to attach in the spray pattern. Whether the attack in the spray pattern exists can be judged simply by detecting time stamps of the abnormal memory blocks, so that occurrences of detection failure are reduced.
Owner:NSFOCUS INFORMATION TECHNOLOGY CO LTD +1

Secondary synchronization channel detection method and device

The invention provides a secondary synchronization channel detection method and a secondary synchronization channel detection device. The method comprises the following steps of: acquiring secondary synchronization signals (SSS) and channel estimation values in two cyclic prefix (CP) modes, wherein the two CP modes comprises an extended cyclic prefix (ECP) mode and a negative cyclic prefix (NCP) mode; performing coherent detection by utilizing the channel estimation values and the SSSs to obtain channel estimation equilibrium values of the SSSs in the two CP modes; and obtaining secondary synchronization signals to be detected according to the channel estimation equilibrium values and a local candidate sequence, and detecting the secondary synchronization signals to be detected. By the method and the device, the problems of interference in the SSS in a channel environment, low response signal accuracy and low system reliability and stability in related technologies can be solved.
Owner:SANECHIPS TECH CO LTD

Image processing system

The invention discloses an image processing system. The system comprises: an image acquisition module, which is used for acquiring a target image internally loaded with a two-dimensional code label, an internally loaded lens model of the two-dimensional code label, an image acquisition mode, three-dimensional attitude information of an image acquisition terminal during image acquisition, and a distance and an angle of the image acquisition terminal relative to a target acquisition position / reference position; and an image reconstruction module is used for acquiring the lens model corresponding to the target image, the image acquisition mode, the three-dimensional attitude information of the image acquisition terminal during image acquisition, and the distance and angle of the image acquisition terminal relative to the target acquisition position / reference position, and completing the preprocessing of the image based on the requirements of the target image. According to the invention,a three-dimensional attitude sensor and a GPS positioning module are combined with the two-dimensional label technology to obtain the relative attitude information between the image acquisition terminal and the target acquisition position / reference position, and the situation of detection failure due to the influence of marker reflection or partial shielding factors is avoided.
Owner:JILIN AGRI SCI & TECH COLLEGE

Inverter disturbance type island detection method based on combination of voltage frequency and measured impedance

InactiveCN105182189AAvoid detection failureAvoid Mutual Interference FailureFault locationControl setPower inverter
The invention relates to the technical field of power system analysis and in particular relates to an inverter disturbance type island detection method based on combination of voltage frequency and measured impedance. The method is characterized by comprising the following steps: firstly analyzing island after-frequency reactive relation; controlling setting frequency-reactive feedback method inverters, and adding a feedback coefficient; if the sum of reactive power output by each inverter is not equal to zero, detecting whether an island operation state occurs or not according to the condition that whether the voltage frequency of a gird-connected inverter exceeds the limit of normal operation or not; otherwise, intensively injecting a voltage source signal at the point of common coupling of a system, wherein the signal is a single frequency signal, and the injection mode is three-phase injection; and detecting whether the island operation state occurs or not through the characteristic difference of system measurement impedance at the point of common coupling of the system. The island detection method provided by the invention can avoid failure caused by mutual interference of multiple disturbance signals in multi-inverter system scenes, and has the advantages of relatively high reliability, relatively high detection speed and simple and effective principle.
Owner:STATE GRID CORP OF CHINA +3

Nondestructive testing system for defects of composite insulator based on reflecting property of microwave band

The invention relates to a nondestructive testing system for defects of a composite insulator based on the reflecting property of a microwave band. The system comprises a femtosecond laser source, a wave guide device, a switch port, an oscillograph and a data analysis module, wherein the femtosecond laser source is used for generating detection signals; the wave guide device is used for connecting the femtosecond laser source with the switch port; the switch port comprises a partial wave mirror surface with bidirectional permeability to microwave band signals and is used for separating incident signals and reflected signals; and the data analysis module is used for carrying out time-domain analysis on the incident signals and the reflected signals, simulating and calculating basic conditions of a composite insulator at a tested point so as to realize defect determination. By utilizing a new composite insulator defect detection manner, internal defects of the composite insulator can be effectively detected.
Owner:STATE GRID JIANGSU ELECTRIC POWER CO LIANYUNGANG POWER SUPPLY CO +2

