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45results about How to "Monitoring impact" patented technology

Monitoring method for hydraulic fracturing based on distributed optical fiber sound monitoring and distributed optical fiber temperature monitoring

ActiveCN110331973AReal-time monitoring of fracturingMonitoring impactSurveyConstructionsThermodynamicsHydraulic fracturing
According to a monitoring method for hydraulic fracturing based on distributed optical fiber sound monitoring and distributed optical fiber temperature monitoring, sound signals reflected from a downhole by single-mode sound-sensing optical fibers as well as temperature signals reflected from the downhole by multi-mode temperature-sensing optical fibers are processed to obtain: whether each to-be-fractured interval is fractured or not, and / or the real-time flow rate and / or water cut of each fractured interval in the post-fracture production process. The monitoring method described in the invention is a near-field monitoring method, and can monitor whether each perforation in each fractured interval is fractured or not in real time; and multi-stage hydraulic fracturing can be monitored through once running into the downhole, and the influences of a current to-be-fractured interval on the adjacent fractured intervals can be monitored.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Response method for free ARP request and gateway device thereof

The invention discloses a response method for free ARP (address solution protocol) request and a gateway device for the application of the method. The method comprises the following steps: the gateway device, when receiving the free ARP request with the same IP address as the gateway device, determines whether the source MAC (media access control) address of the free ARP address is a dependable authorized MAC address; and if the source MAC address is the dependable authorized MAC address, the gateway device allows the free ARP request with the same IP address as the gateway device to be transmitted in the internet. By configuring the dependable authorized MAC address on the gateway device, the invention leads the gateway device to carry out corresponding processing when receiving the free ARP request with the same IP address as the gateway device according to whether the source MAC address of the free MAC request is the dependable authorized MAC address. The IP address conflict can be effectively avoided without impact on the monitoring to an illegal network device of a network monitoring device.
Owner:NEW H3C TECH CO LTD

Model test apparatus and test method for monitoring dam saturation line

InactiveCN103245391AThe effect of displacement can be monitoredMonitoring the Effects of DisplacementLevel indicators by pressure measurementWater levelModel test
The invention discloses a model test apparatus for monitoring a dam saturation line. The model test apparatus comprises a model tank; an upstream-side drainage mechanism which is communicated with the inside of the model tank is arrange at one end of the model tank, a water level monitoring mechanism and a downstream-side drainage mechanism which are communicated with the inside of the model tank are arranged at the other opposite end of the model tank, and a water inlet mechanism which is communicated with the inside of the model tank is arranged at the bottom of the model tank; a pressure measuring mechanism which is communicated with the inside of the model tank is arranged in the front of the model tank; and a model is arranged in the model tank, and a dam displacement monitoring mechanism is arranged on the model. The invention further discloses a test method implemented by the aid of the apparatus. The model test apparatus and the test method have the advantages that the model test apparatus and the test method can be applied to indoor simulation tests and research on dam saturation lines in various structural forms and filling types under various working conditions, changes of the saturation line under different working conditions can be observed via indoor sand tank model testes, main influencing factors and relevant change laws of retardation of the saturation line are studied, and data and reference are provided for further theoretical study.
Owner:SHANDONG UNIV

Manhole cover monitoring system and method based on optical fiber sensing

The invention discloses a manhole cover monitoring system and method based on optical fiber sensing. The manhole cover monitoring system comprises detection optical fibers, signal demodulation analysis equipment, state comprehensive analysis equipment and graphical interface display equipment, wherein the detection optical fibers comprise a plurality of optical fibers which enable a plurality of manhole covers to constitute a manhole cover monitoring network; the signal demodulation analysis equipment is connected with the detection optical fibers; the state comprehensive analysis equipment is connected with the signal demodulation analysis equipment; the graphical interface display equipment is connected with the state comprehensive analysis equipment. The manhole cover monitoring system has larger manhole cover detection range and higher positioning accuracy, and the monitoring performance is not affected by external environmental factors.
Owner:WUHAN WUTOS

Suspension bridge large-diameter secant pile gravity type anchorage foundation enclosure structure and construction method

