121results about How to "Avoid detection failure" patented technology

The present invention provides a single set of mass spectrometer capable of selectively performing the following two modes of analyses according to the purpose of analysis: the first mass spectrometry mode in which the analysis can be repeated at short intervals of time; and the second mass spectrometry mode in which the analysis can be performed with high mass resolution and high accuracy. In an embodiment of the present invention, ions ejected from an ion source 1 travel along a straight path B, on which gate electrodes 3 are provided. When a voltage is applied from an MS mode selection controller 7 to the gate electrodes 3, the ions are introduced into a loop orbit A. Located on the loop orbit A is a second ion detector 6, which is a nondestructive type of ion detector. Detection signals of the second ion detector 6 are sent to a data processor 9, which extracts flight time spectrum data from those signals and Fourier-transforms those data to convert the time axis to a frequency axis. From the frequency spectrum thus created, the mass-to-charge ratio of each ion is calculated with high accuracy. When no voltage is applied to the gate electrodes 3, the ions ejected from the ion source 1 travel along the straight path B and arrive at a first ion detector 5. This mode of analysis requires only a short period of time and can achieve a high level of time resolution.

A method of polishing a substrate is disclosed. The method includes irradiating the substrate with light; measuring intensity of the reflected light; producing spectral waveform representing relationship between relative reflectance and wavelength of the light; performing a Fourier transform process on the spectral waveform to determine a thickness of the film and a corresponding strength of frequency component; determining whether the determined thickness of the film is reliable or not by comparing the strength of frequency component with a threshold value; calculating a defective data rate representing a proportion of the number of unreliable measured values to the total number of measured values; and changing the threshold value based on the defective data rate.

A mobile body detection device: determines, in the case where a position of a first mobile body and a position of a second mobile body are approximately the same, that a mobile body is detected at the position; and determines, in the case where the position of the first mobile body and the position of the second mobile body are different and any of first reliability and second reliability exceeds a threshold, that a mobile body is detected at a position of a mobile body corresponding to the reliability exceeding the threshold.