2results about How to "Reduce mechanical force" patented technology

The invention discloses a cleaning method for a semiconductor photoetching mask substrate, and belongs to the technical field of semiconductor manufacturing. According to the method, dynamic cleaning logic of step cooperation and energy matching is adopted, and the steps of interface wetting and pre-cleaning, chemical soft interface construction, low-damage mechanical stripping and synchronous washing, targeted reaction clearing, microstructure deep cleaning, interface dehydration and modification and final energy-assisted drying are sequentially executed. The method is characterized in that through the dependency relationship of chemical interface softening and low-damage mechanical stripping in sequence, the rotation speed of a substrate in each step is strictly controlled to meet the specific dynamic relationship (V2 < V1 < V4 < V3 < V5 < V6), and precise cooperation of chemical action, physical stripping and energy field cleaning is achieved. The contradiction between efficiency and substrate damage in a traditional cleaning process is effectively solved, full-scale pollutants from micron-scale particles to nano-scale molecular contamination can be removed without dead corners, and a clean, stable and secondary pollution resistant surface state is actively reconstructed at a cleaning end point; and the cleanliness and the service life of the mask substrate and the yield of a downstream photoetching process are remarkably improved.

The invention relates to the technical field of flywheel energy storage, and discloses a flywheel energy storage braking energy recovery system and method.The flywheel energy storage braking energy recovery system comprises a driving device, a shell is fixedly connected to the end of the driving device, a sealing cover is arranged at the end, away from the driving device, of the shell, and the sealing cover is in threaded connection with the shell through a screw; and the output end of the driving device is fixedly connected with a rotating rod. The recycling component is arranged in the shell, the flywheel pushes the recycling component to rotate in the shell through friction when rotating, after the flywheel completes braking work, the recycling component and the flywheel synchronously stop through friction, and the recycling component pushes the transmission component to deform through pressure generated when the flywheel rotates. When the flywheel starts to work, the transmission component transmits mechanical force generated by flywheel braking into the driving component through deformation, when the flywheel starts to work again, the driving component transmits the collected mechanical force to the surface of the flywheel through the contact component and pushes the flywheel to rotate, and the mechanical force needed when the flywheel is started again is reduced.