The invention discloses a suspension bridge large-diameter secant pile gravity type anchorage foundation enclosure structure and a construction method. The suspension bridge large-diameter secant pile gravity type anchorage foundation enclosure structure comprises a plurality of I-stage secant piles and a plurality of II-stage connecting piles, the I-stage secant piles and the II-stage connecting piles are sequentially and circularly connected and enclose to form a circular enclosure, and a plurality of dewatering wells are arranged in a foundation pit in the enclosure; and waterproof curtains are arranged at the joints of the outer walls of the I-stage secant piles and the II-stage connecting piles. According to the design, the structure is simple, the lining does not need to be constructed through a reverse construction method in the excavation process, therefore, construction procedures are reduced, the construction period is shortened, damage to the enclosure structure caused by lining construction is prevented, and the application range of the suspension bridge is widened. The invention further discloses a corresponding construction method of the suspension bridge large-diameter secant pile gravity type anchorage foundation enclosure.
Owner:广西欣港交通投资有限公司 +2

Polysilicon fuse monitoring structure and monitoring method

The invention discloses a polysilicon fuse monitoring structure. The polysilicon fuse monitoring structure comprises a polysilicon fuse with specific length and width and two leading-out ends connected with two ends of the polysilicon fuse, wherein a loop of incomplete chain type ring belt surrounds the polysilicon fuse and the leading-out ends at a certain distance, and two ends of the ring belt are another two leading-out ends. The invention further discloses a monitoring method for the polysilicon fuse monitoring structure. Through the method and the structure, the distance between the chain type ring belt and the polysilicon fuse can be adjusted, so resistance value change of the incomplete chain type ring belt before and after fusing of the polysilicon fuse can be effectively monitored, and a safety distance from the polysilicon fuse to a peripheral circuit of the polysilicon fuse can be acquired.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Copper metal interconnection electromigration test structure and test method thereof

The invention discloses a copper metal interconnection electromigration test structure which comprises a horizontally arranged metal wire. The metal wire comprises a number of upper metal layers whichare horizontally arranged on the upper layer of the metal wire, a number of lower metal layers which are horizontally arranged on the lower layer of the metal wire, a number of upper metal layer connection through holes which are connected with the upper metal layers and the metal wire respectively, a number of lower metal layer connection through holes which are connected with the lower metal layers and the metal wire respectively, a number of connection wires and a number of metal plates. One end of each connection wire is connected with an upper metal layer or a lower metal layer. The invention further provides a test method of the copper metal interconnection electromigration test structure. The test structure which is designed according to the test result of the copper metal interconnection electromigration test structure provided by the invention conforms to a manufacturing process. The effect of the through hole cutting process of the upper end of the metal wire on a back-end metal interconnection structure is well monitored. A barrier layer or back-end copper metal interconnection process can be improved. The risk of mass production of a product is reduced.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP

Rotor comprehensive testing table and corresponding testing method

The invention provides a rotor comprehensive testing table which performs functions of testing insertion direction accuracy of magnetic steel, effectively monitoring spatial position of the magnetic steel in a rotor and influence of magnetic steel magnetizing amount to the spatial magnetic field of the rotor, ensuring stable comprehensive performance of a rotor which is assembled on a motor, and ensuring high quality of a finished motor. The rotor comprehensive testing table comprises a testing tooling platform and a testing control cabinet. The testing control cabinet comprises a waveform imaging structure. The testing control cabinet is provided with a spatial magnetic field scanning device. The testing tooling platform comprises a frame. The upper end surface of the frame is provided with a rotor support and a rotor driving rotating shaft rack. The rotor support and the rotor driving rotating shaft rack are arranged at two sides of the upper end surface of the frame. The rotor support is used for supporting the mandrel of a mounted rotor. The rotor driving rotating shaft rack supports a rotor driving rotating shaft which is connected with the output end of a rotating motor.
Owner:SUZHOU LVKON NEW ENERGY TECH CO LTD

Simulation experiment device of submarine cable flashover discharge, simulation experiment system and method

