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165 results about "Cymenes" patented technology

The cymenes (methylcumenes, isopropyltoluenes) constitute a group of substances of aromatic hydrocarbons, which structure consists of a benzene ring with an isopropyl group (−CH(CH₃)₂), and a methyl group (−CH₃) as a substituent. Through their different arrangement, they form three structural isomers with the molecular formula C₁₀H₁₄. They also belong to the group of C₄-benzenes. The best-known isomer is the p-cymene, it occurs in nature and is one of the terpenes.

Corrosion inhibitor intensifier and method of using the same

An aqueous organic acid composition containing a terpene as corrosion inhibitor intensifier is especially suitable for use in acidizing subterranean formations and wellbores. The composition substantially reduces the corrosive effects of the acidic solution on metals in contact with the acidic solution. Suitable terpenes include carotene, limonene, pinene, farnesene, camphor, cymene and menthol.
Owner:BAKER HUGHES INC

Rosin halogen-free scaling powder for lead-free soldering paste

InactiveCN1709638ASolve the serious problem of high temperature oxidationImprove liquidityWelding/cutting media/materialsSoldering mediaAcyl groupAlloy
The invention relates to a scaling powder, especially applying to the alloy's department such as SnAgCu, SnAgCuRE and SnAg and so on. The quality percent of the present invention is the activation dosage of the organic acid which consists of the duality acid, the three-member acid, the hydroxyl acid, the balminess acid in the fattiness race 4-30wt%,the changed capable colophony which is one or more mixed of the converged colophony, the hydrogen sulfide colophony and the divergent colophony 29-67wt%, the becoming electuary which is one or more mixed of the assembled glycol2000,the assembled glycol4000 and the assembled glycol6000 1-20wt%,the olefin as the tranquilization dosage 0.5-8wt%,the touched and altered dosage which one or more mixed of the hydrogen sulfide castor oil and the compound of the acyl and amine 1-8wt% and the remain is the impregnant of the high boiling point which is one or more mixed of the butyl dissolved fine dosage, the calorie certain alcohol of the cymene and the calorie certain alcohol of the second radicle. The invention doesn't contain the halogen and penetrate the copper mirror after welding. It has high insulated resistances, the excellent function of the assisting burning. Also it solves the problem of oxidation in the high temperature and the appropriate viscosity of the welding cream.
Owner:BEIJING UNIV OF TECH

Mild, oil-controlled and acne-removing essence

The invention belongs to the technical field of cosmetics, and in particular relates to mild, oil-controlled and acne-removing essence. The multi-effect mild, oil-controlled and acne-removing essencefor men mainly comprises the following components: water, glycerinum, propylene glycol, EDTA disodium, xanthan gum, acryloyl dimethyl taurine / VP copolymer, allantoin, panthenol, a peony foot extract,p-hydroxyacetophenone, phenoxyethanol, ethylhexylglycerin, sodium benzoate, citric acid, o-cymene-5-alcohol, a phellodendron bark extract, butanediol, 10-hydroxydecanoate, a witchhazel extract, a lactic acid bacteria / mungbean seed extract fermented product filtrate, quaternary ammonium salt-73, PET-40 hydrogenated castor oil and essence. The mild, oil-controlled and acne-removing essence can effectively balance oil, reduce skin hyperkeratosis and minimize pores, can inhibit the growth of propionibacterium acnes and reduce skin inflammation such as acne, is mild and non-irritant and achieves the oil-controlling and acne-removing effects.
Owner:NOX BELLCOW COSMETICS CO LTD

Heat-resistant flame-proof phosphorus- and silicon-containing hybrid curing agent for epoxy type electronic polymer material and preparation thereof

The invention pertains to the field of polymeric material and relates to an epoxy phosphorus-containing hybridization hardener with heat resistance and flame retardancy for electron polymer material and a preparation method thereof. The phosphorus-containing hybridization hardener is nanometer-sized organic / inorganic hybrid silicone of a hollow enclosed type or a partially enclosed type, wherein, the structure center of the silicone consists of inorganic skeleton Si-O bonds; the external end of the structure center consists of organic groups of organic phosphor or amidogen or imidogen and has a number average molecular weight of 600 to 10000 and the structural formula is as above, wherein, R< / > can be hydrogen, cymene, ethyl, n-propyl, isopropyl or butyl; X is organic containing phosphorus substituent ; Y is organic amino-containing substituent. The samples prepared with epoxy resin hardened by the hardener not only have a very good flame retardant performance, but also maintain good heat resistant and mechanical property, thus meeting the requirements for heat resistance and flame retardancy and mechanical aspects of the epoxy resin used for the electronic substrate material with high performance.
Owner:GUANGZHOU INST OF GEOCHEMISTRY - CHINESE ACAD OF SCI

