The invention discloses a real-time
image enhancement method and
system based on CD-SEM raster scanning partitioning, and the method comprises the steps: S1, controlling an
electron beam of a CD-SEM to scan a to-be-detected region according to a raster scanning path based on a preset
image processing block size and overlapping region parameters, and obtaining an image collection block; s2, acquiring an
image acquisition block, performing
local histogram statistics,
cutting and
equalization processing on the current
image acquisition block in sequence, generating a corresponding enhanced
image processing block, and outputting the enhanced
image processing block; s3, splicing the current image
processing block with the spliced image; non-overlapped pixels between the current image
processing block and the adjacent spliced image processing block are directly spliced; and for the pixels in the overlapped region, gray fusion is carried out by adopting a weighted average
algorithm, so that a final overall enhanced image is generated. The method has the advantages of high efficiency,
low delay, low memory occupancy, seamless integration, excellent enhancement effect and the like.