2results about How to "High precision temperature control" patented technology

The utility model relates to a rotor refrigerating plant of vacuum centrifuge, including mounting seat, semiconductor refrigeration subassembly and fluid passage, semiconductor refrigeration subassembly is used to form refrigeration end and heat -generating end, the heat -generating end is pasted with mounting seat, the refrigeration end is used to radiate refrigeration to rotor, the mounting seat is used to bear semiconductor refrigeration subassembly and conduction heat, fluid passage sets up in mounting seat, fluid passage is used to flow circulation refrigerant and take away the heat of mounting seat, the utility model discloses a clever combination of the refrigeration of semiconductor refrigeration subassembly and fluid passage circulation refrigerant heat dissipation, forms stable temperature difference in vacuum environment, utilizes heat radiation and exchanges heat to give rotor cooling, has solved the rotor refrigeration heat dissipation problem of vacuum centrifuge.

The invention relates to the technical field of semiconductor manufacturing, and discloses a rapid temperature adjusting and cooling system for an electrostatic chuck (ESC), which comprises a cooling liquid management module, a low-temperature cooler is connected through a low-temperature cooling unit, a temperature monitor is arranged in the low-temperature cooler, and temperature data of cooling liquid in the low-temperature cooler is monitored in real time; a normal-temperature cooling unit is connected with a normal-temperature cooler, a temperature monitor is arranged in the normal-temperature cooler to monitor temperature data of cooling liquid in the normal-temperature cooler in real time, and a mixing adjusting module is connected with a mixing cavity to receive cooling liquid from the low-temperature cooler and the normal-temperature cooler and mix the cooling liquid. The intelligent control module is connected with the mixing adjusting module, deploys a temperature monitor, monitors temperature data of cooling liquid in a mixing chamber, calculates a temperature demand difference and then outputs a control instruction to adjust the temperature of the cooling liquid in the mixing chamber according to a calculation result, and the operation execution module takes an electrostatic chuck (ESC) as a carrier, receives the mixed cooling liquid and sends the mixed cooling liquid to the mixing adjusting module. And the etching operation and the Decuck operation are executed.