Sewing needle detector

The invention relates to a sewing needle detector which comprises a bench and two supports. The two bearings are symmetrically disposed on the bench. Transmission shafts are connected between inner sides of the two bearings. A conveying belt is disposed on the transmission shafts. A support is further disposed outside the two supports. A controller, a photoelectric sensor connected with the controller, a metal sensor, a dust collector and a cylinder are disposed on the support. A beam capable of sliding along the support is further disposed on the support. The piston rod of the cylinder is connected with the beam. The dust accumulating on the conveying belt is removed by the dust collector, the dust collector is capable of moving back and forth to facilitate through removal of the dust, and accordingly detection failure due to reaction of pollutant on the conveying belt is avoided and the service life of the conveying belt is prolonged. The sewing needle detector has fine economic benefit and social benefit.
Owner:WUJIANG XIAOYU JET WEAVING

Industrial control system sequence attack detection method and device

ActiveCN107491058ASequence attack is efficientSequence Attack AccurateElectric testing/monitoringAlgorithmHide markov model
The invention provides an industrial control system sequence attack detection method and device. The method comprises the steps of (S1) obtaining multiple observed quantities of sensors controlled by multiple programmable logic controllers as a test set, and obtaining a first continuous quantum set and a first discrete quantum set in the test set according to each observation value model obtained by a value classification method in advance, (S2) obtaining respective corresponding first matching probability and second matching probability by using a trained hidden Markov model based on the first continuous quantum set and the first discrete quantum set, and (S3) obtaining a detection result of industrial control system sequence attack with the combination of weights of the discrete quantum set and the continuous quantum set based on the first matching probability and the second matching probability. According to the method provided by the invention, while a condition that the industrial control system sequence attack detection is failed after a single observation quantity is tampered is avoided, and the sequence attack of an industrial control system can be efficiently and accurately identified.
Owner:INST OF INFORMATION ENG CAS

Method for quickly making hot beverage by food processor

The invention provides a method for quickly making a hot beverage by a food processor. The food processor comprises a machine base, a stirring cup arranged on the machine base and a stirring knife arranged in the stirring cup, wherein a motor and a control unit are arranged in the machine base. The food processor further comprises a heating device. The method comprises the steps: at the first heating stage, heating pulp in the stirring cup by full-power operation of the heating device; at the crushing stage, driving the stirring knife to rotate by the motor and stirring and crushing the pulp in the stirring cup; at the boiling stage, controlling the heating device to operate in a non-full power way by the control unit and boiling the crushed pulp in the stirring cup. The method further comprises the steps: at the stirring and cooling stage, controlling the motor to drive the stirring knife by the control unit to rotate at a rotating speed V1, and stirring and cooling the pulp, wherein2000 rpm <=V1 <= 7800 rpm, the stirring and cooling stage is set after the first heating stage and before the crushing stage, so that the heated pulp is rapidly cooled, and the pulp is prevented fromoverflowing in the high-speed crushing process.
Owner:JOYOUNG CO LTD

Method for analyzing analyte in tissue fluid, analyzer for analyzing analyte in tissue fluid, cartridge for analyzing analyte in tissue fluid, and kit for analyzing analyte in tissue fluid

A method for analyzing an analyte in tissue fluid is disclosed. The method comprises: placing a collecting member in contact with the skin of a subject, wherein the collecting member is configured to collect and retain tissue fluid containing the analyte from the subject; collecting tissue fluid from the subject into the collecting member; detaching the collecting member from the skin of the subject; causing the analyte in the tissue fluid collected by the collecting member to diffuse in a liquid by supplying the collecting member with the liquid; and detecting the analyte diffused in the liquid. An analyzer for analyzing an analyte in tissue fluid, and cartridge and kit for use in the analyzing method are also disclosed.
Owner:SYSMEX CORP