Extracts derived from chenopodium plants and uses thereof

The present invention relates to pesticides. More particularly, the present invention relates to botanical pesticides. In particular, the present invention relates to compositions and methods for controlling plant-infesting pests with plant extracts and notably with compositions comprising oil extracts derived from Chenopodium sp. plant material. The invention further relates to compositions comprising such extracts as pesticidal compositions and providing the advantages of minimal development of resistance thereto, minimal toxicity to mammals, minimal residual activity and environmental compatibility. The pesticidal compositions of the present invention comprises α-terpinene, ρ-cymene, limonene, carvacrol, carveol, nerol, thymol, and carvone.
Owner:FORAGEN TECH MANAGEMENT

Method for preparing polyaniline and nano-fibre blend composite film

InactiveCN101274220AImprove hydrophilicityImproved ability to resist membrane foulingSemi-permeable membranesProtein solutionComposite film
The invention discloses a preparation method of poly-aniline nano-fibre co-mixing composite film, belonging to the preparation technique of ultra-filter composite film. The method process comprises that poly-aniline nano-fibre is dispersed to one or more out of solvent N, N-dimethylacetamide, dimethylformamide, N-cymene-2-pyrazolidinone or dimethyl sulfoxide; film-forming polymer material polysulfone is uniformly dissolved into the dispersion of the poly-aniline nano-fibre-solvent to gain casting solution; the casting solution is scraped on a glass plate and the film is formed by using water as coagulation bath, so as to gain the poly-aniline nano-fibre co-mixing composite film of the invention with high throughput and high pollution resistance. The preparation method of the poly-aniline nano-fibre co-mixing composite film has simple method, easy operation and low cost; the pure water throughput of the prepared poly-aniline nano-fibre co-mixing composite film is 1.6 to 2.3 times of that of pure polysulfone membrane and the throughput preservation rate of the poly-aniline nano-fibre co-mixing composite film on protein solution is 1.2 to1.5 times of that of the pure polysulfone membrane.
Owner:TIANJIN UNIV

Formation of low K material utilizing process having readily cleaned by-products

Nano-porous low dielectric constant films are deposited utilizing materials having reactive by-products readily removed from a processing chamber by plasma cleaning. In accordance with one embodiment, an oxidizable silicon containing compound is reacted with an oxidizable non-silicon component having thermally labile groups, in a reactive oxygen ambient and in the presence of a plasma. The deposited silicon oxide film is annealed to form dispersed microscopic voids or pores that remain in the nano-porous silicon. Oxidizable non-silicon components with thermally labile groups that leave by-products readily removed from the chamber, include but are not limited to, limonene, carene, cymene, fenchone, vinyl acetate, methyl methacrylate, ethyl vinyl ether, tetrahydrofuran, furan, 2,5 Norbornadiene, cyclopentene, cyclopentene oxide, methyl cyclopentene, 2-cyclopentene-1-one, and 1-butene.
Owner:APPLIED MATERIALS INC

Multi-functional rubber additive and method for preparing same

The invention provides a multi-functional rubber additive and a method for preparing same. The multi-functional rubber additive has an abovementioned molecular structural formula; wherein, the left side of the formula is provided with a benzothiazolyl radical; R1 is methylene, ethylidene or propylidene; R2 is cymene or ethyl; R3 is ethylidene, propylidene, methoxy or ethoxy. The preparation method comprises the steps as follows: 2-mercaptobenzothiazole (accelerant M) and alkali are dissolved in organic solvent; subsequently, chlorocarbon silane is added and reacts for 0.5-24 hours at the temperature of 20-120 DEG C under the mixing condition; the reaction products are filtrated, washed, and distilled by pressure-reduction so as to gain viscous liquid-shaped target products finally. The multi-functional rubber additive has multi-functions such as plasticizing, dispersing, promoting, reinforcing, and the like, simple preparation flow, high yield and simple separation process.
Owner:SOUTH CHINA UNIV OF TECH