ActiveCN110749805AMonitor the effect of the output voltageMonitoring impactTesting circuitsCapacitanceLow voltage
The invention discloses a simulation experiment device for submarine observation network submarine cable flashover discharge. The simulation experiment device comprises a constant-voltage power supply, submarine cable equivalent experimental models, a connecting box node electric energy convertor and a sea water short circuit device, wherein each submarine cable equivalent experimental model is used for simulating the transmission characteristics of a real submarine cable, and comprises a plurality of cable simulation circuits; each cable simulation circuit comprises a resistor-capacitor-inductor model consisting of a resistor, a capacitor and an inductor; the connecting box node electric energy convertor is used for converting high voltage on the submarine cable equivalent experimental models into low voltage to be output; the sea water short circuit device comprises a section of damaged real submarine cable, sea water and a water tank; an electrode, a grounding switch tube and a damaged real submarine cable are connected between the two sections of submarine cable equivalent experimental models, and are put in the water tank containing the sea water; and a submarine cable flashover discharge phenomenon of a practical work condition is simulated by controlling the on-off state of the grounding switch tube. The invention also discloses a simulation experiment system and methodfor reducing the harm degree of the submarine observation network submarine cable flashover discharge. The flashover discharge harm can be reduced.
Owner:ZHEJIANG UNIV

Traditional rammed wall dehydration rate testing method

PendingCN107748187AObservable water absorption-water loss lawEasy to operateMaterial capacitanceDielectricSoil science
The invention relates to a traditional rammed wall dehydration rate testing method. According to the invention, a dielectric soil moisture sensor is embedded in a soil sample of a rammed soil body, based on complete contact of the dielectric soil moisture sensor and the soil sample of the rammed soil body, change of the dielectric constant is continuously measured, by comparing with the dielectricconstant through interior calibration, or through sampling, the water mass fraction is tested, the tested water mass fraction is corrected, and the practical water content of the rammed soil body isobtained. The method has the advantages that the method is simple and practical, a change rule of the water content in the soil body can be continuously monitored, and the method performs active effects for dry-shrinkage due to dehydration, rising of capillary water, rainfall infiltration, water and salt transport research as well as protection and reinforcement engineering of the remains of earthen buildings.
Owner:DUNHUANG ACAD

Ground grid current monitoring method based on non-magnetic core sensing array

The invention relates to an earth screen current monitoring method based on a non-magnetic core sensing array. The non-magnetic-core sensing array is installed at the joint of a primary ground wire and grounding flat iron in a switch chamber so as to detect the current value in lightning waves; wherein the non-magnetic core sensing array comprises a printed circuit board, a ground screen copper bar arranged on the printed circuit board, and a magnetic field sensor which is arranged on the printed circuit board and is arranged around the ground screen copper bar. The device can effectively monitor the lightning stroke generation area and whether lightning waves invade the switch room or not, and research the influence of conventional faults on the ground grid.
Owner:STATE GRID FUJIAN ELECTRIC POWER CO LTD +1

A farmland water utilization farmland water level monitoring equipment

The invention relates to monitoring equipment, and particularly relates to field water level monitoring equipment for field water conservancy. The technical purpose to be solved is to provide the field water level monitoring equipment which can monitor the field water level more accurately without the need to see the field water level with naked eyes for field water conservancy. The equipment comprises a bottom plate, supporting rods, a cross rod and a monitoring mechanism, the supporting rods are symmetrically installed on both left and right sides of the top of the bottom plate, fixing mechanisms are arranged on the supporting rods on both left and right sides, the cross rod is installed between the upper portions of the inner side faces of the supporting rods on both left and right sides, and the monitoring mechanism is arranged in the middle of the front side face of the cross rod. By means of an observing mechanism, the water level in a field can be known by an operator more visually, and the effect of monitoring the field water level more accurately without the need to see the field water level with the naked eyes is achieved.
Owner:柴丽娜

Primer for TaqMan probe real-time fluorescence PCR (Polymerase Chain Reaction) detection on DNA SRY (Deoxyribonucleic Acid Sex-Determining Region on the Y Chromosome) gene of human genome of trace sample

The invention provides a primer for TaqMan probe real-time fluorescence PCR (Polymerase Chain Reaction) detection on a DNA SRY (Deoxyribonucleic Acid Sex-Determining Region on the Y Chromosome) gene of a human genome of a trace sample. The primer is characterized by comprising an SRY gene conserved region primer pair, an SRY gene probe, an endogenous reference gene conserved region primer pair and an endogenous gene probe. The primer and a kit are simple in preparation process, low in cost, good in specificity and high in sensitivity, the detection rate and the accuracy of the SRY gene in DNA of trace samples such as blood spots, hair and parent free plasma can be greatly increased, and an effective detection method is provided for fields such as medicinal diagnosis.
Owner:谱天福信(天津)分子诊断技术有限公司

