The present application relates to a SiC
Schottky diode with wide
process window and a manufacturing method thereof, wherein the SiC
Schottky diode comprises a first conductive type
semiconductor substrate, a first conductive type
semiconductor epitaxial layer, a patterned
silicon dioxide layer and a first
metal layer; a first surface of the first conductive type
semiconductor epitaxial layer is provided with a second conductive type main junction, a projection of the patterned
silicon dioxide layer on the first conductive type semiconductor substrate is located within a projection of the second conductive type main junction on the first conductive type semiconductor substrate; and a projection of the first
metal layer on the first conductive type semiconductor epitaxial layer overlaps with a projection of the patterned
silicon dioxide layer on the first conductive type semiconductor epitaxial layer. The present application utilizes an angular
dielectric layer structure to realize the lifting of the terminal
metal, and can improve the overall reverse withstand
voltage and reliability of the device.