Acne clearing essence and preparation method thereof

The invention discloses acne clearing essence and a preparation method thereof. The acne clearing essence is prepared from, by weight, 70-85 parts of water, 3-5 parts of an antibacterial component which comprises filtrate of a fermented product of lactobacillus / pear branches, extract of the amur corktree bark, extract of white willow bark, extract of rehmannia roots, extract of chinaberry leaves, extract of herba houttuynia, wild soybean protein, glycolic acid and o-cymene-5-ol, 0.05-2 parts of menthol, 0.5-2 parts of ethanol, 0.05-0.2 part of borneol, 1-5 parts of extract of peony roots, 0.5-1.5 parts of boric acid, 0.1-0.12 part of hydroxy methyl ester, 4-8 parts of propylene glycol and 5-10 parts of glycerin. According to the acne clearing essence, a good acne clearing effect on skin tissue can be achieved, the skin repairing function is promoted, and the skin activity is restored; besides, a remarkable curative effect on pimples and acne vulgaris can be achieved, and meanwhile the acne clearing essence can diminish inflammation and resist germs, and therefore is safer to use.
Owner:广州铭心化妆品有限公司

Toothpaste containing lactobacillus paracasei and preparation method of toothpaste

ActiveCN108324675APrevent and relieve oral problemsFormula system is stableAntibacterial agentsCosmetic preparationsToothpastePyrophosphate
The invention belongs to the technical field of oral cavity cleaning articles, and particularly relates to toothpaste containing lactobacillus paracasei and a preparation method of the toothpaste. Thetoothpaste comprises 0.5-1% of a sweetening agent, 0.05-0.1% of o-cymene-5-ol, 0.4-0.8% of sodium pyrophosphate, 10-15% of glycerinum, 0.3-0.8% of carboxymethyl cellulose sodium, 0.5-1% of xanthan gum, 35-50% of sorbitol, 5-10% of silicon dioxide, 0.3-0.7% of a coloring agent, 10-15% of hydryoxyapetite, 2-3% of a surfactant, 0.5-1% of the lactobacillus paracasei, 0.8-1.5% of essence and the balance of water. The toothpaste is stable in formula system, can inhibit dental plaque, removes bad breath, can prevent and relieve oral cavity problems such as periodontitis and gingivitis, has an effectof freshening breath, and has a good oral cavity cleaning and nursing effect.
Owner:SANJIAO ORAL HEALTH CO LTD +1

Preparation method of L-carnitine

The invention relates to a method for preparing L-carnitine by asymmetric catalytic hydrogenation reduction. Alkyl 4-chloroacetoacetate is used as a raw material, [RuCl(cymene)(S-BINAP)]Cl[chloro[(S)-(-)-2,2'-di(diphenylphosphine)-1,1'-binaphthyl](p-cymene)ruthenium chloride(II))] is used as a catalyst, and amination and hydrolysis reaction are carried out to obtain the L-carnitine product. The amination reaction does not need any solvent or virulent cyanide. The chemical purity of the L-carnitine product is higher than 97%, and the specific rotation [alpha]20D is -29 -32. The invention has the advantages of high reaction speed, stable catalytic system, low pressure required by the reaction process, high conversion rate, no need of solvent in the amination reaction, and is convenient to operate, thereby lowering the cost, reducing the environmental pollution and being convenient for large-scale production.
Owner:GUANGXI XINJING TECH +2

Toothpaste for eliminating teeth stain and inhibiting dental plaque

The invention discloses toothpaste for eliminating teeth stain and inhibiting dental plaque, which includes cordyceps militaris essence, O-cymene-5-ol, potassium nitrate, sodium phytate, zinc citrate, and polyvinylpyrrolidone. The toothpaste contains multiple functional components such as the cordyceps militaris essence, the O-cymene-5-ol, the potassium nitrate, the sodium phytate, the zinc citrate, and the polyvinylpyrrolidone, so that the toothpaste can effectively inhibit adhesion and accumulation of oral bacteria and eliminate color stains on surfaces of teeth and also has effects of astringency and sensitivity reduction since the cordyceps militaris essence is matched with bacterial-inhibiting and stain removal factors and antibacterial factors which are mile and irritation-free. In the toothpaste, the functional components are cooperated so as to fundamentally eliminate the teeth stain and inhibit generation of dental plaque, thereby caring oral cavity and whitening teeth. After long time use, the toothpaste can remove the teeth stain and whiten teeth, and also can prevent oral diseases, such as periodontitis, gingivitis, dental calculus, dental caries and the like.
Owner:健天然(中国)有限公司