Asynchronous and accurate calibration system for flexible bend sensor

The invention discloses an asynchronous and accurate calibration system for a flexible bend sensor, and belongs to the technical field of angle parameter calibration. The system comprises a step sliding table, a bend sensor clamping device, an adjustable beam, and a control circuit. The system comprehensively realizes the function of angle calibration by using a control chip, a displacement sensor, a temperature sensor, a humidity sensor, a pneumatic sensor, a micro air pump etc., and realizes the function of simultaneously calibrating a plurality of angle sensors by placing a plurality of motors on the motor slide rails, thereby overcoming the disadvantages of only calibrating a single angle in prior art. The system can be adjusted according to the length of the bend sensor, and has highadaptability. The system has proven mathematical theory support that a calibration formula for modeling is derived based on spatial coordinates and resistance values. The system is small in size, easyto manufacture, compact in structure and convenient in operation, and is suitable for calibration of angle parameters.
Owner:ZHENGZHOU UNIV

Robot visual balance control device for testing automatic driving system

The invention relates to the technical field of automatic driving system testing, in particular to a robot visual balance control device for automatic driving system testing, which comprises an arc-shaped mounting ring, a connecting ball matched with the arc-shaped mounting ring is movably mounted in an inner cavity of the arc-shaped mounting ring, a mounting seat is fixedly connected to the upper end of the connecting ball, and a monitoring assembly is mounted on the upper surface of the mounting seat; the suspension rod is fixed at the lower end of the outer side wall of the connecting ball and is vertically arranged; the multiple arc-shaped attaching plates are distributed and attached to the outer side wall of the fixing block in an annular array mode. The device has the beneficial effects that a mounting seat is fixedly connected to the lower end of a connecting ball, an inner cavity of a sealing cylinder is filled with hydraulic oil, and the inner cavity of the sealing cylinder is communicated with an annular pipe through a damping thin pipe, so that when the monitoring assembly is vibrated, a damping effect can be generated on sliding of a connecting rod, and vibration borne by the monitoring assembly can be buffered and damped; therefore, the device is prevented from being vibrated to influence the monitoring of the road condition.
Owner:NANTONG INST OF TECH

Conveniently monitored dry boiling machine

The invention discloses a conveniently monitored dry boiling machine which comprises a body (1) and an observation window (2). The observation window (2) is mounted on the surface of the body (1), and a cleaning device (3) is arranged on the inner wall of the observation window (2). The conveniently monitored dry boiling machine can constantly keep the observation window on the dry boiling machine body clean when medicines are produced, and the medicines are prevented from shielding the observation window and affecting workers to monitor the medicine production status.
Owner:SICHUAN PHARMA

Binding molecules for bcma and cd3

The invention discloses binding molecules for BCMA and CD3. The present invention relates to a binding molecule comprising a first and a second binding domain, wherein the first binding domain is capable of binding to epitope clusters of BCMA, and the second binding domain is capable of binding to the T cell CD3 receptor complex. Moreover, the invention provides a nucleic acid sequence encoding the binding molecule, a vector comprising said nucleic acid sequence and a host cell transformed or transfected with said vector. Furthermore, the invention provides a process for the production of the binding molecule of the invention, a medical use of said binding molecule and a kit comprising said binding molecule.
Owner:AMGEN RES (MUNICH) GMBH +1

Preparation method of model for animals with living hypertension due to drinking

The invention belongs to the technical field of medicine, and particularly relates to a preparation method of a model for animals with living hypertension due to drinking. The model can be used for the screening, the pharmacological research and the pesticide effect evaluation of the medicine for treating the living hypertension. Through the adoption of the method that on the basis of a normal SD rat, the rat freely drinks alcohol everyday, (at first, drinking the alcohol with the volume concentration of 5 to 10 % for 3 to 7 days casually, then drinking more 2 to 5 % every one week until the volume concentration is 15 to 20 %; then drinking more 1 to 3 % every one week until the volume concentration is 21 to 25 %; then drinking by lasting the same concentration) for 8 to 17 weeks, the model for the animals with the living hypertension is created. The model screening indexes are mainly systolic pressure, diastolic pressure and mean pressure, and the systolic pressure is taken as a primary one; meanwhile the indexes in blood serum and urine are taken as supplements to be used for monitoring the influence of the long-term free drinking of the gradient concentration alcohol on the rat blood pressure and the functions of visceral organs such as a liver and a kidney.
Owner:ZHEJIANG CHINESE MEDICAL UNIVERSITY