Method and device for detecting mode of holding terminal by user and terminal

The embodiment of the present invention discloses a method, device and terminal for detecting the way a user holds a terminal, relates to the field of human-computer interaction, and is used to realize a detection scheme for a way a user holds a terminal without increasing hardware complexity . In the embodiment of the present invention, when the terminal enters the holding mode detection mode, the change of the capacitance generated by the vertical electrodes at different positions in the vertical electrode array inside the touch screen caused by the user touching or approaching the touch screen of the terminal is detected; According to the detected variation of the capacitance, the manner in which the user holds the terminal is determined; thereby solving the above-mentioned problem.
Owner:QINGDAO HISENSE MOBILE COMM TECH CO LTD

Vehicle off-line detection system and detection method for detecting Bluetooth key function

The invention relates to a vehicle off-line detection system and detection method for detecting a Bluetooth key function. The vehicle off-line detection system for detecting the Bluetooth key function comprises the following components: a Bluetooth key cloud platform, a Bluetooth key detection system, a Bluetooth key controller, a manufacturing system and off-line equipment. The Bluetooth key cloud platform and the Bluetooth key detection system are adopted for interactive communication, the Bluetooth key detection system and a user smart phone use the same Bluetooth key cloud platform, thus the cost is reduced, and the problem that Bluetooth key detection fails due to the fact that a cipher machine system developed by a factory cannot be updated in time is effectively solved.
Owner:JIANGLING MOTORS

Air conditioner indoor unit and filter screen filth blockage detection method thereof

The invention belongs to the field of air conditioners, and particularly relates to an air conditioner indoor unit and a filter screen filth blockage detection method thereof. The air conditioner indoor unit comprises a shell, at least one pressure sensor assembly and a controller; an air inlet is formed in the shell, a mounting groove is formed in the air inlet, and a filter screen is mounted onthe mounting groove; the at least one pressure sensor assembly is arranged on the contact surface of the filter screen and a filter tank and is used for detecting and sending the pressure value of thefilter screen in the mounting tank; and the controller is located in the shell and used for receiving the pressure value detected by the pressure sensor assemblies and judging the filth blockage condition and / or the installation condition of the filter screen according to the detection result. The air conditioner indoor unit can accurately detect the filth blockage condition of the air conditioner filter screen, and is simple in structure and low in cost.
Owner:GREE ELECTRIC APPLIANCES INC

Mass spectrometer

The present invention provides a single set of mass spectrometer capable of selectively performing the following two modes of analyses according to the purpose of analysis: the first mass spectrometry mode in which the analysis can be repeated at short intervals of time; and the second mass spectrometry mode in which the analysis can be performed with high mass resolution and high accuracy. In an embodiment of the present invention, ions ejected from an ion source 1 travel along a straight path B, on which gate electrodes 3 are provided. When a voltage is applied from an MS mode selection controller 7 to the gate electrodes 3, the ions are introduced into a loop orbit A. Located on the loop orbit A is a second ion detector 6, which is a nondestructive type of ion detector. Detection signals of the second ion detector 6 are sent to a data processor 9, which extracts flight time spectrum data from those signals and Fourier-transforms those data to convert the time axis to a frequency axis. From the frequency spectrum thus created, the mass-to-charge ratio of each ion is calculated with high accuracy. When no voltage is applied to the gate electrodes 3, the ions ejected from the ion source 1 travel along the straight path B and arrive at a first ion detector 5. This mode of analysis requires only a short period of time and can achieve a high level of time resolution.
Owner:SHIMADZU CORP

Soft package battery expansion detection device, system and method

The invention discloses a soft package battery expansion detection device, which is suitable for carrying out expansion detection on a battery in the battery compartment. A gap is formed between the inner wall of the battery compartment and the outer wall of the battery, the soft package battery expansion detection device is installed in the gap, and when the battery expands and the soft package battery expansion detection device is triggered, the soft package battery expansion detection device generates an expansion signal; the soft package battery expansion detection device is simple in structure and low in implementation cost, can effectively detect the expansion of the battery, and avoids safety accidents caused by the expansion of the battery. The invention also discloses a soft package battery expansion detection system. The invention also discloses a soft package battery expansion detection method.
Owner:广东力科新能源有限公司