Phthorimaea operculella zell attractant

The invention discloses a phthorimaea operculella zell attractant comprising the following components in parts by volume: 8-10 parts of alcohol compound, 0.5-1.5 parts of ester compound, 2-3 parts of aldehyde compound, 1-3 parts of terpene compound and 0.1-0.5 part of other compound, wherein the alcohol compound is any one of 1,8-eucalyptol and palustrol; the ester compound is any one of methyl jasmonate, anti-4, cis-7-C13 diene acetate and anti-4, cis-7, 10-C13 triene acetate; the aldehyde compound is any one of heptaldehyde, octyl aldehyde and nonaldehyde; the terpene compound is any one of limonene, phellandrene, terpinene, caryophyllene, pinene, elemene, ocimene, germacrene, farnesene and isolongifolene; and the other compound is any one of nicotine, solanone, norsolandione and para-cymene. The attractant is environment-friendly, does not injure natural enemies of pests and has remarkable attracting effect on phthorimaea operculella zell adults.
Owner:YUNNAN AGRICULTURAL UNIVERSITY

Method of preparing metalloporphyrin/silicon dioxide degradation agent

This invention relates to a method for preparing degradation agent of organic infectants, characterizing in dissolving a metal porphyrin derivant in an organic solvent then adding metasilicic acid ethyl and a catalyst[HNR2 (R refers to cymene, ethyl, propyl, butyl, H or phenyl), HCl, H2SO4, MeC6H4SO3H, AcOH, Al2O3, ZnO or M(OH)n (M is a metal, n=1,2)] in the mol ratio: 0.002-0.006 : 1, mixing them fully and heating them for reacting sufficiently then to be cleaned with an organic solvent of 100-400ml / g metal porphyrin derivant to be dried to get the metal porphyrin / SiO2 degradation agent.
Owner:HANGZHOU NORMAL UNIVERSITY

Preparation and purification method for optical enantiomer of ornidaxole

The invention provides a preparation and purification method of ornidazole optical enantiomer. Under suitable conditions, chloromethyl acetate reacts with 2-cymene-5 nitro imidazole in order to acquire nitro acetate imidazole methyl ester; chiral 3-chlorine-1, 2 propanediol reacts with thionyl chloride, and the obtained product is oxygenated, so that chiral cyclic sulfate is produced; finally, the nitro acetate imidazole methyl ester reacts with the chiral cyclic sulfate to generate a product, which is hydrolyzed to obtain the corresponding ornidazole optical enantiomer. The invention has the advantages of convenient operation and high purity of products and is applied to industrial production.
Owner:XIAN TIANYI QINKUN PHARMA

Spatial inhibitors, deterrents and repellents for mosquitoes and midges

InactiveUS20070049644A1Effective contactBiocideHydroxy compound active ingredientsCarveolNeryl acetate
Certain components of citrus fruits and oxidation products of limonene are effective deterrents, repellents and / or spatial inhibitors for mosquitoes and biting midges. The compounds that have been found to be deterrents, repellents and infibitors for mosquitoes and biting midges are neryl acetate, citronellyl acetate, geranyl acetate, hydroxy-p-cymene, citral, α-terpineol, citronellal, linaloyl acetate, citronellol, terpen-4-ol, tetrahydrocarvone, products of oxidized oxidized limonene inclusive of d- and l-carvone, (+) limonene oxide, (−) limonene oxide, cis and tran carveol, a diol and an aldehyde, and mixtures thereof.
Owner:BEDOUKIAN RES

Antiparasitic compositions and methods

ActiveUS20150150838A1Enhance and modify flavorEnhance and modify and colorBiocideHydroxy compound active ingredientsEmulsionMedicine
Compositions and methods for treating parasitic infections are provided. The compositions can include two or more of alpha-pinene, linalyl acetate, para-cymene, and thymol octanoate. The compositions and methods can be effective against, for example, protozoan parasites, helminthic parasites, nematodes, trematodes, flukes, cestodes, and the like. Formulations made from the composition are also provided, including formulations in which the composition is combined with a carrier to form a food product and / or a drink. The formulation can be, for example, a suspension, a solution, or an emulsion in an oily or an aqueous carrier; likewise, the composition can be provided in an encapsulated or microencapsulated form.
Owner:INTERCONTINENTAL GREAT BRANDS LLC