Bionic skin chip for medicine testing

The invention discloses a bionic skin chip for medicine testing, and relates to the technical field of organ chips. The bionic skin chip comprises an upper-layer chip, a middle-layer chip, a porous membrane and a lower-layer chip which are sequentially arranged from top to bottom, wherein a sinking gas channel is formed in the bottom surface of the upper-layer chip, and a through slot corresponding to the gas channel is formed in the middle-layer chip; at least three sinking Tesla micro-mixers are arranged on the upper surface of the lower-layer chip, and a first air inlet channel, a first main channel, a collection channel and a first outlet channel are formed in the upper surface of the lower-layer chip; and the upper surface of the porous membrane covers the lower parts of the through slots, and the lower surface of the porous membrane covers the collection channel. The bionic skin chip has the beneficial effects the bionic skin chip is capable of providing a gas-liquid culturing environment to skin, so that culturing of gas-liquid and liquid-phase skin tissues is realized, and a microenvironment of a human body can be well simulated.
Owner:HEFEI UNIV

Field water level monitoring equipment for field water conservancy

The invention relates to monitoring equipment, and particularly relates to field water level monitoring equipment for field water conservancy. The technical purpose to be solved is to provide the field water level monitoring equipment which can monitor the field water level more accurately without the need to see the field water level with naked eyes for field water conservancy. The equipment comprises a bottom plate, supporting rods, a cross rod and a monitoring mechanism, the supporting rods are symmetrically installed on both left and right sides of the top of the bottom plate, fixing mechanisms are arranged on the supporting rods on both left and right sides, the cross rod is installed between the upper portions of the inner side faces of the supporting rods on both left and right sides, and the monitoring mechanism is arranged in the middle of the front side face of the cross rod. By means of an observing mechanism, the water level in a field can be known by an operator more visually, and the effect of monitoring the field water level more accurately without the need to see the field water level with the naked eyes is achieved.
Owner:柴丽娜

Conveniently monitored dry boiling machine

The invention discloses a conveniently monitored dry boiling machine which comprises a body (1) and an observation window (2). The observation window (2) is mounted on the surface of the body (1), and a cleaning device (3) is arranged on the inner wall of the observation window (2). The conveniently monitored dry boiling machine can constantly keep the observation window on the dry boiling machine body clean when medicines are produced, and the medicines are prevented from shielding the observation window and affecting workers to monitor the medicine production status.
Owner:SICHUAN PHARMA

Hydrogen conductivity abnormity intelligent diagnosis and treatment system

The invention discloses a hydrogen conductivity abnormity intelligent diagnosis and treatment system. The system comprises a washing solenoid valve A, a sample injection solenoid valve A, an acid inlet solenoid valve A, a washing solenoid valve B, a sample injection solenoid valve B, an acid inlet solenoid valve B, an ion exchange column A, an ion exchange column B, a waste liquid storage tank, a regeneration acid storage tank, a regeneration demineralized water storage tank, a quantitative regeneration pump and an automatic control system. The system can diagnose hydrogen conductivity abnormity, and can realize automatic regeneration of the ion exchange column.
Owner:XIAN THERMAL POWER RES INST CO LTD

Method and device for predicting production based on water level depth value

ActiveCN110705811BFit closelyImprove the accuracy of production forecastForecastingResourcesSoil scienceRelative yield
The embodiment of the invention discloses a method, a device and a computer storage medium for predicting yield based on a water level buried depth value, which belong to the technical field of agricultural production. The method includes: obtaining the effective root zone burial depth value of the crop at the current stage; obtaining the waterlogging stress value and the drought stress value based on the effective root zone burial depth value; coefficient and drought stress coefficient; the comprehensive stress index is obtained based on the water level buried depth value, drought stress value, waterlogging stress value, waterlogging stress coefficient and drought stress coefficient; the relative yield of crops is obtained based on the comprehensive stress index. By adopting the invention, the relative yield of the crop can be predicted more accurately based on the water level buried depth value of the area where the crop is located, while considering the influence of drought and waterlogging on the yield.
Owner:CHINA INST OF WATER RESOURCES & HYDROPOWER RES +1

