The invention belongs to the technical field of microelectronic devices and memories, and discloses a three-dimensional stacked
phase change memory and a preparation method thereof. The preparation method specifically comprises the following steps of preparing a multi-layer structure on which a horizontal
electrode layer and an insulating layer are crossly stacked, on a substrate; then
etching toform a groove and a discrete three-dimensional strip-shaped
electrode; filling an insulating medium in the groove, forming small holes in the boundary area of the three-dimensional strip-shaped
electrode and the insulating medium, sequentially depositing a
phase change material on the walls of the small holes, and filling an
electrode material in the small holes to prepare a vertical electrode, thereby obtaining the multi-layer stacked three-dimensional stacked
phase change memory. According to the present invention, by improving the whole flow process of the preparation method, a three-dimensional
phase change memory array can be established by utilizing the vertical electrode structure, and compared with the prior art, the problems of complex multi-layer stacking steps, high process implementation difficulty,
unit size miniaturization and the like of an existing three-dimensional stacked
phase change memory in process preparation, can be effectively solved.