The invention provides a tough low-stress super-thick AlTiN-based
coating as well as a preparation method and application thereof, and belongs to the technical field of
surface engineering and functional coatings. The
coating is obtained through deposition of a high-power pulse magnetron
sputtering technology, and the film-substrate
binding force is enhanced through glow cleaning and
ion source cleaning pretreatment in the preparation process; by utilizing the
advantage of uniform and controllable energy of a high-power pulse magnetron
sputtering technology, a high-density
plasma region is constructed between a target material and a substrate, so that not only can an extremely high
deposition rate be obtained, but also the
residual stress of the
coating is controllable. The prepared coating is excellent in
mechanical property, the nanometer
hardness is larger than or equal to 30 GPa, the
binding force is larger than 100 N, the
residual stress under the thickness of 21 micrometers is only-4.5 GPa, and the
cutting edge of the prepared coating tool is sharp and smooth. The method can be widely applied to high-speed heavy-load
cutting tools, molds and other wear-resistant parts, and the service life can be remarkably prolonged.