2 results about "Membrane mirror" patented technology

Embodiments of the present disclosure relate to MEMS mirror systems with slow light beam deflection. A light beam deflection system is configured to transmit a light beam with a time-varying output deflection angle. The system includes a first resonant structure configured to oscillate about a first rotational axis with a first resonant frequency, a second resonant structure configured to oscillate about a second rotational axis with a second resonant frequency, wherein the first rotational axis is parallel to the second rotational axis, and the first resonant frequency and the second resonant frequency are different and define a predetermined frequency difference, and a drive circuit configured to generate a first drive signal to drive the first resonant structure while additionally generating a second drive signal to drive the second resonant structure, such that the output deflection angle of the light beam oscillates according to a beat pattern of a beat wave, extreme values of the beat wave being modulated and defined by a periodic envelope.

This application discloses a MEMS micromirror and its manufacturing method. The micromirror includes a substrate, a mirror surface, a drive comb pair, and an isolation component. A cavity is formed on the substrate, and the two ends of the mirror surface are fixed to the substrate by a support beam assembly arranged along the cross-sectional direction of the cavity. The mirror surface deflects around the support beam assembly under the drive of the drive comb pair. The surface of the drive comb pair is uniformly covered with an insulating layer deposited by low-temperature IBD ion beam. The isolation component includes a protrusion array disposed in the cavity. The protrusion array includes at least two protrusions arranged in a regular pattern. The protrusions support the mirror surface when it deflects to its lowest point and block the airflow caused by the mirror surface deflection. This can prevent contact discharge between the fixed and moving comb teeth when the micromirror is working, improve the service life and reliability of the product, effectively block the small airflow generated when the micromirror vibrates during operation, increase the wind resistance of the mirror surface, and significantly improve the stability of the micromirror.