Method for producing p-cymene by continuous production and apparatus thereof

The invention discloses a method for continuously producing p-cymene and a device thereof. The method comprises the following steps: 0.1kg-50.0kg of catalyst is filled in a reactor, and the catalyst is Pd / C catalyst; inertia eluant gas is pumped into the catalyst and industrial dipentene raw material is continuously pumped in at the speed being equal to 0.5h<-1>-5.0h<-1> of the airspeed when the temperature of the reactor reaches 150-400 DEG C; the industrial dipentene raw material is preheated and gasified, and has contact reaction with the catalyst; the obtained reaction product continuously enters a condenser, and the p-cymene is obtained. The device consists of a raw material storage tank, a preheater, a gasifier, the reactor, the condenser and a product storage tank. A metering pump which can be used for continuous feeding with constant flow is arranged between the preheater and the raw material storage tank, and the inlet of the metering pump is communicated with the raw material storage tank; the metering pump is connected with the preheater and then is communicated with the top of the reactor through the gasifier, and the bottom of the reactor is connected with the product storage tank by the condenser. The invention has the advantages of simple operation, good controllability, no waste production, no solvent and other reaction reagents, recycled catalyst, purity and greening, etc.
Owner:INST OF CHEM IND OF FOREST PROD CHINESE ACAD OF FORESTRY

Composition capable of removing acne and fading scars

The invention discloses a composition capable of removing acne and fading scars. The composition is prepared from a salvia miltiorrhiza root extract, a clove bud extract, a scutellaria baicalensis extract, papain, aloe barbadensis leaf meal, asiaticoside, dipotassium glycyrrhizinate and o-cymene-5-ol. According to the composition disclosed by the invention, the clove bud extract and the papain arematched together to promote transdermal absorption of plant acne-removing repairing agents (the salvia miltiorrhiza root extract, the scutellaria baicalensis extract, the aloe barbadensis leaf meal and the asiaticoside); the dipotassium glycyrrhizinate and the o-cymene-5-ol are also added into the composition in addition to plant ingredients, and can be compounded with the plant ingredients, so that on one hand, the irritation of chemicals is reduced; on the other hand, the inhibitory effect on bacteria causing the acne can be improved, and a better antibacterial effect is achieved. In addition, pores can be cleared; the growth of pathogenic bacteria groups in hair follicles can be inhibited; follicular cornification can be improved. The invention further provides a skin care product containing the composition capable of removing the acne and fading the scars.
Owner:广州睿晞生化科技有限公司

Active anti-inflammatory toothpaste

The invention discloses active anti-inflammatory toothpaste. The active anti-inflammatory toothpaste comprises cordyceps militaris essence, a propolis extract, manuka honey, O-cymene-5-alcohol, nitrate of potash, lemon tea tree oil and fragonia oil. The active anti-inflammatory toothpaste contains a plurality of natural extracts, under the joint effect of active components of the multiple naturalextracts, the active anti-inflammatory toothpaste has the obvious anti-inflammatory and anti-microbial effects, can efficiently resist oral pathogens, prevent occurrence of oral diseases such as periodontitis and gingivitis, and overally improves the oral environment. If the toothpaste is used for a long time, the oral problems such as dental ulcer, gingivitis and hemodia can be improved obviously.
Owner:健天然(中国)有限公司

Microbial organic fertilizer for improving saline-alkali soil and preparation method thereof

The invention provides a microbial organic fertilizer for improving saline-alkali soil. The fertilizer comprises the following raw materials: fulvic acid, peat, salicylic acid, municipal sludge, sesame paste, mannitol, sulfated polysaccharide, cymene, rare earth isoprene rubber powder, alfalfa plant, pumice, psyllium husk powder, salt tolerant Rhodopseudomonas capsulata, and Halomonas halophiles. The invention also provides a preparation method of the fertilizer. The fertilizer prepared by the method provided by the invention has an effective living bacteria number of 0.74-0.77 billion cfu / g, a total nitrogen content of 3.8-4.1wt%, a total phosphorus content of 2.9-3.2wt%, a total potassium content of 3.2-3.6wt%, an organic matter content (on a dry basis) of 43.3-44.7wt%, a water content of 22.1-22.6wt%, and a pH of 5.52-5.58. The fertilizer provided by the invention has a saline-alkali soil improving effect, and can reduce the pH value of soil, the soil alkalization degree and soil salinity.
Owner:SHANDONG SUNWAY LANDSCAPE TECH