Window type air cleaning device

The invention provides a window type air cleaning device comprising a main housing, a filter net, and a controller; two sides of the main housing are respectively provided with a first cover and a second cover; the first cover and a first side plate of the main housing form a first cavity; the second cover and a second side plate of the main housing form a second cavity; a driving roller and a first transition roller are arranged in the first cavity; a driven roller and a second transition roller are arranged in the second cavity; the filter net penetrates the first and second side plates, and comes around the driving roller, the second transition roller, the first transition roller and the driven roller in sequence; a first laser emitter, a first laser receiver, a second laser emitter and a second laser receiver used for detecting the filter net are arranged in a purifying channel. The filter net can be automatically replaced, purifying effect is good, and the work state of a purifier can be determined according to the real purifying effect.
Owner:南通江涌投资开发有限公司

Display panel, preparation method thereof and display device

The invention discloses a display panel, a preparation method thereof and a display device, which are used for avoiding failure of a crack detection function. The display panel provided by one embodiment of the invention is provided with an open hole area, a display area surrounding the open hole area and a blocking area located between the display area and the open hole area. The display panel comprises a first retaining wall which is located in the blocking area and surrounds the opening area, a second retaining wall which is located on the side, close to the opening area, of the first retaining wall and surrounds the opening area, a heightening layer which is located between the first retaining wall and the second retaining wall, a crack detection line which is positioned on one side, close to the opening area, of the second retaining wall, and at least two connecting leads which are used for leading the crack detection line to the display area through the blocking area; in the direction perpendicular to the plane where the display panel is located, the orthographic projection of the area between the connecting leads and the orthographic projection of the heightening layer are overlapped.
Owner:BOE TECH GRP CO LTD +1

Polishing method and polishing apparatus

A method of polishing a substrate is disclosed. The method includes irradiating the substrate with light; measuring intensity of the reflected light; producing spectral waveform representing relationship between relative reflectance and wavelength of the light; performing a Fourier transform process on the spectral waveform to determine a thickness of the film and a corresponding strength of frequency component; determining whether the determined thickness of the film is reliable or not by comparing the strength of frequency component with a threshold value; calculating a defective data rate representing a proportion of the number of unreliable measured values to the total number of measured values; and changing the threshold value based on the defective data rate.
Owner:EBARA CORP

Detection method and detection card of thiamphenicol

InactiveCN106526029AValid Water Solubility TestEasy to observeComponent separationThiamphenicolComputer science
The invention relates to the technical field of medicine detection, and discloses a detection card of thiamphenicol. The detect card comprises a detection card body, a detection board is arranged in an inner cavity of the detection card body, location holes are formed in two sides of the detection board, a detection window is arranged in the middle of the inner cavity of the detection board, the inner cavity of the detect window is fixedly connected to a test body, a detection tube is fixedly connected to the top of the test body, and the top of the test body is fixedly connected to a flow guide pipeline. According to the detection method and detection card of thiamphenicol, through cooperative use of the detection body, the location holes and the detection board, a function of stabilizing the detection window can be achieved; then a solution is added into the test body through a sample adding hole; through cooperative use of the detection tube and the flow guide pipeline, more convenience is then brought to a user when the user is conducting a detection, and an occurrence of errors in a detection result caused by movement of the detection tube is avoided; meanwhile, the detection tube and the test body present T-shapes, thus flow velocity of a solution sample is slowed down, not only occurrence of detection failure is prevented, but also detection efficiency is improved.
Owner:WUXI X RES PROD DESIGN & RES

Hydrophobicity detection method of power transmission line vulcanized silicone rubber coating

The invention discloses a hydrophobicity detection method of a power transmission line vulcanized silicone rubber coating. The method comprises the following steps: adopting a suspension type detection device with a walk mechanism, lifting the suspension type detection device to a to-be-detected line by use of a multi-rotor type aircraft, and remotely controlling the suspension type detection device through an operator so as to suspend the detection device on the line; the device can directly walk on the line and acquire and analyze the actual condition of the line through a front image acquisition module arranged on the device, if the condensation occurs on the line, a drying mechanism arranged on the detection device is used for drying the line so as to guarantee the accuracy of the water spray detection; through the mutual synergistic effect of a lifting mechanism and other mechanisms, the detection device can be easily hung on the high-altitude line, and continuously works on the line through the walk mechanism, so that the real data of the line hydrophobicity can be more comprehensively acquired. The method disclosed by the invention is worthy of application and popularization.
Owner:LUOHE POWER SUPPLY OF HENAN ELECTRIC POWER CORP

