The utility model discloses a
particle beam electrostatic deflector, which comprises an insulating base and an
electrode group body consisting of a plurality of groups of poles, a
circular cavity is formed in the circle center of the insulating base, a plurality of first through holes are uniformly formed in the circumference of the inner side wall of the cavity, and grooves are formed in the upper end face and the lower end face of the insulating base; the plurality of groups of poles are circumferentially arranged on the insulating base to form a circular array, an insulating gap is arranged between each group of poles and is marked as H. The
electrode group body comprises a boss part and a
welding part, the
diameter of the boss part is larger than that of the cavity, second through holes with the same number as the first through holes are formed in the boss part, and the
welding part is welded to the boss part. And the first through hole and the second through hole correspond to each other to form a through hole. According to the utility model, the complex structure of the pole is simplified, the distribution of an
electric field in each direction is more uniform, the deflection precision is improved, and the cylindricity and roundness of an
electron beam channel hole are ensured.