Cymene water-based formula and application thereof in external skin preparation

InactiveCN107280987AImprove stabilityAvoid low temperature crystal precipitationAntibacterial agentsCosmetic preparationsSolventDrugs preparations
The invention discloses a cymene water-based formula which is prepared from the following raw materials in parts by weight: 0.01-0.1 part of cymene, 1.5-20 parts of a wetting agent, 0-7.0 parts of ethanol and 0.01-1.0 part of a solubilizer. According to the formula, the problem that the cymene tends to be separated out in the formula system is solved. The formula can further serve as a component in a transparent external drug preparation or an external skin preparation and is high in stability.
Owner:SHANGHAI ZHONGYI DAILY CHEM CO LTD

Liquid cymene and preparation method and application thereof

The invention relates to liquid cymene and a preparation method and application thereof. The liquid cymene is prepared by mixing 10-15% of O-cymene-5-alcohol, 10-50% of 1,2-pentanediol, 10-40% of PPG-26-butanol polyether-26, 15-40% of PEG-40 hydrogenated castor oil and 1-10% of water by weight percentage. In the liquid cymene, the content of the O-cymene-5-alcohol can reach 10-15%, and meanwhile,the liquid cymene has the advantages of being high in stability, low in irritation and excellent in antibacterial and acne-removing efficacy.
Owner:广州汇朗生物科技有限公司

Moisturizing anti-corrosion facial mask liquid without irritation and preparation method of moisturizing anti-corrosion facial mask liquid without irritation

The invention provides a moisturizing anti-corrosion facial mask liquid without irritation and a preparation method of the moisturizing anti-corrosion facial mask liquid without irritation. The moisturizing anti-corrosion facial mask liquid without irritation is prepared from the following raw materials in parts by weight: propylene glycol, sodium hyaluronate, a silkworm extract, panthenol, a witchhazel extract, sodium PCA, an asteraceae plant extract, a haberlea rhodopensis leaf extract, glycerine, an olive extract, hydrolyzed algin, chlorphenesin, phenoxyethanol, dipotassium glycyrrhizinate,allantoin, piroctone olamine, citric acid, O-cymene-5-ol, a chondrus crispus extract, rutin, hydroxy cinnamic acid, tocopherol, 4-terpineol and the balance of water. An anti-corrosion facial mask prepared by utilizing the anti-corrosion facial mask liquid provided by the invention is good in antibacterial effect and has relatively good effects of resisting bacteria, preserving moisture, whiteningskin, recovering thin wrinkles, shrinking pores and the like.
Owner:连云港索祺科技有限公司

Acne-removing and oil-controlling facial cleanser and preparation method thereof

The invention relates to the technical field of cosmetics, in particular to acne-removing and oil-controlling facial cleanser and a preparation method thereof. The acne-removing and oil-controlling facial cleanser mainly comprises the following formula components: EDTA disodium, citric acid, a glycosyl trehalose mixture, sodium laureth sulfate, glycerinum, cocamidopropyl betaine, sodium lauroyl glutamate, decyl glucoside, an acrylic ester copolymer, sodium hydroxide, a soapberry extract, a witch hazel extract, O-cymene-5-alcohol, carbon powder and the balance of water. The facial cleanser can realize the gentle cleaning effect and also can realize the effects of diminishing inflammation and removing acne.
Owner:中山市艾丽意素生物科技有限公司

Techniques promoting adhesion of porous low K film to underlying barrier layer

Adhesion of a porous low K film to an underlying barrier layer is improved by forming an intermediate layer lower in carbon content, and richer in silicon oxide, than the overlying porous low K film. This adhesion layer can be formed utilizing one of a number of techniques, alone or in combination. In one approach, the adhesion layer can be formed by introduction of a rich oxidizing gas such as O2 / CO2 / etc. to oxidize Si precursors immediately prior to deposition of the low K material. In another approach, thermally labile chemicals such as alpha-terpinene, cymene, and any other non-oxygen containing organics are removed prior to low K film deposition. In yet another approach, the hardware or processing parameters, such as the manner of introduction of the non-silicon containing component, may be modified to enable formation of an oxide interface prior to low K film deposition. In still another approach, parameters of ebeam treatment such as dosage, energy, or the use of thermal annealing, may be controlled to remove carbon species at the interface between the barrier and the low K film. In a further approach, a pre-treatment plasma may be introduced prior to low k deposition to enhance heating of the barrier interface, such that a thin oxide interface is formed when low K deposition gases are introduced and the low K film is deposited.
Owner:APPLIED MATERIALS INC
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