Method for actively detecting frequency drift islands

The invention relates to a method for actively detecting frequency drift islands. The method is implemented for controlling a grid-connected inverter in a distributed power generation system. The method includes steps of detecting current grid frequency f, judging whether conditions are met or not, shutting down the grid-connected inverter immediately in a protective manner if the conditions are met, and judging a current reactive power sign or a current power factor of the inverter if the conditions are not met; exerting frequency disturbance in a positive direction for output voltage of the inverter if the current reactive power sign of the inverter is positive; exerting frequency disturbance in a negative direction for the output voltage of the inverter if the current reactive power sign of the inverter is negative; exerting frequency disturbance in an optional direction for the output voltage of the inverter if the current reactive power of the inverter is zero; and enabling the grid-connected inverter to generate new output voltage according to computed f<i+1>. The method has the advantages that matching among frequency drift and load characteristics can be guaranteed, output current waveform distortion can be prevented, and the power quality is guaranteed.
Owner:JIANGSU KAIFAN ELECTRICAL APPLIANCES

Vulnerability detection method and device

The invention discloses a vulnerability detection method and device, and relates to the technical field of network security. The method comprises: firstly, capturing flow information of a target host; then analyzing and processing the flow information by adopting an analysis algorithm based on a network protocol specification to obtain analysis data; obtaining network asset information of the target host according to the analysis data; and finally, performing vulnerability detection on the network asset information according to the preset vulnerability rule base to obtain a vulnerability detection result of the target host, so that vulnerability detection of the target host can be realized without sending a specific message, the detection efficiency is high, the accuracy is high, the condition of detection failure is effectively avoided, the network bandwidth is not occupied, and the operation efficiency of the target host is not influenced.
Owner:湖北天融信网络安全技术有限公司 +3

Fetal trophoblast cell separation method and application

The invention discloses a fetal trophoblast cell separation method. According to the characteristic of large size of trophoblast cells, non-trophoblast cells in small sizes are removed by means of single or repeated filtration to obtain pure trophoblast cells. In addition, the invention discloses application of the fetal trophoblast cell to preparation of prenatal disgnosis medicines or kits. After one or more fetal trophoblast cells are obtained by separation, cell lysis is performed to directly obtain DNA, RNA, proteins, small RNA, methylated DNA and RNA, mitochondrial DNA and the like of the trophoblast cells, so that fetal information can be obtained. Compared with a previous fetal whole-genome acquisition method, the fetal trophoblast cell separation method and application of the fetal trophoblast cells in prenatal disgnosis have advantages of simplicity, economy, convenience in operation, high economic practicality and high clinical popularization value.
Owner:宋清 +1

Washing machine and detergent detection device thereof

The invention discloses a washing machine and a detergent detection device thereof. The detergent detection device comprises a detection electrode, an alternating voltage generation circuit, a detection circuit and a controller, wherein the detection electrode is arranged in an automatic detergent release device of the washing machine; the alternating voltage generation circuit is connected with the detection electrode and is used for generating alternating voltage and applying the alternating voltage to the detection electrode; the detection circuit is used for generating a detection signal through detecting whether two detection ends of the detection electrode are electrified or not; and the controller is connected with the detection circuit and is used for acquiring the liquid level of a detergent in the automatic detergent release device according to the detection signal. According to the detergent detection device, an oxide film can be effectively prevented from being formed on the detection electrode and a detection failure can be avoided, so that the liquid level of the detergent can be correctly judged, a user is timely reminded to add the detergent and the reliability of the washing machine is improved.
Owner:WUXI LITTLE SWAN ELECTRIC CO LTD

Polishing method and polishing apparatus

A method of polishing a substrate is disclosed. The method includes irradiating the substrate with light; measuring intensity of the reflected light; producing spectral waveform representing relationship between relative reflectance and wavelength of the light; performing a Fourier transform process on the spectral waveform to determine a thickness of the film and a corresponding strength of frequency component; determining whether the determined thickness of the film is reliable or not by comparing the strength of frequency component with a threshold value; calculating a defective data rate representing a proportion of the number of unreliable measured values to the total number of measured values; and changing the threshold value based on the defective data rate.
Owner:EBARA CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products