Data calibration system of atmospheric pollution monitoring system

The invention discloses a data calibration system of an atmospheric pollution monitoring system. The data calibration system structurally comprises a gaseous pollutant detection module, a particulatematter detection module, a meteorological parameter sensor, a wireless communication module and a power supply management module, the gaseous pollutant detection module, the particulate matter detection module and the meteorological parameter sensor are all connected with the wireless communication module. Compared with the prior art, the data calibration system has the advantages that an airflowpower source bird repelling device is additionally arranged on the existing meteorological parameter sensor, air flow is used for low-speed rotation, during rotation, the position of a knocking head is changed; sound production copper plate can be knocked on the basis of dead weight of the knocking head, birds can be effectively prevented from staying on the meteorological sensor through knockingsound energy, birds can be prevented from defecating on the meteorological sensor, bird droppings are prevented from remaining on the meteorological sensor, the atmospheric monitoring of the meteorological sensor is not affected, the accuracy of atmospheric monitoring data is improved, and multiple times of data calibration is not needed.
Owner:吴健华

A Ground Grid Current Monitoring Method Based on Coreless Sensing Array

The invention relates to a ground grid current monitoring method based on a sensor array without a magnetic core. Install the non-magnetic core sensing array on the connection between the primary ground wire and the grounding flat iron in the switch room to detect the current value in the lightning wave; the non-magnetic core sensing array includes a printed circuit board, located on the printed The ground grid copper bar on the circuit board, and the magnetic field sensor arranged on the printed circuit board and ringed around the ground grid copper bar. The invention can effectively monitor the area where the lightning strike occurs and whether the lightning wave invades the switch room, and can study the influence of conventional faults on the ground network.
Owner:STATE GRID FUJIAN ELECTRIC POWER CO LTD +1

Response method for free ARP request and gateway device thereof

The invention discloses a response method for free ARP (address solution protocol) request and a gateway device for the application of the method. The method comprises the following steps: the gatewaydevice, when receiving the free ARP request with the same IP address as the gateway device, determines whether the source MAC (media access control) address of the free ARP address is a dependable authorized MAC address; and if the source MAC address is the dependable authorized MAC address, the gateway device allows the free ARP request with the same IP address as the gateway device to be transmitted in the internet. By configuring the dependable authorized MAC address on the gateway device, the invention leads the gateway device to carry out corresponding processing when receiving the freeARP request with the same IP address as the gateway device according to whether the source MAC address of the free MAC request is the dependable authorized MAC address. The IP address conflict can beeffectively avoided without impact on the monitoring to an illegal network device of a network monitoring device.
Owner:NEW H3C TECH CO LTD

A kind of measuring device and measuring method of MOS tube well resistance

The invention provides a measurement device and method for a well resistor of an MOS, applied to the technical field of MOS manufacture. The measurement device comprises an RC oscillator, a frequency measuring unit and a calculation unit. The RC oscillator comprises an RC circuit which controls the oscillation frequency of the RC oscillator, the RC circuit comprises a first resistor connection terminal and a second resistor connection terminal, the first resistor connection terminal and the second resistor connection terminal are connected to the two ends of the well resistor of the MOS respectively, and an output terminal of the RC oscillator is connected with an input terminal of the frequency measuring unit. The frequency measuring unit measures the oscillation frequency of the RC oscillator. The calculation unit calculates the resistance of the well resistor of the MOS according to the oscillation frequency measured by the frequency measuring unit. The resistance of the well resistor of the MOS is measured to monitor influence of resistance fluctuation of the well resistor on the MOS.
Owner:FOUNDER MICROELECTRONICS INT

Method for acquiring thickness change of photoresist and monitoring influence of photoresist thickness on graphic dimension

A method for acquiring thickness change of a photoresist comprises the following steps: providing a semiconductor substrate; forming a photoresist layer with a certain thickness on the semiconductor substrate; exposing the photoresist layer and developing to form a photoresist opening; measuring the graphic dimension of the photoresist opening; and acquiring the thickness change value of the photoresist according to the graphic dimension of the photoresist opening and a rocking curve, wherein the thickness of the photoresist layer corresponds to the intermediate point between the wave crest and the adjacent wave trough of the rocking curve. By selecting the photoresist thickness corresponding to the intermediate point between the wave crest and the adjacent wave trough of the rocking curve as the thickness monitor point, the method not only can acquire the thickness change of the photoresist, but also can monitor the influences of the photoresist thickness on the graphic dimension.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP
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